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1. 发明申请

US20110194117A1 MIRROR-TILT-INSENSITIVE FOURIER TRANSFORM SPECTROMETER 审中-公开
标题翻译：反射光敏感变换光谱仪
公开(公告)号：US20110194117A1
公开(公告)日：2011-08-11
申请号：US13123683
申请日：2010-01-11
申请人： Huikai Xie , Andrea Pais , Lei Wu , Sean Robert Samuelson , Shuguang Guo
发明人： Huikai Xie , Andrea Pais , Lei Wu , Sean Robert Samuelson , Shuguang Guo
IPC分类号： G01J3/45 , G01J3/08
CPC分类号： G01J3/4532 , G01J3/02 , G01J3/021 , G01J3/0256 , G01J3/0291 , G01J3/45
摘要： Methods and designs for providing reduced sensitivity to mirror tilt in Fourier transform spectrometers are disclosed. According to an embodiment for two-directional tilt compensation, the FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a corner-cube retroreflector positioned to receive the first sub-beam from the beam splitter, a dual reflective mirror positioned to receive the first sub-beam from the corner-cube retroreflector at one surface and the second sub-beam at the other surface. An optical path delay can be created using a set of mirrors, tilting the beam splitter and/or a glass cube.
摘要翻译：公开了在傅里叶变换光谱仪中提供对镜面倾斜的灵敏度降低的方法和设计。根据用于双向倾斜补偿的实施例，FT光谱仪可以包括分束器，其被定位成接收来自光源的入射光束，并将入射光束分成第一子光束和第二子光束，立方体后向反射器被定位成从分束器接收第一子光束;双反射镜，定位成在一个表面处接收来自角立方后视反射器的第一子光束，而在另一个表面处接收第二子光束。可以使用一组反射镜，倾斜分束器和/或玻璃立方体来产生光路延迟。

2. 发明申请

US20110139990A1 MEMS-BASED FTIR SPECTROMETER 审中-公开
标题翻译：基于MEMS的FTIR光谱仪
公开(公告)号：US20110139990A1
公开(公告)日：2011-06-16
申请号：US12989871
申请日：2009-08-04
申请人： Huikai Xie , Lei Wu , Andrea Pais , Sean Robert Samuelson
发明人： Huikai Xie , Lei Wu , Andrea Pais , Sean Robert Samuelson
IPC分类号： G01N21/35 , G01J3/45
CPC分类号： G01J3/4535 , G01J5/08 , G01J5/0853 , G01J5/38 , G01N2021/3595 , G02B26/0866
摘要： A MEMS-based Fourier Transform (FT) spectrometer is provided. According to an embodiment, the MEMS-based FT spectrometer is an FT infrared (FTIR) spectrometer. The FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a fixed mirror positioned to receive the first sub-beam from the beam splitter, a scanning MEMS mirror positioned to receive the second sub-beam from the beam splitter, and a photodetector, wherein a reflected first sub-beam from the fixed mirror and a reflected second sub-beam from the scanning MEMS mirror recombine at the beam splitter and become directed to the photodetector. According to one embodiment, the photodetector is a MEMS-based IR detector. In addition, the MEMS-based IR detector can be an un-cooled IR detector having a capacitive sensing structure.
摘要翻译：提供了基于MEMS的傅里叶变换（FT）光谱仪。根据实施例，基于MEMS的FT光谱仪是FT红外（FTIR）光谱仪。 FT分光计可以包括分束器，其被定位成接收来自光源的入射光束，并将入射光束分成第一子光束和第二子光束，固定镜定位成从光束接收第一子光束分离器，定位成从分束器接收第二子光束的扫描MEMS镜和光电检测器，其中来自固定镜的反射的第一子光束和来自扫描MEMS镜的反射的第二子光束在光束处复合分离器并且被引导到光电检测器。根据一个实施例，光电检测器是基于MEMS的IR检测器。此外，基于MEMS的IR检测器可以是具有电容感测结构的未冷却的IR检测器。

3. 发明申请

US20100033788A1 MICROMIRROR AND FABRICATION METHOD FOR PRODUCING MICROMIRROR 审中-公开
标题翻译：用于制造微型反应器的微型反应器和制造方法
公开(公告)号：US20100033788A1
公开(公告)日：2010-02-11
申请号：US12534514
申请日：2009-08-03
申请人： Huikai Xie , Sarah Maley , Paul McManamon , Thomas Nelson , Lei Wu , Andrea Pais , Kemiao Jia
发明人： Huikai Xie , Sarah Maley , Paul McManamon , Thomas Nelson , Lei Wu , Andrea Pais , Kemiao Jia
IPC分类号： G02B26/10 , G02B26/08 , H01L21/50
CPC分类号： G06Q10/06 , G06Q10/06313 , G06Q30/0601 , G06Q40/12
摘要： A high-fill-factor and large-aperture tip-tilt micromirror array is disclosed. Electrothermal actuation can be used to obtain a large scan range, and the actuation engine can be hidden underneath the mirror plate for high fill factor. In one embodiment, inverted-series-connected (ISC) bimorph actuators can be used to achieve tilt and piston scanning. Embodiments can be used to implement optical phased array technology for steering active and passive electro-optical systems based on MEMS mirrors.
摘要翻译：公开了高填充因子和大孔径尖端倾斜微镜阵列。可以使用电热驱动来获得大的扫描范围，并且致动引擎可以隐藏在镜板的下面用于高填充因子。在一个实施例中，可以使用反向串联连接（ISC）双压电晶片致动器来实现倾斜和活塞扫描。可以使用实施例来实现用于转向基于MEMS镜的主动和无源电光系统的光相控阵技术。

