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1. 发明授权

US06960381B2 Pellicle 失效
标题翻译：薄膜
公开(公告)号：US06960381B2
公开(公告)日：2005-11-01
申请号：US10634877
申请日：2003-08-06
申请人： Ikuo Matsukura , Naoko Shirota , Nana Tsushima , Kiyoshi Yamamoto , Reiko Kakita
发明人： Ikuo Matsukura , Naoko Shirota , Nana Tsushima , Kiyoshi Yamamoto , Reiko Kakita
IPC分类号： B32B3/02 , B32B27/00 , B44F1/00 , G02B1/04 , G02F1/13 , G03F1/62 , H01L21/027
CPC分类号： G03F1/62 , Y10T428/161 , Y10T428/3154
摘要： A pellicle is used for a photolithographic patterning process using a light having a wavelength of from 100 to 200 nm. The pellicle contains a pellicle membrane containing (A) a substantially linear fluoropolymer which has an alicyclic structure in its main chain, the main chain being a chain of carbon atoms, and the fluropolymer satisfying the following requirements (1) the carbon atoms in the main chain of the fluoropolymer contain a carbon atom having at least one hydrogen atom bonded thereto and a carbon atom having no hydrogen atom bonded thereto; and (2) in the measurement of a high resolution proton magnetic resonance spectrum of the fluoropolymer, a number of hydrogen atoms based on signals appearing on the higher magnetic field side higher than 2.8 ppm, is at most 6 mol % based on a total number of hydrogen atoms.
摘要翻译：将防护薄膜组件用于使用波长为100至200nm的光的光刻图案化工艺。防护薄膜组件包含一种防护薄膜组件，其含有（A）基本上为直链的含氟聚合物，其主链具有脂环结构，主链为碳链，氟聚合物满足以下要求（1）主要碳原子含氟聚合物的链含有具有与其键合的至少一个氢原子的碳原子和与其结合的不具有氢原子的碳原子; 和（2）在含氟聚合物的高分辨率质子磁共振谱的测定中，基于高于2.8ppm的较高磁场侧出现的信号，基于总数多至6mol％的氢原子数的氢原子。

2. 发明授权

US07790811B2 Pellicle and novel fluoropolymer 有权
标题翻译：薄膜和新型含氟聚合物
公开(公告)号：US07790811B2
公开(公告)日：2010-09-07
申请号：US11446242
申请日：2006-06-05
申请人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
发明人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
IPC分类号： C08F114/18
CPC分类号： G03F1/62 , C08G65/007 , C08G65/226 , G03F7/0046 , Y10T428/24331 , Y10T428/3154
摘要： A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.
摘要翻译：对于短波长的光（具有193nm的照射波长的ArF准分子激光和具有157nm的照射波长的F2准分子激光）的透明性和耐久性优异的有用氟聚合物，例如，防护薄膜组件，其中用于防护薄膜和/或粘合剂的聚合物（I）是基本上含有以下含氟原子的单元（1）的聚合物，其中形成聚合物主链的链包含碳原子和醚性氧原子，形成主链的至少一个碳原子是形成环状基团的碳原子，形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。

3. 发明授权

US06548129B2 Pellicle 有权
标题翻译：薄膜
公开(公告)号：US06548129B2
公开(公告)日：2003-04-15
申请号：US09803965
申请日：2001-03-13
申请人： Ikuo Matsukura , Naoko Shirota , Jun Irisawa
发明人： Ikuo Matsukura , Naoko Shirota , Jun Irisawa
IPC分类号： B32B300
CPC分类号： G03F1/62 , G03F1/64 , Y10T428/3154 , Y10T428/31544
摘要： A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.
摘要翻译：一种用于通过波长为至多200nm的光进行光刻图案化处理的防护薄膜组件，其包括通过粘合剂粘合到框架上的框架和防护薄膜组件，其中防护薄膜组件或粘合剂包含以下氟 - 含氟聚合物（A）：含氟聚合物（A）：具有碳原子链为主链的基本上呈直链状的含氟聚合物，在其主链中含有碳原子，具有一个或两个氢原子的碳原子与其键合的原子和与其结合的氟原子或含氟有机基团的不具有氢原子的碳原子键合。

