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1. 发明申请

US20110220022A1 THIN FILM DEPOSITION APPARATUS 有权
标题翻译：薄膜沉积装置
公开(公告)号：US20110220022A1
公开(公告)日：2011-09-15
申请号：US13014225
申请日：2011-01-26
申请人： Jong-Won HONG , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
发明人： Jong-Won HONG , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
IPC分类号： B05C11/00 , B05B1/28 , B05C11/11
CPC分类号： C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
摘要翻译：薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离，薄膜沉积设备和基板相对于彼此移动。

2. 发明授权

US08973525B2 Thin film deposition apparatus 有权
标题翻译：薄膜沉积装置
公开(公告)号：US08973525B2
公开(公告)日：2015-03-10
申请号：US13014225
申请日：2011-01-26
申请人： Jong-Won Hong , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
发明人： Jong-Won Hong , Seok-Rak Chang , Chang-Mog Jo , Young-Mook Choi , Jae-Kwang Ryu
IPC分类号： C23C16/00 , B05C11/00 , C23C14/04 , C23C14/24 , C23C14/54 , C23C14/56 , H01L51/52 , H01L51/56
CPC分类号： C23C16/52 , C23C14/042 , C23C14/243 , C23C14/54 , C23C14/568 , C23C16/042 , H01L51/5253 , H01L51/56
摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.
摘要翻译：薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离，薄膜沉积设备和基板相对于彼此移动。

3. 发明授权

US09450140B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same 有权
标题翻译：薄膜沉积装置及使用其的有机发光显示装置的制造方法
公开(公告)号：US09450140B2
公开(公告)日：2016-09-20
申请号：US12869830
申请日：2010-08-27
申请人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
发明人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
IPC分类号： B05D5/06 , C23C16/00 , B05D1/32 , H01L21/00 , H01L33/00 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/56 , H01L21/67 , H01L21/683 , H01L51/00 , H01L51/56 , H01L27/32
CPC分类号： H01L33/005 , C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/568 , H01L21/67173 , H01L21/67225 , H01L21/67236 , H01L21/6831 , H01L27/3211 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.
摘要翻译：一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元卡盘沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

4. 发明申请

US20130298829A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME 审中-公开
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20130298829A1
公开(公告)日：2013-11-14
申请号：US13943221
申请日：2013-07-16
申请人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
发明人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
IPC分类号： H01L33/00
CPC分类号： H01L33/005 , C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/568 , H01L21/67173 , H01L21/67225 , H01L21/67236 , H01L21/6831 , H01L27/3211 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.
摘要翻译：一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元卡盘沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中，所述第一循环单元在通过所述沉积单元时通过所述室。

5. 发明授权

US08696815B2 Thin film deposition apparatus 有权
标题翻译：薄膜沉积装置
公开(公告)号：US08696815B2
公开(公告)日：2014-04-15
申请号：US12873689
申请日：2010-09-01
申请人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
发明人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
IPC分类号： C23C16/00
CPC分类号： C23C16/52 , C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.
摘要翻译：在衬底上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括多个图案化缝隙; 以及设置在所述基板和所述沉积源之间的阻挡构件，其中所述薄膜沉积设备与所述基板分离预定距离，所述基板相对于所述薄膜沉积设备移动，并且所述阻挡构件沿着其中所述衬底筛选所述衬底的至少一部分。

6. 发明申请

US20110052791A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110052791A1
公开(公告)日：2011-03-03
申请号：US12869830
申请日：2010-08-27
申请人： Chang-Mog JO , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
发明人： Chang-Mog JO , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
IPC分类号： C23C16/52 , B05C11/00 , B05D3/00 , B05D5/00
CPC分类号： H01L33/005 , C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/568 , H01L21/67173 , H01L21/67225 , H01L21/67236 , H01L21/6831 , H01L27/3211 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.
摘要翻译：一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元卡盘沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