4. 发明授权

US08776514B2 Electrothermal microactuator for large vertical displacement without tilt or lateral shift 有权
标题翻译：电热微致动器用于垂直位移大，无倾斜或侧向偏移
公开(公告)号：US08776514B2
公开(公告)日：2014-07-15
申请号：US12743499
申请日：2008-12-15
申请人： Lei Wu , Huikai Xie
发明人： Lei Wu , Huikai Xie
IPC分类号： F01B29/10 , G02B26/00
CPC分类号： B81B3/0024 , B81B2201/032 , B81B2201/047 , B81B2203/053
摘要： A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.
摘要翻译：用于使平台相对于衬底垂直移位的微致动器包括第一刚性框架，将第一框架连接到衬底的第一柔性双压电晶片梁，第二刚性框架，将第二框架连接到第一框架的第二柔性双压电晶片梁，以及将平台连接到第二框架的第三柔性双压电晶片。第一，第二和第三柔性双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。微致动器组件包括基板，多个第一刚性框架，多个第一柔性双压电晶片梁，多个第二刚性框架，多个第二柔性双压电晶片梁，平台和多个第三柔性双压电晶片。第一，第二和第三双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。具有四个相同的这样的微致动器的另一实施例在平台的四个侧面定向，可以通过激活1或2个相邻微致动器来实现镜板的1D或2D角扫描。

5. 发明申请

US20100307150A1 ELECTROTHERMAL MICROACTUATOR FOR LARGE VERTICAL DISPLACEMENT WITHOUT TILT OR LATERAL SHIFT 有权
标题翻译：无倾斜或横向移位的大直角位移电热微处理器
公开(公告)号：US20100307150A1
公开(公告)日：2010-12-09
申请号：US12743499
申请日：2008-12-15
申请人： Lei Wu , Huikai Xie
发明人： Lei Wu , Huikai Xie
IPC分类号： F03G7/06
CPC分类号： B81B3/0024 , B81B2201/032 , B81B2201/047 , B81B2203/053
摘要： A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.
摘要翻译：用于使平台相对于衬底垂直移位的微致动器包括第一刚性框架，将第一框架连接到衬底的第一柔性双压电晶片梁，第二刚性框架，将第二框架连接到第一框架的第二柔性双压电晶片梁，以及将平台连接到第二框架的第三柔性双压电晶片。第一，第二和第三柔性双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。微致动器组件包括基板，多个第一刚性框架，多个第一柔性双压电晶片梁，多个第二刚性框架，多个第二柔性双压电晶片梁，平台和多个第三柔性双压电晶片。第一，第二和第三双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。具有四个相同的这样的微致动器的另一实施例在平台的四个侧面定向，可以通过激活1或2个相邻微致动器来实现镜板的1D或2D角扫描。

6. 发明申请

US20100157308A1 SINGLE FIBER ENDOSCOPIC FULL-FIELD OPTICAL COHERENCE TOMOGRAPHY (OCT) IMAGING PROBE 有权
标题翻译：单纤维内镜全场光学相干成像（OCT）成像探头
公开(公告)号：US20100157308A1
公开(公告)日：2010-06-24
申请号：US11814112
申请日：2006-02-03
申请人： Huikai Xie
发明人： Huikai Xie
IPC分类号： G01B9/02
CPC分类号： A61B5/6852 , A61B5/0066 , G01B9/0205 , G01B9/02091
摘要： A single fiber full-field optical coherence tomography (OCT) imaging probe (300) includes a hollow tube (301), and a single fiber (305) disposed within the tube for transmitting light received from a broadband light source to a beam splitter (350) in the tube optically coupled to the single fiber (305). The beam splitter (350) splits the light into a first and a second optical beam, wherein the first beam is optically coupled to a reference arm including a MEMS reference micromirror (335) which provides axial scanning and the second beam is optically coupled to a sample arm for probing a sample to be imaged. Both the reference arm and the sample ami are disposed in the tube. A photodetector array (315) is preferably disposed inside the tube (301) optically coupled to the beam splitter (350). The photodetector array (315) receives a reflected beam from the MEMS reference micromirror (335) and a scattered beam from the sample to form an image of the sample.
摘要翻译：单光纤全场光学相干断层摄影（OCT）成像探针（300）包括中空管（301）和设置在管内的单个光纤（305），用于将从宽带光源接收的光传输到分束器 350）在光学耦合到单个光纤（305）的管中。分束器（350）将光分成第一和第二光束，其中第一光束光耦合到包括提供轴向扫描的MEMS参考微镜（335）的参考臂，并且第二光束光学耦合到用于探测要成像的样品的样品臂。参考臂和样品ami均设置在管中。光检测器阵列（315）优选地设置在与光束分离器（350）光学耦合的管（301）的内部。光电检测器阵列（315）接收来自MEMS参考微镜（335）的反射光束和来自样品的散射光束以形成样品的图像。

