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1. 发明授权

US5294257A Edge masking spin tool 失效
标题翻译：边缘掩蔽旋转工具
公开(公告)号：US5294257A
公开(公告)日：1994-03-15
申请号：US783753
申请日：1991-10-28
申请人： Howard L. Kelly , Hans-George H. Kolan , James M. Leas , Teruhiro Nakasogi
发明人： Howard L. Kelly , Hans-George H. Kolan , James M. Leas , Teruhiro Nakasogi
IPC分类号： B05C11/08 , G03F7/16 , H01L21/00 , H01L21/687 , B05C11/02
CPC分类号： H01L21/67126 , B05C11/08 , G03F7/162 , H01L21/6715 , H01L21/68735
摘要： An apparatus and method for spin coating a substrate with a liquid material which prevents the material from contacting the edge or backside of the substrate or forming an edge bead at the periphery of the substrate is disclosed. A spin chuck is equipped with a conformable elastomer which seals the edge of the substrate and forms a continuous surface with a planar surface of the substrate for the liquid material to flow off the substrate unimpeded during the spin coating process. As the elastomer is resilient, small variations in substrate size and shape are automatically compensated. None of the substrate area is lost to masking and/or removal processes as in the prior art, allowing the entire substrate area to be available for further processing.
摘要翻译：公开了一种用液体材料旋涂衬底的装置和方法，其防止材料接触衬底的边缘或背面或在衬底的周围形成边缘。旋转卡盘配备有适形弹性体，其密封基底的边缘并与基底的平坦表面形成连续表面，以使液体材料在旋涂过程中不受阻碍地流出基底。由于弹性体具有弹性，因此自动补偿基板尺寸和形状的小变化。如现有技术那样，掩模和/或去除过程中没有一个衬底区域损失，允许整个衬底区域可用于进一步处理。

2. 发明授权

US5635849A Miniature probe positioning actuator 失效
标题翻译：微型探头定位执行器
公开(公告)号：US5635849A
公开(公告)日：1997-06-03
申请号：US643523
申请日：1996-05-06
申请人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
发明人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
IPC分类号： G01R31/26 , G01R1/067 , G01R1/073 , G01R31/28 , H01L21/66 , H02K41/03 , G01R31/22
CPC分类号： G01R1/06705
摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the probe tip into contact with selected portions of the device being tested.
摘要翻译：公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点与被测设备相关的电路。致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，使探针尖端移动到接触该设备的选定部分被测试。

3. 发明授权

US5532611A Miniature probe positioning actuator 失效
标题翻译：微型探头定位执行器
公开(公告)号：US5532611A
公开(公告)日：1996-07-02
申请号：US451635
申请日：1995-05-26
申请人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
发明人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
IPC分类号： G01R31/26 , G01R1/067 , G01R1/073 , G01R31/28 , H01L21/66 , H02K41/03 , G01R31/22
CPC分类号： G01R1/06705
摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the prob into contact with selected portions of the device being tested.
摘要翻译：公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点与被测设备相关的电路。致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，从而实现与该正在测试的设备的所选部分。

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