4. 发明授权

US06660346B2 Pellicle 有权
公开(公告)号：US06660346B2
公开(公告)日：2003-12-09
申请号：US10351354
申请日：2003-01-27
申请人： Ikuo Matsukura , Naoko Shirota , Jun Irisawa
发明人： Ikuo Matsukura , Naoko Shirota , Jun Irisawa
IPC分类号： B32B300
CPC分类号： G03F1/62 , G03F1/64 , Y10T428/3154 , Y10T428/31544
摘要： A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.

5. 发明授权

US06337379B2 Fluorine-containing polymer composition 有权
标题翻译：含氟聚合物组合物
公开(公告)号：US06337379B2
公开(公告)日：2002-01-08
申请号：US09893540
申请日：2001-06-29
申请人： Ikuo Matsukura , Naoko Shirota
发明人： Ikuo Matsukura , Naoko Shirota
IPC分类号： C08F11612
CPC分类号： C08K5/06 , C09D127/12 , C08L27/12 , C08L2666/28
摘要： A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R1—O—R2 wherein R1 is a C5-12 linear or branched polyfluoroalkyl group which may have an ether bond, and R2 is a C1-5 linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.
摘要翻译：一种包含式R 1 -O-R 2的含氟溶剂的含氟聚合物组合物，其中R 1是可以具有醚键的C 5-12直链或支链多氟烷基，R 2是C 1-5直链或支链烷基和在其主链中具有含氟环结构的含氟无定形聚合物溶解在溶剂中。

6. 发明授权

US06284379B1 Fluorine-containing polymer composition 失效
标题翻译：含氟聚合物组合物
公开(公告)号：US06284379B1
公开(公告)日：2001-09-04
申请号：US09662863
申请日：2000-09-15
申请人： Ikuo Matsukura , Naoko Shirota
发明人： Ikuo Matsukura , Naoko Shirota
IPC分类号： B32B2700
CPC分类号： C08K5/06 , C09D127/12 , Y10T428/2913 , Y10T428/31507 , Y10T428/3154 , Y10T428/31678 , Y10T428/31786 , C08L27/12 , C08L2666/28
摘要： A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R1—O—R2 wherein R1 is a C5-12 linear or branched polyfluoroalkyl group which may have an ether bond, and R2 is a C1-5 linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.
摘要翻译：一种包含式R 1 -O-R 2的含氟溶剂的含氟聚合物组合物，其中R 1是可以具有醚键的C 5-12直链或支链多氟烷基，R 2是C 1-5直链或支链烷基和在其主链中具有含氟环结构的含氟无定形聚合物溶解在溶剂中。

7. 发明授权

US06201085B1 Fluorine-containing polymer composition 有权
公开(公告)号：US06201085B1
公开(公告)日：2001-03-13
申请号：US09209756
申请日：1998-12-11
申请人： Ikuo Matsukura , Naoko Shirota
发明人： Ikuo Matsukura , Naoko Shirota
IPC分类号： C08F11612
CPC分类号： C08K5/06 , C09D127/12 , Y10T428/2913 , Y10T428/31507 , Y10T428/3154 , Y10T428/31678 , Y10T428/31786 , C08L27/12 , C08L2666/28
摘要： A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R1—O—R2 wherein R1 is a C5-12 linear or branched polyfluoroalkyl group which may have an ether bond, and R2 is a C1-5 linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.

