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    • 2. 发明授权
    • Speckle noise reduction based on longitudinal shift of sample
    • 基于样品纵向偏移的散斑降噪
    • US08687253B2
    • 2014-04-01
    • US13324845
    • 2011-12-13
    • Chung-Chieh YuIsao MatsubaraMamoru Miyawaki
    • Chung-Chieh YuIsao MatsubaraMamoru Miyawaki
    • G03H1/26
    • G03H1/0443G03H1/32G03H2001/0456G03H2001/0825G03H2001/2655G03H2227/03
    • A method and apparatus for reducing speckle noise in an image of an object are disclosed. The method includes, placing the object in an interferometer at a first position along a beam path of an object beam, irradiating the object with the object beam, moving the object from the first position to a second position by longitudinally shifting the object along the beam path of the object beam, irradiating the object with the object beam at the second position. At each of the first and second positions a holographic image formed by interference between the object beam and a reference beam is recorded. An object image with reduced speckle noise is obtained by averaging the holographic images. Either an arithmetic mean or a weighted average may be used in the averaging of the holographic images.
    • 公开了一种用于减少物体的图像中的斑点噪声的方法和装置。 该方法包括:将物体沿着物体光束的光束路径放置在干涉仪的第一位置,用物体光束照射物体,通过沿着光束纵向移动物体将物体从第一位置移动到第二位置 物体光束的路径,在物体光束的第二位置照射物体。 在第一和第二位置的每一个处记录由物体光束和参考光束之间的干涉形成的全息图像。 通过平均全息图像获得具有减少的斑点噪声的对象图像。 在全息图像的平均中可以使用算术平均值或加权平均值。
    • 9. 发明申请
    • COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
    • 计算机生成炉,曝光装置和装置制造方法
    • US20110116069A1
    • 2011-05-19
    • US13003829
    • 2009-07-17
    • Isao Matsubara
    • Isao Matsubara
    • G03F7/20G03H1/08G03B27/72
    • G03H1/08G03H1/0891G03H1/22G03H1/2286G03H2001/2276G03H2222/31
    • The present invention provides a computer generated hologram including a plurality of anisotropic cells having different refractive indices with respect to linearly polarized light in a first direction and linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, wherein the plurality of anisotropic cells are made of an identical material and includes a first anisotropic cell, a second anisotropic cell, a third anisotropic cell, and a fourth anisotropic cell which have different thicknesses, and the plurality of anisotropic cells change phases of linearly polarized light in the first direction and linearly polarized light in the second direction, thereby making a first light intensity distribution formed on a predetermined plane by the linearly polarized light in the first direction different from a second light intensity distribution formed on the predetermined plane by the linearly polarized light in the second direction.
    • 本发明提供一种计算机生成的全息图,其包括相对于第一方向上的线偏振光而具有不同折射率的多个各向异性单元,以及在与第一方向垂直于线偏振光的第二方向上的直线偏振光,其中多个 的各向异性单元由相同的材料制成,并且包括具有不同厚度的第一各向异性单元,第二各向异性单元,第三各向异性单元和第四各向异性单元,并且多个各向异性单元改变线偏振光的相位 第一方向和第二方向上的直线偏振光,从而通过线性偏振光在第一方向上通过线偏振光在预定平面上形成的第二光强度分布形成在预定平面上的第一光强度分布 第二个方向。