7. 发明申请

US20090261688A1 MICROACTUATOR HAVING MULTIPLE DEGREES OF FREEDOM 有权
标题翻译：具有多个自由度的微处理器
公开(公告)号：US20090261688A1
公开(公告)日：2009-10-22
申请号：US11817378
申请日：2006-04-13
申请人： Huikai Xie , Shane T. Todd
发明人： Huikai Xie , Shane T. Todd
IPC分类号： H02N10/00 , H02N2/04
CPC分类号： G02B26/0866 , B81B3/0035 , B81B3/0062 , G02B26/0858
摘要： A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.
摘要翻译：用于垂直移位和倾斜垂直位移平台的MEMS垂直位移装置。可以使用构造成在没有水平移动的情况下提供垂直位移的多个递推致动器来移动可垂直移位的平台。可垂直移位的平台可围绕两个轴线倾斜以产生在许多应用中有利的倾斜。弯曲致动器可以是热的，压电的或由其他合适的材料形成的。

8. 发明授权

US07258012B2 Integrated monolithic tri-axial micromachined accelerometer 有权
标题翻译：集成单片三轴微加工加速度计
公开(公告)号：US07258012B2
公开(公告)日：2007-08-21
申请号：US11363293
申请日：2006-02-21
申请人： Huikai Xie
发明人： Huikai Xie
IPC分类号： G01P15/125
CPC分类号： H03H9/02338 , B81B3/0062 , B81B2201/0235 , B81C1/00246 , B81C2203/0728 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.
摘要翻译：单片集成3轴加速度计芯片包括单晶衬底，该衬底包括至少一个单晶膜层部分。由单晶膜制成的单个传感器微结构感测三个正交方向中的每一个的加速度。至少一个电子电路也可以设置在芯片上，例如用于驱动，检测，控制和信号处理的电路。

9. 发明授权

US07215429B2 Vertical displacement device 有权
标题翻译：垂直位移装置
公开(公告)号：US07215429B2
公开(公告)日：2007-05-08
申请号：US11065017
申请日：2005-02-24
申请人： Huikai Xie
发明人： Huikai Xie
IPC分类号： G01B9/02
CPC分类号： G02B26/0866 , B81B3/0018 , B81B2201/038 , B81B2201/06 , G02B6/3512 , G02B6/3526 , G02B6/3534 , G02B6/3584
摘要： A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.
摘要翻译：能够相对于基座移动一个或多个可垂直移位的平台的MEMS垂直位移装置。特别地，垂直位移装置可以能够移动可垂直移动的平台，使得垂直移位的平台保持大致平行于基部。可垂直移位的平台可以是但不限于微透镜，微镜，微光栅或其他器件。垂直位移装置也可以包括在光学相干和共焦成像系统中。

10. 发明申请

US20130067909A1 CURVED MULTIMORPH MICROACTUATORS THAT BEND AND/OR TWIST 审中-公开
标题翻译：弯曲和/或扭曲的弯曲多元微波处理器
公开(公告)号：US20130067909A1
公开(公告)日：2013-03-21
申请号：US13701793
申请日：2011-06-01
申请人： Sagnik Pal , Huikai Xie , Karl R. Zawoy
发明人： Sagnik Pal , Huikai Xie , Karl R. Zawoy
IPC分类号： F03G7/06
CPC分类号： F03G7/065 , B81B3/0024 , B81B2201/032 , G02B26/0858 , H01L41/094 , H02N1/00
摘要： A curved multimorph actuator is provided composed of a plurality of materials, each material exhibiting different deformations in response to a stimulus, such as heat. Application of different stimuli causes the actuator to bend and/or twist. In an embodiment, the actuator is capable of rotating an object about its center without significantly shifting the center in one or more dimensions. In a further embodiment, the actuator can be used to rotate an object about a first axis and a second axis, wherein the first axis and the second axis are mutually perpendicular. In an embodiment, rotation about the first axis and the second axis are achieved in combination. In another embodiment, rotation about the first axis is produced in response to a first stimulus and rotation about the second axis is produced in response to a second stimulus.
摘要翻译：提供由多种材料组成的弯曲多压电致动器，每种材料响应于诸如热的刺激而呈现不同的变形。不同刺激的应用使致动器弯曲和/或扭曲。在一个实施例中，致动器能够围绕其中心旋转物体，而不会在一个或多个维度上显着地偏移中心。在另一实施例中，致动器可用于围绕第一轴线和第二轴线旋转物体，其中第一轴线和第二轴线相互垂直。在一个实施例中，组合地实现围绕第一轴线和第二轴线的旋转。在另一个实施例中，响应于第一刺激而产生围绕第一轴的旋转，响应于第二刺激而产生围绕第二轴的旋转。

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