8. 发明申请

US20060240222A1 Pellicle and novel fluoropolymer 有权
标题翻译：薄膜和新型含氟聚合物
公开(公告)号：US20060240222A1
公开(公告)日：2006-10-26
申请号：US11446242
申请日：2006-06-05
申请人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
发明人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
IPC分类号： B32B3/10
CPC分类号： G03F1/62 , C08G65/007 , C08G65/226 , G03F7/0046 , Y10T428/24331 , Y10T428/3154
摘要： It is to provide a useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material. A pellicle wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following unit (1). The unit (1) is a unit containing a fluorine atom, wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group. For example, a unit represented by the following formula (A1) (wherein n is 1 or 2, RF1 is —F or —CF3, and RF2 is —F or a C1-5 perfluoroalkyl group):
摘要翻译：本发明提供一种对短波长光（具有193nm的照射波长的ArF准分子激光和157nm的照射波长的F2准分子激光）的透明性和耐久性优异的氟系聚合物，防护薄膜材料。防护薄膜组件，其中用于防护薄膜和/或粘合剂的聚合物（I）是基本上包含以下单元（1）的聚合物。单元（1）是包含氟原子的单元，其中形成聚合物主链的链包含碳原子和醚氧原子，形成主链的至少一个碳原子是形成环状基团的碳原子，并且形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。例如，由下式（A1）（其中n为1或2，R F1）表示的单元为-F或-CF 3 3，R“ F 2是-F或C 1-5〜5全氟烷基）：

9. 发明授权

US08236901B2 Fluorinated compound, fluoropolymer and method for producing the compound 失效
标题翻译：氟化合物，含氟聚合物及其制造方法
公开(公告)号：US08236901B2
公开(公告)日：2012-08-07
申请号：US12858752
申请日：2010-08-18
申请人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
发明人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
IPC分类号： C08F14/18
CPC分类号： C07C57/32 , C07C69/65 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , C07D307/20 , C08F14/18 , C08F36/20 , C08F214/18 , Y10S430/146 , C08F2/00
摘要： Provided is a novel fluorinated compound, a fluoropolymer, and a method for producing the compound. A monomer of the compound has a formula F2═CFCF2C(X)(C(O)OZ)(CH2)nCR═CHR, wherein X is a hydrogen atom, a cyano group, or a group of formula —C(O)OZ; Z is a hydrogen atom or a C1-20 monovalent organic group, n is 0, 1, or 2; and R is a hydrogen atom or a C1-20 monovalent organic group.
摘要翻译：提供了一种新的氟化化合物，含氟聚合物及其制备方法。化合物的单体具有式F2 = CFCF 2 C（X）（C（O）OZ）（CH 2）n CR = CHR，其中X为氢原子，氰基或式-C（O）OZ ; Z为氢原子或C1-20一价有机基团，n为0,1或2; 且R为氢原子或C 1-20二价一价有机基团。

10. 发明授权

US5498657A Fluorine-containing polymer composition 失效
标题翻译：含氟聚合物组合物
公开(公告)号：US5498657A
公开(公告)日：1996-03-12
申请号：US296469
申请日：1994-08-26
申请人： Norihide Sugiyama , Atsushi Watakabe , Shunsuke Yokotsuka , Atsuo Hiroi , Masaki Naritomi , Naoko Shirota , Ko Aosaki , Masaru Nakamura
发明人： Norihide Sugiyama , Atsushi Watakabe , Shunsuke Yokotsuka , Atsuo Hiroi , Masaki Naritomi , Naoko Shirota , Ko Aosaki , Masaru Nakamura
IPC分类号： C08J3/09 , C08K5/00 , H05K1/00 , C08J5/00 , B32B27/00 , C08F14/18 , C08F14/26
CPC分类号： C08J3/091 , C08J3/093 , C08K5/0008 , C08J2327/12 , H05K3/4676 , Y10T428/3154 , Y10T428/31544
摘要： A fluorine-containing polymer composition comprising a polymer having a functional group and a fluorine-containing aliphatic cyclic structure dissolved in a solvent mixture of an aprotic fluorine-containing solvent and a protic fluorine-containing solvent.
摘要翻译：一种包含溶解在非质子含氟溶剂和质子性含氟溶剂的溶剂混合物中的具有官能团和含氟脂肪族环状结构的聚合物的含氟聚合物组合物。

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