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1. 发明申请

WO2010104651A1 PULSED LASER MICRO-DEPOSITION PATTERN FORMATION 审中-公开
标题翻译：脉冲激光微沉积图形成
公开(公告)号：WO2010104651A1
公开(公告)日：2010-09-16
申请号：PCT/US2010/024344
申请日：2010-02-17
申请人： IMRA AMERICA, INC. , LIU, Bing , HU, Zhendong , MURAKAMI, Makoto , XU, Jingzhou , CHE, Yong
发明人： LIU, Bing , HU, Zhendong , MURAKAMI, Makoto , XU, Jingzhou , CHE, Yong
IPC分类号： B23K26/00
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译：公开了使用脉冲激光在透明基板上形成图案的方法。各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。激光束被引导通过透明基板并聚焦在目标表面上。目标材料被激光烧蚀并沉积在相对的基板表面上。通过相对于目标扫描激光束来形成例如灰度图像的图案。激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

2. 发明申请

WO2012102953A1 METHODS AND SYSTEMS FOR FIBER DELIVERY OF HIGH PEAK POWER OPTICAL PULSES 审中-公开
标题翻译：用于光纤传输高功率光学脉冲的方法和系统
公开(公告)号：WO2012102953A1
公开(公告)日：2012-08-02
申请号：PCT/US2012/021978
申请日：2012-01-20
申请人： IMRA AMERICA, INC. , CHO, Gyu Cheon , XU, Jingzhou
发明人： CHO, Gyu Cheon , XU, Jingzhou
IPC分类号： G02B6/02
CPC分类号： H01S3/302 , H01S3/0057 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/1301 , H01S3/2308 , H01S2301/085
摘要： Methods and systems for delivery of high peak power optical pulses through optical fiber are disclosed. Raman soliton generation is utilized to maintain the properties of the pulses in the delivery fiber. The apparatus can comprise any high peak power pulse source and delivery fiber supporting Raman soliton generation.
摘要翻译：公开了通过光纤传送高峰值功率光脉冲的方法和系统。利用拉曼孤子产生来保持输送纤维中脉冲的性质。该装置可以包括支持拉曼孤子生成的任何高峰值功率脉冲源和输送光纤。

3. 发明申请

WO2011123205A1 LASER-BASED MATERIAL PROCESSING APPARATUS AND METHODS 审中-公开
标题翻译：基于激光的材料加工设备和方法
公开(公告)号：WO2011123205A1
公开(公告)日：2011-10-06
申请号：PCT/US2011/026501
申请日：2011-02-28
申请人： IMRA AMERICA, INC. , XU, Jingzhou , SOHN, Jin, Young , CHO, Gyu, Cheon , SHAH, Lawrence
发明人： XU, Jingzhou , SOHN, Jin, Young , CHO, Gyu, Cheon , SHAH, Lawrence
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , Y02P40/57
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并且以足够短的脉冲宽度将激光脉冲引导到工件的区域，使得通过来自该区域的非线性光学吸收和一定数量的热影响区和热应力有效地去除材料区域内的材料，邻近区域或两者都相对于使用具有较长脉冲的激光可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在复合材料上或复合材料内的切割，切割，划线和成形特征中的至少一个。

4. 发明申请

WO2012121920A3 OPTICAL PULSE SOURCE WITH INCREASED PEAK POWER 审中-公开
公开(公告)号：WO2012121920A3
公开(公告)日：2012-09-13
申请号：PCT/US2012/026748
申请日：2012-02-27
申请人： IMRA AMERICA, INC. , XU, Jingzhou , CHO, Gyu Cheon
发明人： XU, Jingzhou , CHO, Gyu Cheon
IPC分类号： H01S3/10
摘要： In at least one embodiment time separated pulse pairs are generated, followed by amplification to increase the available peak and/or average power. The pulses are characterized by a time separation that exceeds the input pulse width and with distinct polarization states. The time and polarization discrimination allows easy extraction of the pulses after amplification. In some embodiments polarization maintaining (PM) fibers and/or amplifiers are utilized which provides a compact arrangement. At least one implementation provides for seeding of a solid state amplifier or large core fiber amplifier with time delayed, polarization split pulses, with capability for recombining the time separated pulses at an amplifier output. In various implementations suitable combinations of bulk optics and fibers may be utilized. In some implementations wavelength converted pulse trains are generated. A method and system of the present invention can be used in time domain applications utilizing multiple beam paths, for example spectroscopy.

