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1. 发明授权

US07957066B2 Split field inspection system using small catadioptric objectives 有权
标题翻译：使用小反射折射目标的分体现场检查系统
公开(公告)号：US07957066B2
公开(公告)日：2011-06-07
申请号：US12220983
申请日：2008-07-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang
发明人： J. Joseph Armstrong , Yung-Ho Chuang
IPC分类号： G02B27/10 , G01B11/30 , G01N21/00
CPC分类号： G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system for inspecting a specimen is provided. The system includes an illumination subsystem configured to produce a plurality of channels of light energy, each channel of light energy produced having differing characteristics (type, wavelength, etc.) from at least one other channel of light energy. Optics are configured to receive the plurality of channels of light energy and combine them into a spatially separated combined light energy beam and direct it toward the specimen. A data acquisition subsystem comprising at least one detector is provided, configured to separate reflected light energy into a plurality of received channels corresponding to the plurality of channels of light energy and detect the received channels.
摘要翻译：提供了一种用于检查样本的系统。该系统包括被配置为产生多个光能通道的照明子系统，每个产生的光能通道具有与至少一个其它光能通道不同的特性（类型，波长等）。光学器件被配置为接收多个光能通道并将它们组合成空间分离的组合光能束并将其引导到样本。提供了包括至少一个检测器的数据采集子系统，其被配置为将反射的光能分离成对应于多个光能通道的多个接收信道，并检测所接收的信道。

2. 发明申请

US20110073982A1 Inspection system using back side illuminated linear sensor 审中-公开
标题翻译：使用背面照明线性传感器的检查系统
公开(公告)号：US20110073982A1
公开(公告)日：2011-03-31
申请号：US11805907
申请日：2007-05-25
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
IPC分类号： H01L31/00 , G01N21/00
CPC分类号： G01N21/9501 , G01N21/95623 , G01N2021/8822 , G01N2021/95676
摘要： An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.
摘要翻译：提供了一种使用背面照明线性检测的改进的检测系统，用于通过传感器传播电荷。聚焦光学元件可以与背面照明的线性传感器一起使用以检查样品，背面照射的线性传感器操作以将累积的电荷从每个像素的一侧推进到另一侧。该设计包括控制从一侧到另一侧的像素栅极之间的电压分布，以便在电荷累积区域之间推进电荷。控制电压分布包括在背侧照明线性传感器阵列内的每个像素上连接连续的多晶硅栅极。多晶硅栅极和施加于其上的电压使得能够使用受控电压分布进行有效的电子前进。

3. 发明授权

US07518789B2 Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 有权
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US07518789B2
公开(公告)日：2009-04-14
申请号：US10959022
申请日：2004-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B13/14 , G03B27/54
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

4. 发明申请

US20080225282A1 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US20080225282A1
公开(公告)日：2008-09-18
申请号：US12074405
申请日：2008-03-03
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G01N21/88
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常的入射角发射; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

5. 发明授权

US07345825B2 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
公开(公告)号：US07345825B2
公开(公告)日：2008-03-18
申请号：US11171079
申请日：2005-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.

6. 发明授权

US07245438B2 Broad band objective having improved lateral color performance 有权
公开(公告)号：US07245438B2
公开(公告)日：2007-07-17
申请号：US11245591
申请日：2005-10-05
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.

7. 发明申请

US20070002465A1 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US20070002465A1
公开(公告)日：2007-01-04
申请号：US11171079
申请日：2005-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常的入射角发射; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

8. 发明授权

US06512631B2 Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 有权
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US06512631B2
公开(公告)日：2003-01-28
申请号：US09349036
申请日：1999-07-07
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B1314
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

9. 发明授权

US09793673B2 Semiconductor inspection and metrology system using laser pulse multiplier 有权
公开(公告)号：US09793673B2
公开(公告)日：2017-10-17
申请号：US13487075
申请日：2012-06-01
申请人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
发明人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
IPC分类号： G02B5/30 , G02B27/28 , H01S3/05 , H01S3/083 , H01S3/00 , G01N21/21 , G01N21/95 , G02B5/08
CPC分类号： H01S3/0057 , G01N21/21 , G01N21/9501 , G01N2201/06113 , G01N2201/0683 , G01N2201/0697 , G02B5/0816 , G02B5/3083 , G02B27/281 , G02B27/283 , G02B27/286 , H01S3/083
摘要： A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

10. 发明授权

US07869121B2 Small ultra-high NA catadioptric objective using aspheric surfaces 有权
标题翻译：使用非球面表面的小超高NA反射折射物镜
公开(公告)号：US07869121B2
公开(公告)日：2011-01-11
申请号：US11375316
申请日：2006-03-13
申请人： David R. Shafer , J. Joseph Armstrong , Yung-Ho Chuang
发明人： David R. Shafer , J. Joseph Armstrong , Yung-Ho Chuang
IPC分类号： G02B5/08
CPC分类号： G02B21/04 , G02B17/0856
摘要： A relatively high NA objective employed for use in imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. One or more elements may employ an aspheric surface. The objective may provide an uncorrected spectral bandwidth up to approximately 193 to 266 nanometers and numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
摘要翻译：提供了用于成像试样的相对较高的NA目标。该目的包括具有至少一个聚焦透镜的透镜组，该至少一个聚焦透镜被配置为接收光能并形成中间图像，定向成接收中间图像并提供中间光能的至少一个场透镜，以及定位成接收中间图像的中间图像光能并向样品施加光能。一个或多个元件可以采用非球面。该目的可以提供高达约193至266纳米的未校正的光谱带宽和超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。场透镜可以包括多于一个透镜，并且可以由与物镜中的至少一个其它透镜不同的材料形成。

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