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    • 3. 发明专利
    • AT429035T
    • 2009-05-15
    • AT98870096
    • 1998-04-28
    • IMEC INTER UNI MICRO ELECTRUNIV BRUXELLES
    • KUIJK MAARTENHEREMANS PAULCOPPEE DANIELVOUNCKX ROGER
    • G01J1/02H01L27/144
    • A device for detecting electromagnetic radiation in a semiconductor substrate wherein the electromagnetic radiation being absorbed in said substrate being spatially modulated, said electromagnetic radiation thereby creating a signal with a spatially modulated component in said substrate. Thus, a novel optical detection principle and associated structure is provided for semiconductor substrate detectors in general and for CMOS circuits in particular. Photons absorbed in the neutral zone of the substrate generate electron hole pairs that migrate by diffusion. A shadow mask gives a spatial modulation to the incident, and consequently, to the absorbed radiation. By measuring the magnitude of the spatial frequency component in the minority carrier distribution with spatial frequency corresponding to that of the shadow mask, a fast detector is conceived. A shadow mask with higher spatial modulation frequency delivers a faster turn-off. The combination of a plurality of these detectors with an image fiber forms a basic system for constructing high-speed parallel optical interconnects between chips.
    • 4. 发明专利
    • DE69840738D1
    • 2009-05-28
    • DE69840738
    • 1998-04-28
    • IMEC INTER UNI MICRO ELECTRUNIV BRUXELLES
    • KUIJK MAARTENHEREMANS PAULCOPPEE DANIELVOUNCKX ROGER
    • G01J1/02H01L27/144
    • A device for detecting electromagnetic radiation in a semiconductor substrate wherein the electromagnetic radiation being absorbed in said substrate being spatially modulated, said electromagnetic radiation thereby creating a signal with a spatially modulated component in said substrate. Thus, a novel optical detection principle and associated structure is provided for semiconductor substrate detectors in general and for CMOS circuits in particular. Photons absorbed in the neutral zone of the substrate generate electron hole pairs that migrate by diffusion. A shadow mask gives a spatial modulation to the incident, and consequently, to the absorbed radiation. By measuring the magnitude of the spatial frequency component in the minority carrier distribution with spatial frequency corresponding to that of the shadow mask, a fast detector is conceived. A shadow mask with higher spatial modulation frequency delivers a faster turn-off. The combination of a plurality of these detectors with an image fiber forms a basic system for constructing high-speed parallel optical interconnects between chips.
    • 8. 发明专利
    • SPATIALLY-MODULATED DETECTOR FOR RADIATION
    • JPH1164100A
    • 1999-03-05
    • JP15981698
    • 1998-04-30
    • INTERUNIV MICRO ELECTRON CT VZUNIV BRUXELLES
    • KUIJK MAARTENHEREMANS PAULCOPPEE DANIELVOUNCKX ROGER
    • G01J1/02H01L27/144
    • PROBLEM TO BE SOLVED: To detect single-channel radiation input light at high speed by modulating a radiation light absorbed into a semiconductor substrate spatially to generate a plurality of signals and then detecting the output signal from a detector by comparing the temporal behavior thereof. SOLUTION: Delay detector regions 37-39, shielded with opaque elements (shadow mask) 29-31 and light-transmitting intermediate or direct detector regions 25-27, are formed on a semiconductor substrate of CMOS, or the like. An incident light to the substrate is shielded partially by the opaque elements 29-31 and the density of light-generating carriers is modulated depending on the shadow mask 20-31, such that it is maximized at a time t0 and decreased diffusing with a time t1 -t4 . Consequently, an optical pulse is maximized immediately before time t0 , and the current passing through the intermediate detector regions 25-27 is proportional to the intensity of the optical pulse. On the other hand, the current passing through the regions 37-39 responds to the optical pulse with a potentially and a lag. Consequently, the pulse width of the differential signal becomes extremely shortened, and the radiation input light can be detected at a high speed.