5. 发明申请

WO2009117451A1 LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 审中-公开
标题翻译：基于激光的材料加工方法与系统
公开(公告)号：WO2009117451A1
公开(公告)日：2009-09-24
申请号：PCT/US2009/037443
申请日：2009-03-17
申请人： IMRA AMERICA, INC. , SHAH, Lawrence , CHO, Gyu, Cheon , XU, Jingzhou
发明人： SHAH, Lawrence , CHO, Gyu, Cheon , XU, Jingzhou
IPC分类号： B23K26/06 , B23K26/38
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2201/40 , B23K2203/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond and/or picosecond pulses, and in some embodiments with pulse widths up to a few nanoseconds.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料，或者两者相对于以较低重复率可获得的量而减小。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料还可以包括金属，无机或有机电介质，或用飞秒和/或皮秒脉冲微加工的任何材料，在一些实施例中，脉冲宽度可达几纳秒。

6. 发明申请

WO2013039756A1 CONTROLLABLE MULTI-WAVELENGTH FIBER LASER SOURCE 审中-公开
标题翻译：可控多波长光纤激光源
公开(公告)号：WO2013039756A1
公开(公告)日：2013-03-21
申请号：PCT/US2012/053899
申请日：2012-09-06
申请人： IMRA AMERICA, INC. , XU, Jingzhou , CHO, Gyu Cheon
发明人： XU, Jingzhou , CHO, Gyu Cheon
IPC分类号： G02B6/35 , G02B6/293
CPC分类号： H01S3/06712 , G02B5/3083 , G02F1/353 , G02F1/3544 , G02F2001/3546 , H01S3/0092 , H01S3/067 , H01S3/06754 , H01S3/10053 , H01S3/10061
摘要： In at least one embodiment a laser system includes a fiber laser source, a polarization controller and a wavelength converter. The relative power distribution between a pump wavelength and a signal wavelength is controllable using the polarization controller. An optional phase compensator is used to control polarization state of the output laser beam. In various embodiments the relative power distribution among multiple wavelengths may be controlled over a range of at least about 100:1.
摘要翻译：在至少一个实施例中，激光系统包括光纤激光源，偏振控制器和波长转换器。使用偏振控制器控制泵波长和信号波长之间的相对功率分布。可选的相位补偿器用于控制输出激光束的偏振状态。在各种实施例中，可以在至少约100:1的范围内控制多个波长之间的相对功率分布。

7. 发明申请

WO2009114375A3 TRANSPARENT MATERIAL PROCESSING WITH AN ULTRASHORT PULSE LASER 审中-公开
公开(公告)号：WO2009114375A3
公开(公告)日：2009-09-17
申请号：PCT/US2009/036126
申请日：2009-03-05
申请人： IMRA AMERICA, INC. , ARAI, Alan, Y. , CHO, Gyu, C. , XU, Jingzhou , YOSHINO, Fumiyo , ZHANG, Haibin , BOVATSEK, James
发明人： ARAI, Alan, Y. , CHO, Gyu, C. , XU, Jingzhou , YOSHINO, Fumiyo , ZHANG, Haibin , BOVATSEK, James
IPC分类号： B23K26/00
摘要： Methods, devices, and systems for ultrashort pulse laser processing of optically transparent materials are disclosed, with example applications in scribing, marking, welding, and joining. For example, ultrashort laser pulses create scribe features with one pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. Slightly modifying the ultrashort pulse laser processing conditions produces sub-surface marks. When properly arranged, these marks are clearly visible with correctly aligned illumination. Reflective marks may also be formed with control of laser parameters. A transparent material other than glass may be utilized. A method for welding transparent materials uses ultrashort laser pulses to create a bond through localized heating. In some embodiments of transparent material processing, a multifocus beam generator simultaneously forms multiple beam waists spaced depthwise relative to the transparent material, thereby increasing processing speed.

