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    • 1. 发明授权
    • CMOS image sensor and method for fabricating the same
    • CMOS图像传感器及其制造方法
    • US06380568B1
    • 2002-04-30
    • US09604772
    • 2000-06-28
    • Jae-Dong LeeSang-Joo Lee
    • Jae-Dong LeeSang-Joo Lee
    • H01L2972
    • H01L27/14609H01L27/14643
    • A CMOS image sensor containing a plurality of unit pixels, each unit pixel having a light sensing region and a peripheral circuit region, includes: a semiconductor substrate of a first conductive type; a transistor formed on the peripheral circuit region of the semiconductor substrate, wherein the transistor has a gate oxide layer and a gate electrode formed on the gate oxide layer; spacers formed on sidewalls of the gate oxide layer and the gate electrode, wherein one spacer are formed on the light sensing region; a first doping region of a second conductive type formed on the light sensing region, wherein the first doping region is extended to an edge of the gate electrode; and a second doping region of the first conductive type formed on the first doping region, wherein the second doping region is extended to an edge of a spacer formed on the light sensing region.
    • 包含多个单位像素的CMOS图像传感器,具有光感测区域和外围电路区域的每个单位像素包括:第一导电类型的半导体衬底; 形成在所述半导体衬底的外围电路区域上的晶体管,其中所述晶体管具有形成在所述栅极氧化物层上的栅极氧化物层和栅电极; 形成在栅极氧化物层和栅电极的侧壁上的间隔物,其中一个间隔物形成在光感测区域上; 形成在所述光感测区域上的第二导电类型的第一掺杂区域,其中所述第一掺杂区域延伸到所述栅电极的边缘; 以及形成在所述第一掺杂区域上的所述第一导电类型的第二掺杂区域,其中所述第二掺杂区域延伸到形成在所述光感测区域上的间隔物的边缘。