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    • 6. 发明申请
    • COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
    • 计算机生成炉,曝光装置和装置制造方法
    • US20110116069A1
    • 2011-05-19
    • US13003829
    • 2009-07-17
    • Isao Matsubara
    • Isao Matsubara
    • G03F7/20G03H1/08G03B27/72
    • G03H1/08G03H1/0891G03H1/22G03H1/2286G03H2001/2276G03H2222/31
    • The present invention provides a computer generated hologram including a plurality of anisotropic cells having different refractive indices with respect to linearly polarized light in a first direction and linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, wherein the plurality of anisotropic cells are made of an identical material and includes a first anisotropic cell, a second anisotropic cell, a third anisotropic cell, and a fourth anisotropic cell which have different thicknesses, and the plurality of anisotropic cells change phases of linearly polarized light in the first direction and linearly polarized light in the second direction, thereby making a first light intensity distribution formed on a predetermined plane by the linearly polarized light in the first direction different from a second light intensity distribution formed on the predetermined plane by the linearly polarized light in the second direction.
    • 本发明提供一种计算机生成的全息图,其包括相对于第一方向上的线偏振光而具有不同折射率的多个各向异性单元,以及在与第一方向垂直于线偏振光的第二方向上的直线偏振光,其中多个 的各向异性单元由相同的材料制成,并且包括具有不同厚度的第一各向异性单元,第二各向异性单元,第三各向异性单元和第四各向异性单元,并且多个各向异性单元改变线偏振光的相位 第一方向和第二方向上的直线偏振光,从而通过线性偏振光在第一方向上通过线偏振光在预定平面上形成的第二光强度分布形成在预定平面上的第一光强度分布 第二个方向。