8. 发明申请

WO2006101756A1 GaSa CRYSTALS FOR BROADBAND TERAHERTZ WAVE DETECTION 审中-公开
标题翻译： GaSa晶体用于宽带TERAHERTZ波检测
公开(公告)号：WO2006101756A1
公开(公告)日：2006-09-28
申请号：PCT/US2006/008370
申请日：2006-03-08
申请人： RENSSELAER POLYTECHNIC INSTITUTE , LIU, Kai , ZHANG, Xi-Cheng , XU, Jingzhou
发明人： LIU, Kai , ZHANG, Xi-Cheng , XU, Jingzhou
IPC分类号： G01J3/42
CPC分类号： G01J3/42 , G01N21/21 , G01N21/3581
摘要： A broad bandwidth detector to measure intensity information of terahertz (THz) frequency pulses. The detector includes: coupling optics coupled to a coherent optical source; a GaSe substrate aligned such that the probe beam path intersects a first surface at a phase-matching angle; a polarization detector aligned in the probe beam path; and calculation means coupled to the polarization detector. The coupling optics direct the probe optical beam along a beam path that is substantially collinear with the pulse beam path of the THz frequency pulses. The polarization of the probe optical beam is varied based on interactions between the probe optical beam and the THz frequency pulses within the GaSe substrate. The polarization detector detects the varied polarization of the probe optical beam. The calculation means determine the intensity information of the THz frequency pulses based on the detected probe polarization of the probe optical beam.
摘要翻译：用于测量太赫兹（THz）频率脉冲的强度信息的宽带宽检测器。检测器包括：耦合到相干光源的耦合光学器件; GaSe衬底对准，使得探针光束路径以相位匹配角度与第一表面相交; 在探测光束路径中对准的偏振检测器; 以及耦合到偏振检测器的计算装置。耦合光学器件沿着与THz频率脉冲的脉冲光束路径基本共线的光束路径来引导探测光束。基于探针光束和GaSe衬底内的THz频率脉冲之间的相互作用，探针光束的极化是变化的。偏振检测器检测探针光束的变化的极化。计算装置根据检测的探针光束的探针偏振来确定THz频率脉冲的强度信息。

9. 发明申请

WO2005088371A1 HIGH REPETITION RATE, LINEAR, TRUE TIME OPTICAL DELAY LINE 审中-公开
标题翻译：高重复率，线性，真实时光延迟线
公开(公告)号：WO2005088371A1
公开(公告)日：2005-09-22
申请号：PCT/US2005/007500
申请日：2005-03-08
申请人： RENSSELAER POLYTECHNIC INSTITUTE , XU, Jingzhou , ZHANG, Xi-Cheng
发明人： XU, Jingzhou , ZHANG, Xi-Cheng
IPC分类号： G02B6/10
CPC分类号： G02B5/10 , G02B6/2861 , G02B6/424 , G02B6/4244
摘要： An optical delay line (200) for use with an optical source including input/output optics optically coupled to the optical source and a curved mirror (216) with a reflective surface that is centered about an evolute curve (212) of the delay line (200) to retro-reflect light traveling along a delay line beam path tangent to the edge of the evolute curve. The input/output optics direct light from the optical source along the delay line beam path (214) and direct delayed light from the delay line beam path (214) out of the optical delay line along an output beam path. The input/output optics (204) and/or the curved mirror (216) rotate about the evolute curve (212) at a selected angular speed. The reflective surface has a curvature based on a parametric curve that is calculated from the evolute curve such that the delay of the delay line (200) varies according to a predetermined function as the input/output optics and/or the curved mirror rotate.
摘要翻译：一种用于光源的光学延迟线（200），包括光学耦合到光源的输入/输出光学器件，以及具有以延迟线的演化曲线（212）为中心的反射表面的曲面镜（216） 200）以反射沿着与演化曲线的边缘相切的延迟线光束路径行进的光。输入/输出光学器件沿着延迟线光束路径（214）将来自光源的光引导，并且沿着输出光束路径将来自延迟线光束路径（214）的直接延迟光从光学延迟线引出。输入/输出光学器件（204）和/或曲面镜（216）以选定的角速度绕渐进曲线（212）旋转。反射表面具有基于从演化曲线计算的参数曲线的曲率，使得当输入/输出光学器件和/或曲面镜旋转时，延迟线（200）的延迟根据预定功能而变化。

