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1. 发明授权

US10246769B2 Thin film deposition apparatus 有权
公开(公告)号：US10246769B2
公开(公告)日：2019-04-02
申请号：US12979656
申请日：2010-12-28
申请人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
发明人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
IPC分类号： C23C14/00 , C23C14/24 , C23C14/04 , H01L51/00
摘要： A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

2. 发明申请

US20120083061A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20120083061A1
公开(公告)日：2012-04-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L51/56
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

3. 发明授权

US08193011B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08193011B2
公开(公告)日：2012-06-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L33/26 , C23C16/44 , H01L21/76 , C23C16/00
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

4. 发明授权

US08137466B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08137466B2
公开(公告)日：2012-03-20
申请号：US12862153
申请日：2010-08-24
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积设备包括静电卡盘，多个腔室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。多个室保持在真空状态。所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中，与所述衬底分离预定距离，并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。载体用于移动静电卡盘以通过多个室。第一电源插头被安装成可以从电源孔之一附接和拆卸，以向电极供电。第一电源插头安装在静电卡盘由载体移动的路径的上游。第二电源插头被安装成可以与另一个电源孔相连接和拆卸，以向电极供电。第二电源插头安装在相对于路径到第一电源插头的下游的路径中。

5. 发明授权

US08486737B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08486737B2
公开(公告)日：2013-07-16
申请号：US12856942
申请日：2010-08-16
申请人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
发明人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
IPC分类号： H01L21/00 , H01L21/31 , H01L21/469 , B05B15/02 , B05B15/04 , C23C16/00
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3244 , H01L51/0005 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理以及使用该薄膜沉积装置制造有机发光显示装置的方法。

6. 发明申请

US20110053296A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110053296A1
公开(公告)日：2011-03-03
申请号：US12856942
申请日：2010-08-16
申请人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
发明人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
IPC分类号： H01L51/56
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3244 , H01L51/0005 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理以及使用该薄膜沉积装置制造有机发光显示装置的方法。

7. 发明授权

US08921831B2 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
标题翻译：薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置
公开(公告)号：US08921831B2
公开(公告)日：2014-12-30
申请号：US12836760
申请日：2010-07-15
申请人： Jong-Heon Kim , Hyun-Sook Park , Jae-Kwang Ryu , Hee-Cheol Kang , Ji-Sook Oh
发明人： Jong-Heon Kim , Hyun-Sook Park , Jae-Kwang Ryu , Hee-Cheol Kang , Ji-Sook Oh
IPC分类号： H01L51/05 , C23C14/04 , C23C14/12 , C23C14/24 , H01L51/56 , H01L51/00
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.
摘要翻译：一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。

8. 发明申请

US20110053300A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110053300A1
公开(公告)日：2011-03-03
申请号：US12862125
申请日：2010-08-24
申请人： Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
发明人： Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
IPC分类号： H01L51/56 , B05B17/00
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/562 , H01L27/3244 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：可以应用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。

9. 发明授权

US08968829B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08968829B2
公开(公告)日：2015-03-03
申请号：US12862125
申请日：2010-08-24
申请人： Jae-Kwang Ryu , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
发明人： Jae-Kwang Ryu , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
IPC分类号： C23C16/00 , H01L51/56 , C23C14/24 , C23C14/04 , C23C14/12 , C23C14/56 , H01L27/32 , H01L51/00
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/562 , H01L27/3244 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：可以应用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。

10. 发明授权

US08696815B2 Thin film deposition apparatus 有权
标题翻译：薄膜沉积装置
公开(公告)号：US08696815B2
公开(公告)日：2014-04-15
申请号：US12873689
申请日：2010-09-01
申请人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
发明人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
IPC分类号： C23C16/00
CPC分类号： C23C16/52 , C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.
摘要翻译：在衬底上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括多个图案化缝隙; 以及设置在所述基板和所述沉积源之间的阻挡构件，其中所述薄膜沉积设备与所述基板分离预定距离，所述基板相对于所述薄膜沉积设备移动，并且所述阻挡构件沿着其中所述衬底筛选所述衬底的至少一部分。

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