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    • 9. 发明专利
    • AT429035T
    • 2009-05-15
    • AT98870096
    • 1998-04-28
    • IMEC INTER UNI MICRO ELECTRUNIV BRUXELLES
    • KUIJK MAARTENHEREMANS PAULCOPPEE DANIELVOUNCKX ROGER
    • G01J1/02H01L27/144
    • A device for detecting electromagnetic radiation in a semiconductor substrate wherein the electromagnetic radiation being absorbed in said substrate being spatially modulated, said electromagnetic radiation thereby creating a signal with a spatially modulated component in said substrate. Thus, a novel optical detection principle and associated structure is provided for semiconductor substrate detectors in general and for CMOS circuits in particular. Photons absorbed in the neutral zone of the substrate generate electron hole pairs that migrate by diffusion. A shadow mask gives a spatial modulation to the incident, and consequently, to the absorbed radiation. By measuring the magnitude of the spatial frequency component in the minority carrier distribution with spatial frequency corresponding to that of the shadow mask, a fast detector is conceived. A shadow mask with higher spatial modulation frequency delivers a faster turn-off. The combination of a plurality of these detectors with an image fiber forms a basic system for constructing high-speed parallel optical interconnects between chips.