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1. 发明授权

US10246769B2 Thin film deposition apparatus 有权
公开(公告)号：US10246769B2
公开(公告)日：2019-04-02
申请号：US12979656
申请日：2010-12-28
申请人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
发明人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
IPC分类号： C23C14/00 , C23C14/24 , C23C14/04 , H01L51/00
摘要： A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

2. 发明申请

US20110262625A1 THIN FILM DEPOSITION APPARATUS 审中-公开
标题翻译：薄膜沉积装置
公开(公告)号：US20110262625A1
公开(公告)日：2011-10-27
申请号：US13176701
申请日：2011-07-05
申请人： Hyun-Sook PARK , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
发明人： Hyun-Sook PARK , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
IPC分类号： B05D5/06 , B05C5/00
CPC分类号： C23C14/042 , C23C14/12 , C23C14/24
摘要： A thin film deposition apparatus including a chamber; a deposition source accommodated in the chamber and configured to discharge a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet located opposite the deposition source nozzle unit inside the chamber and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction, the patterning slit sheet being spaced apart from the substrate, and the thin film deposition apparatus being configured to perform a deposition while at least one of the substrate or the thin film deposition apparatus moves relative to the other in the first direction.
摘要翻译：一种薄膜沉积设备，包括：室; 沉积源，其容纳在所述室中并且构造成排出沉积材料; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，其与所述腔室内的所述沉积源喷嘴单元相对，并且包括沿垂直于所述第一方向的第二方向布置的多个图案化狭缝，所述图案化缝隙片与所述衬底间隔开，并且所述薄膜沉积设备被配置为在所述基板或所述薄膜沉积装置中的至少一个在所述第一方向上相对于另一个移动时执行沉积。

3. 发明申请

US20120009328A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 审中-公开
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20120009328A1
公开(公告)日：2012-01-12
申请号：US13178472
申请日：2011-07-07
申请人： Jae-Kwang Ryu , Chang-Mog Jo , Hee-Cheol Kang
发明人： Jae-Kwang Ryu , Chang-Mog Jo , Hee-Cheol Kang
IPC分类号： C23C16/52 , B05D5/06 , B05C11/00
CPC分类号： C23C14/042 , C23C14/54 , C23C14/56 , H01L51/56
摘要： A thin film deposition apparatus that may be precisely aligned with a substrate during a deposition process, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
摘要翻译：可以在沉积工艺期间精确地与衬底对准的薄膜沉积设备，以及使用该薄膜沉积设备制造有机发光显示器件的方法。

4. 发明授权

US07471036B2 Shadow mask for a cathode ray tube with defined beam passages holes 失效
标题翻译：阴影射线管阴影掩模，具有限定的光束通道孔
公开(公告)号：US07471036B2
公开(公告)日：2008-12-30
申请号：US11389033
申请日：2006-03-27
申请人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
发明人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
IPC分类号： H01J29/80 , H01J29/07
CPC分类号： H01J29/80 , H01J29/07 , H01J29/81
摘要： A shadow mask for a cathode ray tube has an effective screen portion having a plurality of beam passage holes arranged in a predetermined pattern, and an inactive portion with no beam passage holes. The length of a beam passage hole at a column adjacent to a division between the effective screen portion and the inactive portion (hereinafter “the beam passage hole length”) in the long-sided direction is set to be smaller than the length of a beam passage hole placed at the short-sided center of the column. The beam passage hole length “a” at columns which are even-numbered from the long-sided center of the effective screen portion is set to satisfy the condition of 1>a/A≧0.45, compared to the length A of the beam passage hole placed at the short-sided center of relevant columns. The beam passage hole length “b” at columns which are odd-numbered is set to satisfy the condition of 1>b/B≧0.35, compared to the length B of the beam passage hole placed at the short-sided center of relevant columns.
摘要翻译：用于阴极射线管的阴罩具有有效屏幕部分，其具有以预定图案布置的多个光束通过孔以及没有光束通过孔的无效部分。与长边方向的有效屏幕部分和非活动部分之间的分界面（以下称为“光束通过孔长度”）相邻的列处的光束通过孔的长度被设定为小于光束的长度通道孔位于柱的短边中心。与有效屏幕部分的长边中心偶数编号的列的光束通过孔长度“a”设置为满足条件1> a / A> = 0.45，与光束的长度A相比通孔位于相关柱的短边中心。奇数列的光束通过孔长度“b”设定为满足条件1> b / B> = 0.35，与放置在相关的短边中心处的光束通过孔的长度B相比列。