10. 发明申请

WO2008147575A2 SYSTEMS, METHODS, AND DEVICES FOR HANDLING TERAHERTZ RADIATION 审中-公开
标题翻译：用于处理TERAHERTZ辐射的系统，方法和装置
公开(公告)号：WO2008147575A2
公开(公告)日：2008-12-04
申请号：PCT/US2008/050926
申请日：2008-01-11
申请人： RENSSELAER POLYTECHNIC INSTITUTE , SCHULKIN, Brian , ZHANG, Xi-Cheng , TONGUE, Thomas , XU, Jingzhou , CHEN, Jian
发明人： SCHULKIN, Brian , ZHANG, Xi-Cheng , TONGUE, Thomas , XU, Jingzhou , CHEN, Jian
IPC分类号： G01J4/00
CPC分类号： G21K5/00 , B33Y80/00 , G01J4/00 , G01N21/211 , G01N21/3581 , H01S5/02236 , H01S2302/02
摘要： Methods and apparatus (10, 20, 25, 60, 70) for detecting variations in electromagnetic fields, in particular, terahertz (THz) electromagnetic fields, are provided. The methods and apparatus employ polarization detection devices (120) and controllers (224) to maintain or vary the polarization of modulated signals (212, 262) as desired. The methods and apparatus are provided to characterize electromagnetic fields by directing the electromagnetic field (204, 254) and a probe beam (206, 252) upon an electro-crystal (202, 256) and detecting the modulation of the resulting probe beam (212, 262). Detection of the modulation of the probe beam (212, 262) is practiced by detecting and comparing the polarization components (216, 218, 266, 268) of the modulated probe beam (212, 262). Aspects of the invention may be used to analyze or detect explosives, explosive related compounds, and pharmaceuticals, among other substances. A compact apparatus (10), modular optical devices (20, 25, 60, 70) for use with the apparatus, sample holders (400, 402, 500), and radiation source mounts (600, 650, 700) are also disclosed.
摘要翻译：提供了用于检测电磁场特别是太赫兹（THz）电磁场的变化的方法和装置（10,20,25,60,70）。所述方法和装置使用偏振检测装置（120）和控制器（224）来根据需要维持或改变调制信号（212,262）的极化。提供的方法和装置通过将电磁场（204,254）和探针光束（206,252）引导到电晶体（202,256）上并检测所得到的探针光束（212）的调制来表征电磁场，262）。通过检测和比较调制探测光束（212,262）的偏振分量（216,218,266,268）来实现探测光束（212,262）的调制的检测。本发明的方面可用于分析或检测爆炸物，爆炸性相关化合物和药物等物质。还公开了一种紧凑装置（10），用于与装置一起使用的模块化光学装置（20,25,60,70），样品保持器（400,402,500）和辐射源安装件（600,650,700）。

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