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    • 4. 发明授权
    • Field-enhanced MIS/MIM electron emitters
    • 场增强MIS / MIM电子发射器
    • US06822380B2
    • 2004-11-23
    • US09975296
    • 2001-10-12
    • Xia ShengHenryk BireckiSi-Ty LamHuei-Pei KuoSteven Louis Naberhuis
    • Xia ShengHenryk BireckiSi-Ty LamHuei-Pei KuoSteven Louis Naberhuis
    • H01J1312
    • B82Y10/00H01J1/312
    • In an electron emitter based on Metal-Insulator-Semiconductor or Metal-Insulator-Metal emitters, field emission structures are enclosed within the emitter structure. The electron emitter may include a conductive substrate and an electron supply layer formed on the conductive substrate. The electron supply layer, for example undoped polysilicon, has protrusions formed on its surface. The sharpness and density of protrusions may be controlled. Above the electron supply layer and the protrusions, an insulator may be formed thereby enclosing the protrusions. A top conductive layer may be formed above the insulator. The enclosed protrusions are relatively insensitive to vacuum contamination. The thinness of the insulator allows high intensity electric fields at the protrusions to be generated with low applied voltage. Field-enhanced injection of electrons into the insulator and thence through the top conductive layer results. Furthermore, electron beam dispersion and divergence are minimized.
    • 在基于金属绝缘体半导体或金属 - 绝缘体 - 金属发射体的电子发射器中,场致发射结构被封装在发射极结构内。 电子发射器可以包括形成在导电衬底上的导电衬底和电子供给层。 电子供应层,例如未掺杂的多晶硅,在其表面上形成突起。 可以控制突起的清晰度和密度。 在电子供给层和突起之上,可以形成绝缘体,从而包围突起。 可以在绝缘体上方形成顶部导电层。 封闭的突起对真空污染相对不敏感。 绝缘体的薄度允许在低的施加电压下产生突起处的高强度电场。 电场增强注入绝缘体,从而通过顶​​层导电层注入电子。 此外,电子束分散和发散最小化。
    • 9. 发明授权
    • Electron emitter device for data storage applications and method of manufacture
    • 用于数据存储应用的电子发射器件和制造方法
    • US07585687B2
    • 2009-09-08
    • US10932695
    • 2004-09-01
    • Henryk BireckiVu Thien BinhSi-ty LamHuei Pei KuoSteven L. Naberhuis
    • Henryk BireckiVu Thien BinhSi-ty LamHuei Pei KuoSteven L. Naberhuis
    • H01L21/66
    • B82Y10/00G11B9/14G11B9/1409H01J1/308
    • A field emission device, which among other things may be used within an ultra-high density storage system, is disclosed. The emitter device includes an emitter electrode, an extractor electrode, and a solid-state field controlled emitter that utilizes a Schottky metal-semiconductor junction or barrier. The Schottky metal-semiconductor barrier is formed on the emitter electrode and electrically couples with the extractor electrode such that when an electric potential is placed between the emitter electrode and the extractor electrode, a field emission of electrons is generated from an exposed surface of the semiconductor layer. Further, the Schottky metal may be selected from typical conducting layers such as platinum, gold, silver, or a conductive semiconductor layer that is able to provide a high electron pool at the barrier. The semiconductor layer placed on the Schottky metal is typically very weakly conductive of n-type and has a wide band gap in order to create conditions conducive to creating induced negative electron affinity at applied fields necessary to provide electron emission. One type of wide band-gap material can be selected from titanium dioxide or titanium nitride or other comparable materials.
    • 公开了一种场致发射装置,其可以在超高密度存储系统内使用。 发射器件包括发射电极,提取器电极和利用肖特基金属 - 半导体结或势垒的固态场控制的发射极。 肖特基金属半导体势垒形成在发射极电极上并与提取器电极电耦合,使得当在发射电极和提取器电极之间放置电位时,从半导体的暴露表面产生电子的场发射 层。 此外,肖特基金属可以选自能够在屏障处提供高电子池的典型的导电层,例如铂,金,银或导电半导体层。 放置在肖特基金属上的半导体层通常是n型非常弱的导电性并且具有宽的带隙,以便产生有助于在提供电子发射所必需的施加场产生诱导的负电子亲和力的条件。 一种类型的宽带隙材料可以选自二氧化钛或氮化钛或其他可比较的材料。
    • 10. 发明授权
    • Electron emitter device for data storage applications
    • 用于数据存储应用的电子发射器件
    • US06864624B2
    • 2005-03-08
    • US10697170
    • 2003-10-30
    • Henryk BireckiVu Thien BinhSi-ty LamHuei Pei KuoSteven L. Naberhuis
    • Henryk BireckiVu Thien BinhSi-ty LamHuei Pei KuoSteven L. Naberhuis
    • G11C11/42G11B9/00H01J1/304H01J1/308H01J9/02H01J1/14H01J1/16H01L21/76
    • B82Y10/00G11B9/14G11B9/1409H01J1/308
    • A field emission device, which among other things may be used within an ultra-high density storage system, is disclosed. The emitter device includes an emitter electrode, an extractor electrode, and a solid-state field controlled emitter that utilizes a Schottky metal-semiconductor junction or barrier. The Schottky metal-semiconductor barrier is formed on the emitter electrode and electrically couples with the extractor electrode such that when an electric potential is placed between the emitter electrode and the extractor electrode, a field emission of electrons is generated from an exposed surface of the semiconductor layer. Further, the Schottky metal may be selected from typical conducting layers such as platinum, gold, silver, or a conductive semiconductor layer that is able to provide a high electron pool at the barrier. The semiconductor layer placed on the Schottky metal is typically very weakly conductive of n-type and has a wide band gap in order to create conditions conducive to creating induced negative electron affinity at applied fields necessary to provide electron emission. One type of wide band-gap material can be selected from titanium dioxide or titanium nitride or other comparable materials.
    • 公开了一种场致发射装置,其可以在超高密度存储系统内使用。 发射器件包括发射电极,提取器电极和利用肖特基金属 - 半导体结或势垒的固态场控制的发射极。 肖特基金属半导体势垒形成在发射极电极上并与提取器电极电耦合,使得当在发射电极和提取器电极之间放置电位时,从半导体的暴露表面产生电子的场发射 层。 此外,肖特基金属可以选自能够在屏障处提供高电子池的典型的导电层,例如铂,金,银或导电半导体层。 放置在肖特基金属上的半导体层通常是n型非常弱的导电性并且具有宽的带隙,以便产生有助于在提供电子发射所必需的施加场产生诱导的负电子亲和力的条件。 一种类型的宽带隙材料可以选自二氧化钛或氮化钛或其他可比较的材料。