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    • 5. 发明授权
    • Method for the production of a magnetic head
    • 制造磁头的方法
    • US06199267B1
    • 2001-03-13
    • US09282543
    • 1999-03-31
    • Takao KoshikawaAtsuhiko Nagai
    • Takao KoshikawaAtsuhiko Nagai
    • G11B5187
    • G11B5/3967G11B5/1871G11B5/3106G11B5/3109G11B5/3116G11B5/3163G11B5/40Y10T29/49041Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A method for the production of a magnetic head, where first a lower magnetic pole is formed on a wafer. Next, a nonmagnetic write gap layer is formed on the lower magnetic pole. A coil is then formed to be sandwiched between nonmagnetic insulating layers on the nonmagnetic write gap layer. Finally, an upper magnetic pole, provided with a pole tip, is formed to contact the write gap layer on the nonmagnetic write gap layer. After formation, a focused ion beam is irradiated in the direction from a thickness of the pole tip to the lateral parts of the pole tip, the nonmagnetic write gap layer lying directly thereunder. The lower magnetic pole thereby trims the lateral parts of the pole tip while consequently decreasing the width of the pole tip. At the same time, depressed parts are formed in the lower magnetic pole in the areas extending outward from directly below the lateral parts of the pole tip. The width of the pole tip is then equalized and a width of the lower magnetic pole is sandwiched by the depressed parts. Lastly, a protective layer is formed, which is made of a nonmagnetic insulating material, fills in the depressed parts, and, at the same time, covers the upper magnetic pole and the lower magnetic pole.
    • 一种用于制造磁头的方法,其中首先在晶片上形成下磁极。 接下来,在下磁极上形成非磁性写间隙层。 然后形成线圈以夹在非磁性写间隙层上的非磁性绝缘层之间。 最后,设置有极尖的上磁极与非磁性写间隙层上的写间隙层接触。 形成后,在从极尖的厚度到极尖的侧面的方向照射聚焦离子束,非磁性写入间隙层位于其下方。 因此,下磁极修剪极尖的侧部,从而减小极尖的宽度。 同时,在从极尖的侧面的正下方向外延伸的区域中的下磁极中形成凹陷部。 然后使极尖的宽度相等,并且下磁极的宽度被凹陷部分夹持。 最后,形成由非磁性绝缘材料制成的保护层,填充凹陷部分,同时覆盖上磁极和下磁极。