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1. 发明授权

US07672043B2 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth 有权
标题翻译：反射折射成像系统表现出增强的深紫外光谱带宽
公开(公告)号：US07672043B2
公开(公告)日：2010-03-02
申请号：US10903494
申请日：2004-07-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B5/08
CPC分类号： G03F7/70225 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70341
摘要： A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 nanometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
摘要翻译：提供了用于成像试样的相对高的光谱带宽目标和用于成像试样的方法。该目的包括具有至少一个聚焦透镜的透镜组，该至少一个聚焦透镜被配置为接收光能并形成中间图像，定向成接收中间图像并提供中间光能的至少一个场透镜，以及定位成接收中间图像的中间图像光能并向样品施加光能。在某些情况下，目标可以提供高达约193至266纳米的光谱带宽，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。场透镜可以包括多于一个透镜，并且可以由与物镜中的至少一个其它透镜不同的材料形成。

2. 发明授权

US07646533B2 Small ultra-high NA catadioptric objective 有权
标题翻译：小超高NA反射折射目标
公开(公告)号：US07646533B2
公开(公告)日：2010-01-12
申请号：US11093850
申请日：2005-03-29
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/02 , G02B21/04 , G03F7/70225 , G03F7/70275 , G03F7/70341
摘要： A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further includes at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may include at least one Mangin element and can include a meniscus lens element.
摘要翻译：提供了用于成像试样的相对高的光谱带宽目标和用于成像试样的方法。该目的包括透镜组，其具有被配置为接收光能并形成聚焦光能的至少一个聚焦透镜。聚焦光能形成中间图像。该目的还包括位于中间图像附近的至少一个场透镜，以及定位用于从中接收中间光能并形成受控光能的反射折射装置。折反射装置可以包括至少一个Mangin元件并且可以包括弯月形透镜元件。

3. 发明授权

US07474461B2 Broad band objective having improved lateral color performance 有权
标题翻译：具有改进的侧面颜色性能的宽带物镜
公开(公告)号：US07474461B2
公开(公告)日：2009-01-06
申请号：US11825405
申请日：2007-07-05
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.
摘要翻译：公开了一种用于检查的系统和方法。该设计通常采用多达四个设计原理，包括使用来自相对低色散玻璃的至少一个透镜，来自不同于相对低色散玻璃的附加材料的至少一个附加透镜，通常匹配相对低色散玻璃的相对低的色散特性相对较低的分散玻璃。该设计还可以包括来自与相对低的分散玻璃和附加材料不同并表现出显着不同的色散功率的另外材料的至少一个另外的透镜。最后，设计可以包括定位成在物镜内插入大量颜色的透镜，间隙和附加透镜，间隙和附加透镜用于抵消所插入的颜色。

4. 发明授权

US07679842B2 High performance catadioptric imaging system 有权
标题翻译：高性能反射折射成像系统
公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译：公开了一种减小尺寸的反射折射物镜和系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。元件的直径小于100毫米。该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能并且形成用于传输到样本的受控光能。芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

5. 发明授权

US07633675B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

6. 发明申请

US20080247035A1 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

7. 发明授权

US07307783B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07307783B2
公开(公告)日：2007-12-11
申请号：US10812111
申请日：2004-03-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

8. 发明授权

US08675276B2 Catadioptric imaging system for broad band microscopy 有权
标题翻译：反射折射成像系统用于宽带显微镜
公开(公告)号：US08675276B2
公开(公告)日：2014-03-18
申请号：US10646073
申请日：2003-08-22
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00 , G02B21/00 , G02B23/00
CPC分类号： G02B21/04 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system and method for inspection is disclosed. The design includes an objective employed for use with light energy having a wavelength in various ranges, including approximately 266 to 1000 nm, 157 nm through infrared, and other ranges. The objective includes a focusing lens group having at least one focusing lens configured to receive light, a field lens oriented to receive focused light energy from said focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy. Each focusing lens has a reduced diameter, such as a diameter of less than approximately 100 mm, and a maximum corrected field size of approximately 0.15 mm. An immersion substance, such as oil, water, or silicone gel, may be employed prior to passing controlled light energy to the specimen inspected.
摘要翻译：公开了一种用于检查的系统和方法。该设计包括用于具有波长在各种范围内的光能的目标，包括大约266至1000nm，157nm至红外线等范围。该目的包括：聚焦透镜组，其具有被配置为接收光的至少一个聚焦透镜;定向成从所述聚焦透镜组接收聚焦光能并提供中间光能的场透镜;以及定位成接收中间光能从现场镜头和形成受控的光能。每个聚焦透镜具有减小的直径，例如小于约100mm的直径，以及大约0.15mm的最大校正场尺寸。在将受控的光能通过检验的样品之前，可以使用浸入物质，例如油，水或硅胶。

9. 发明授权

US07518789B2 Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 有权
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US07518789B2
公开(公告)日：2009-04-14
申请号：US10959022
申请日：2004-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B13/14 , G03B27/54
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

10. 发明授权

US07245438B2 Broad band objective having improved lateral color performance 有权
公开(公告)号：US07245438B2
公开(公告)日：2007-07-17
申请号：US11245591
申请日：2005-10-05
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.

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