7. 发明申请

US20110165320A1 DEPOSITION SOURCE, THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS 审中-公开
标题翻译：沉积源，薄膜沉积装置及制造有机发光显示装置的方法
公开(公告)号：US20110165320A1
公开(公告)日：2011-07-07
申请号：US12820355
申请日：2010-06-22
申请人： Yong-Sup CHOI , Hee-Cheol Kang , Young-Mook Choi , Jong-Heon Kim , Jae-Kwang Ryu
发明人： Yong-Sup CHOI , Hee-Cheol Kang , Young-Mook Choi , Jong-Heon Kim , Jae-Kwang Ryu
IPC分类号： B05D5/06 , C23C16/00 , C23C16/44
CPC分类号： C23C14/243 , C23C14/12 , H01L51/0008 , H01L51/56
摘要： A deposition source, a thin film deposition apparatus, and a method of manufacturing an organic light-emitting display apparatus, the deposition source including: a crucible to hold a deposition material; a heater to heat the deposition material; a nozzle unit disposed at a side of the crucible; a first connector disposed between the crucible and the nozzle unit; a first valve disposed on the first connector to control the flow of the deposition material to the nozzle unit; a deposition material recovery unit to collect the deposition material; a second connector to connect the first connector to the deposition material recovery unit; and a second valve to control the flow of the deposition material through the second connector.
摘要翻译：沉积源，薄膜沉积设备和制造有机发光显示设备的方法，所述沉积源包括：用于保持沉积材料的坩埚; 用于加热沉积材料的加热器; 布置在所述坩埚的一侧的喷嘴单元; 设置在所述坩埚和所述喷嘴单元之间的第一连接器; 设置在所述第一连接器上以控制所述沉积材料流到所述喷嘴单元的第一阀; 沉积材料回收单元，用于收集沉积材料; 将第一连接器连接到沉积材料回收单元的第二连接器; 以及第二阀，以控制通过第二连接器的沉积材料的流动。

8. 发明授权

US08486737B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08486737B2
公开(公告)日：2013-07-16
申请号：US12856942
申请日：2010-08-16
申请人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
发明人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
IPC分类号： H01L21/00 , H01L21/31 , H01L21/469 , B05B15/02 , B05B15/04 , C23C16/00
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3244 , H01L51/0005 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理以及使用该薄膜沉积装置制造有机发光显示装置的方法。

9. 发明申请

US20110053296A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110053296A1
公开(公告)日：2011-03-03
申请号：US12856942
申请日：2010-08-16
申请人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
发明人： Yun-Mi Lee , Yong-Sup Choi , Hyun-Sook Park , Jong-Heon Kim , Jae-Kwang Ryu , Young-Mook Choi
IPC分类号： H01L51/56
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3244 , H01L51/0005 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理以及使用该薄膜沉积装置制造有机发光显示装置的方法。

10. 发明申请

US20110168553A1 SPUTTERING SYSTEM 失效
标题翻译：喷射系统
公开(公告)号：US20110168553A1
公开(公告)日：2011-07-14
申请号：US12825285
申请日：2010-06-28
申请人： Seung-Ho Choi , Suk-Won Jung , Young-Mook Choi , Hyun-Keun Song
发明人： Seung-Ho Choi , Suk-Won Jung , Young-Mook Choi , Hyun-Keun Song
IPC分类号： C23C14/35
CPC分类号： C23C14/352 , H01J37/32449 , H01J37/3405 , H01J37/3417 , H01J37/345 , H01J37/347
摘要： A sputtering system is disclosed. The sputtering system includes: a first sputter unit including: a first deposition material plate, a second deposition material plate, where the first and second deposition material plates face each other, and a first magnetic field generator disposed behind each of the first deposition material plate and the second deposition material plate, configured to generate a magnetic field, a second sputter unit including: a third deposition material plate, disposed next to the first deposition material plate, a fourth deposition material plate, disposed next to the second deposition plate, where the third and fourth deposition material plates face each other, and a second magnetic field generator disposed behind each of the third deposition material plate and the fourth deposition material plate, configured to generate a magnetic field, a first gas supply pipe disposed between the first and third deposition material plates, configured to discharge gas to the second and fourth deposition material plates, a second gas supply pipe disposed between the second fourth deposition material plates, configured to discharge gas to the first and third deposition material plates, a first substrate support unit, configured to support a first deposition substrate, oriented toward outer edges of the first and second deposition material plates, and a second substrate support unit, configured to support a second deposition substrate, oriented toward outer edges of the third and fourth deposition material plates.
摘要翻译：公开了溅射系统。溅射系统包括：第一溅射单元，包括：第一沉积材料板，第二沉积材料板，其中第一和第二沉积材料板彼此面对;以及第一磁场发生器，其布置在每个第一沉积材料板的后面和第二沉积材料板，被配置为产生磁场;第二溅射单元，包括：第三沉积材料板，设置在第一沉积材料板旁边;第四沉积材料板，设置在第二沉积板旁边，其中所述第三和第四沉积材料板彼此面对;以及第二磁场发生器，设置在每个所述第三沉积材料板和所述第四沉积材料板的后面，被配置为产生磁场;第一气体供给管，设置在所述第一和第二沉积材料板之间，第三沉积材料板，被配置为将气体排放到第二和第四沉积物第二气体供给管，设置在第二第四沉积材料板之间，被配置为将气体排放到第一和第三沉积材料板;第一基板支撑单元，被配置为支撑第一沉积基板，第一和第二沉积材料板和第二衬底支撑单元，其被配置为支撑朝向第三和第四沉积材料板的外边缘定向的第二沉积衬底。

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