5. 发明申请

US20060226755A1 Shadow mask for cathode ray tube 失效
标题翻译：阴影射线管阴影面具
公开(公告)号：US20060226755A1
公开(公告)日：2006-10-12
申请号：US11389033
申请日：2006-03-27
申请人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
发明人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
IPC分类号： H01J29/80
CPC分类号： H01J29/80 , H01J29/07 , H01J29/81
摘要： A shadow mask for a cathode ray tube has an effective screen portion having a plurality of beam passage holes arranged in a predetermined pattern, and an inactive portion with no beam passage holes. The length of a beam passage hole at a column adjacent to a division between the effective screen portion and the inactive portion in the long-sided direction is set to be smaller than the length of a beam passage hole placed at the short-sided center of the column. The length a of the beam passage hole adjacent to the division between the effective screen portion and the inactive portion at columns which are even-numbered from the long-sided center of the effective screen portion is established to satisfy the condition of 1>a/A≧0.45, compared to the length A of the beam passage hole placed at the short-sided center of relevant columns. The length b of the beam passage hole adjacent to the division between the effective screen portion and the inactive portion at columns which are odd-numbered from the long-sided center of the effective screen portion is established to satisfy the condition of 1>b/B≧0.35, compared to the length B of the beam passage hole placed at the short-sided center of relevant columns.
摘要翻译：用于阴极射线管的阴罩具有有效屏幕部分，其具有以预定图案布置的多个光束通过孔以及没有光束通过孔的无效部分。在与有效屏幕部分和非活动部分之间在长边方向上的分隔相邻的列处的光束通过孔的长度被设定为小于放置在短边中心的光束通过孔的长度列。建立与有效屏幕部分的长边中心偶数列的有效屏幕部分与非活动部分之间的划分相邻的光束通过孔的长度a，以满足条件1> a / 与相关柱的短边中心处的光束通过孔的长度A相比，A> = 0.45。建立与有效屏幕部分的长边中心奇数编号的有效屏幕部分与非活动部分之间的划分相邻的光束通过孔的长度b，以满足条件1> b / 与相关柱的短边中心处的光束通过孔的长度B相比，B> 0.35。

6. 发明申请

US20110220022A1 THIN FILM DEPOSITION APPARATUS 有权
标题翻译：薄膜沉积装置
公开(公告)号：US20110220022A1
公开(公告)日：2011-09-15
申请号：US13014225
申请日：2011-01-26
申请人： Jong-Won HONG , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
发明人： Jong-Won HONG , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
IPC分类号： B05C11/00 , B05B1/28 , B05C11/11
CPC分类号： C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
摘要翻译：薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离，薄膜沉积设备和基板相对于彼此移动。

7. 发明授权

US08973525B2 Thin film deposition apparatus 有权
标题翻译：薄膜沉积装置
公开(公告)号：US08973525B2
公开(公告)日：2015-03-10
申请号：US13014225
申请日：2011-01-26
申请人： Jong-Won Hong , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
发明人： Jong-Won Hong , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
IPC分类号： C23C16/00 , B05C11/00 , C23C14/04 , C23C14/24 , C23C14/54 , C23C14/56 , H01L51/52 , H01L51/56
CPC分类号： C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
摘要翻译：薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离，薄膜沉积设备和基板相对于彼此移动。

8. 发明申请

US20120083061A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20120083061A1
公开(公告)日：2012-04-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L51/56
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

9. 发明授权

US08921831B2 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
标题翻译：薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置
公开(公告)号：US08921831B2
公开(公告)日：2014-12-30
申请号：US12836760
申请日：2010-07-15
申请人： Jong-Heon Kim , Hyun-Sook Park , Jae-Kwang Ryu , Hee-Cheol Kang , Ji-Sook Oh
发明人： Jong-Heon Kim , Hyun-Sook Park , Jae-Kwang Ryu , Hee-Cheol Kang , Ji-Sook Oh
IPC分类号： H01L51/05 , C23C14/04 , C23C14/12 , C23C14/24 , H01L51/56 , H01L51/00
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.
摘要翻译：一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。

10. 发明授权

US08193011B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08193011B2
公开(公告)日：2012-06-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L33/26 , C23C16/44 , H01L21/76 , C23C16/00
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

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