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    • 5. 发明授权
    • Method for controlling parallelism between probe card and mounting table, storage medium storing inspection program, and inspection apparatus
    • 用于控制探针卡和安装台之间的平行度的方法,存储介质存储检查程序和检查装置
    • US07486089B2
    • 2009-02-03
    • US11517248
    • 2006-09-08
    • Hironobu Abe
    • Hironobu Abe
    • G01R31/02
    • G01R31/2891
    • In a method for controlling a parallelism between a probe card having a number of probe pins and a mounting table, first, among the probe pins, one or more probe pins corresponding to each of plural distinct locations on an X-Y coordinate system whose origin lies at a probe center are selected. Then, a tip of each of the selected probe pins is detected to obtain position coordinates (X,Y,Z) thereof. Thereafter, a specific point on each of connection lines connecting tips of neighboring selected probe pins is selected and their position coordinates on the connection lines are calculated, wherein the position coordinates of the specific points are set as position coordinates (X,Y,Z) of tips of imaginary probe pins. Subsequently, the parallelism between the probe card and the mounting table based on the position coordinates (X,Y,Z) of the tips of the imaginary probe pins is adjusted.
    • 在用于控制具有多个探针的探针卡和安装台之间的并联性的方法中,首先,在探针中,一个或多个与XY坐标系上的多个不同位置中的每一个相对应的探针,其起点位于 选择探针中心。 然后,检测每个所选择的探针的尖端以获得其位置坐标(X,Y,Z)。 此后,选择连接相邻的所选探针的尖端的每个连接线上的特定点,并且计算它们在连接线上的位置坐标,其中将特定点的位置坐标设置为位置坐标(X,Y,Z) 假想探针的尖端。 随后,调整基于假想探针的尖端的位置坐标(X,Y,Z)的探针卡与安装台之间的平行度。