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    • 2. 发明授权
    • Liquid crystal display device
    • 液晶显示装置
    • US06255131B1
    • 2001-07-03
    • US09430133
    • 1999-10-29
    • Ikuko MoriTakuo KaitohHironobu AbeMasahiro EtoToshihiro SatohKazuhiro IshidaHajime Kudoh
    • Ikuko MoriTakuo KaitohHironobu AbeMasahiro EtoToshihiro SatohKazuhiro IshidaHajime Kudoh
    • H01L2100
    • G02F1/136213G02F1/136209G02F2202/104H01L29/6675H01L29/78633H01L29/78648
    • A method for forming a liquid crystal display device, which includes steps of forming a metal film over a substrate, patterning the metal film to form a first gate electrode and a first capacitor electrode as a part of a first capacity element, and forming a first insulating film over the metal film. The steps further include forming a first polycrystalline-silicon layer over the first insulating film, and patterning the first polycrystalline-silicon layer to form a second capacitor electrode as a part of the first capacity element and a second capacity element, while additionally including the steps forming a second insulating film over the polycrystalline-silicon layer, forming a second polycrystalline-silicon layer over the second insulating film, and patterning the second polycrystalline-silicon layer to form a second gate electrode and a third capacitor electrode as part of the second capacity element.
    • 一种形成液晶显示装置的方法,包括以下步骤:在衬底上形成金属膜,图案化金属膜以形成作为第一电容元件的一部分的第一栅电极和第一电容器电极,以及形成第一电容元件 金属膜上的绝缘膜。 所述步骤还包括在所述第一绝缘膜上形成第一多晶硅层,以及图案化所述第一多晶硅层以形成作为所述第一电容元件的一部分的第二电容器电极和第二电容元件, 在所述多晶硅层上形成第二绝缘膜,在所述第二绝缘膜上形成第二多晶硅层,以及使所述第二多晶硅层图案化以形成第二栅电极和第三电容器电极,作为所述第二绝缘膜的第二电容 元件。
    • 5. 发明授权
    • Method for controlling parallelism between probe card and mounting table, storage medium storing inspection program, and inspection apparatus
    • 用于控制探针卡和安装台之间的平行度的方法,存储介质存储检查程序和检查装置
    • US07486089B2
    • 2009-02-03
    • US11517248
    • 2006-09-08
    • Hironobu Abe
    • Hironobu Abe
    • G01R31/02
    • G01R31/2891
    • In a method for controlling a parallelism between a probe card having a number of probe pins and a mounting table, first, among the probe pins, one or more probe pins corresponding to each of plural distinct locations on an X-Y coordinate system whose origin lies at a probe center are selected. Then, a tip of each of the selected probe pins is detected to obtain position coordinates (X,Y,Z) thereof. Thereafter, a specific point on each of connection lines connecting tips of neighboring selected probe pins is selected and their position coordinates on the connection lines are calculated, wherein the position coordinates of the specific points are set as position coordinates (X,Y,Z) of tips of imaginary probe pins. Subsequently, the parallelism between the probe card and the mounting table based on the position coordinates (X,Y,Z) of the tips of the imaginary probe pins is adjusted.
    • 在用于控制具有多个探针的探针卡和安装台之间的并联性的方法中,首先,在探针中,一个或多个与XY坐标系上的多个不同位置中的每一个相对应的探针,其起点位于 选择探针中心。 然后,检测每个所选择的探针的尖端以获得其位置坐标(X,Y,Z)。 此后,选择连接相邻的所选探针的尖端的每个连接线上的特定点,并且计算它们在连接线上的位置坐标,其中将特定点的位置坐标设置为位置坐标(X,Y,Z) 假想探针的尖端。 随后,调整基于假想探针的尖端的位置坐标(X,Y,Z)的探针卡与安装台之间的平行度。