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    • 1. 发明授权
    • Method of grinding an axially asymmetric aspherical mirror
    • 研磨轴向不对称非球面镜的方法
    • US06537138B2
    • 2003-03-25
    • US09793421
    • 2001-02-27
    • Hitoshi OhmoriYutaka YamagataSei MoriyasuShinya MoritaKatsuhiko KadaHidetaka KiraHiroyuki SasaiMasaru Kawata
    • Hitoshi OhmoriYutaka YamagataSei MoriyasuShinya MoritaKatsuhiko KadaHidetaka KiraHiroyuki SasaiMasaru Kawata
    • B24B5300
    • B24B49/04B24B13/06B24B53/001B24B53/08
    • An electrolytic in-process dressing device 10 is provided with a disk-shaped metal-bonded grindstone 2 with a surface 2a with a circular arc shape with a radius R at its outer periphery and a numerical control device 16. The disk-shaped metal-bonded grindstone 2 rotates around an axis Y, and the grindstone is dressed electrolytically while the device 10 grinds the workpiece 1. The numerical control device 16 is provided with a rotary truing device 12 that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface 2a, a shape measuring device 14 for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece 1 on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device 16 moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line. Thus, an axially asymmetrical aspheric mirror with a highly accurate shape and extremely low surface roughness, that can precisely reflect or converge light can be manufactured within a short time with a high accuracy.
    • 电解处理修整装置10具有圆板状金属结合磨石2,其外周具有半径为R的圆弧形状的表面2a和数字控制装置16。 粘结砂轮2围绕轴线Y旋转,并且在设备10研磨工件1的同时电磨磨削磨石。数控装置16设置有旋转修整装置12,其围绕正交于旋转轴线的X轴旋转 Y并且形成圆弧表面2a,用于测量砂轮的圆弧表面的形状的形状测量装置14和机器上的工件1的加工表面的形状,并沿着三个方向沿数值方向控制磨石 轴X,Y和Z.数控装置16沿三个轴向移动砂轮,并重复在线修整,研磨和测量的操作。 因此,可以在短时间内以高精度制造具有高精度形状和非常低的表面粗糙度的轴向不对称非球面镜,其能够精确地反射或会聚光。
    • 3. 发明授权
    • Probe type shape measuring sensor, and NC processing equipment and shape measuring method using the sensor
    • 探头型形状测量传感器,数控加工设备和使用传感器的形状测量方法
    • US06539642B1
    • 2003-04-01
    • US09763747
    • 2001-02-27
    • Sei MoriyasuYutaka YamagataHitoshi OhmoriShinya Morita
    • Sei MoriyasuYutaka YamagataHitoshi OhmoriShinya Morita
    • G01B520
    • G01B21/20G01B11/007G01B11/2441
    • A probe head 10 and a laser interferometric displacement meter 20 are provided. The probe head supports a probe 2 that is capable of contacting a workpiece 1, that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head 10 is also provided with a probe shaft 12 with steps 11a, 11b at intermediate portions thereof and air bearings 14a, 14b that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range. Thereby, the measuring pressure can be adjusted to a constant very small load without reducing the stiffness of the bearings of the probe, and the measuring pressures can be varied freely. Therefore, a sub-micron accuracy of about 0.1 &mgr;m can be obtained, and the equipment can be made compact and is easily applied to on-machine measurements.
    • 提供探针头10和激光干涉位移计20。 探头支撑探头2,该探头2能够接触工件1,该工件可自由地沿工件的方向移动,并将探头驱动向工件。 位移仪可以高精度地测量探头的位移而不接触。 探针头10还设置有探针轴12,其中间部分具有台阶11a,11b,以及在台阶的每一侧支撑探针轴的空气轴承14a,14b。 空气轴承在径向上具有高刚度,并且通过使用压缩空气使探针轴浮动,从而减小了轴的滑动阻力。 此外,另一压缩空气被供给到台阶的位置,并且由于台阶两侧的横截面积的差异而在工件的方向上产生驱动力,其在预定范围内提供非常小的载荷 。 因此,可以将测量压力调整到恒定的非常小的负载,而不降低探针的轴承的刚度,并且测量压力可以自由变化。 因此,可以获得约0.1μm的亚微米精度,并且可以使设备紧凑并且容易地应用于机上测量。
    • 4. 发明授权
    • Method and apparatus for measuring aspherical shape and method for manufacturing optical element using them
    • 用于测量非球面形状的方法和装置以及使用它们制造光学元件的方法
    • US06624895B1
    • 2003-09-23
    • US09518220
    • 2000-03-03
    • Sei MoriyasuJunichi KatoYutaka YamagataHitoshi OhmoriShinya Morita
    • Sei MoriyasuJunichi KatoYutaka YamagataHitoshi OhmoriShinya Morita
    • G01B907
    • G01B11/2441
    • An aspherical reference surface 2 is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface 1 to be measured, an aspherical wave front 3 is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element 10 manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.
    • 制造非球面参考面2,其形状精度使得根据待测表面1的非球面形状出现干涉带,使用参考表面形成非球面波前3,并且从 在短时间内干扰。 非球面参考表面是通过飞切或ELID研磨制造的非球面光学元件10,其从非球面反射的光和预定参考光产生干涉​​带,从而测量非球面的形状受干扰。 非球面光学元件应该是具有产生干涉带并且平行光沿垂直于待测表面的方向反射的形状精度的非球面反射镜。 因此,可以在短时间内测量形状而不使用非球面表面标准。
    • 5. 发明授权
    • Apparatus and method for processing the components of a neutron lens
    • 用于处理中子透镜组件的装置和方法
    • US06444994B1
    • 2002-09-03
    • US09651278
    • 2000-08-30
    • Hitoshi OhmoriYutaka YamagataShinya MoritaSei MoriyasuHirohiko Shimizu
    • Hitoshi OhmoriYutaka YamagataShinya MoritaSei MoriyasuHirohiko Shimizu
    • H01J518
    • G21K1/06B23H5/08B24B13/015B24B53/001B24B53/013B24B53/06
    • A rotating table 2 that holds a flat neutron lens component 1 and rotates about an axis of rotation Z, a circular-disk type of metal-bonded grinding wheel 3 with tapering surface 3a on the outer periphery thereof, a grinding wheel driving device 4 drives and rotates the grinding wheel around the axis A thereof, an electrode 5 with a surface close to the single tapering surface or the plurality of tapering surfaces of the grinding wheel, a power source 6 that applies an electrolytic voltage between the grinding wheel and the electrode, and a grinding fluid feeder 8 that supplies a conducting grinding fluid between the grinding wheel and the electrode are provided. The angle of the tapering surface 3a of the grinding wheel is formed to be more acute than the angle of a V-shaped groove to be formed on the surface of the neutron lens component, the axis of the grinding wheel is positioned at an oblique angle to the axis of rotation of the neutron lens component by the grinding wheel driving device 4, and the angle of obliqueness &thgr; can be slightly varied at that location. Thus, fine ring-shaped protrusions can be formed accurately with an excellent surface finish and a low processing force, on the surface of a neutron lens component made of graphite etc.
    • 安装平坦的中子透镜部件1并围绕旋转轴线Z旋转的旋转台​​2,具有在其外周上具有锥形表面3a的圆盘型金属结合砂轮3,砂轮驱动装置4驱动 并使砂轮绕其轴线A旋转,具有接近单个锥形表面的表面或磨轮的多个锥形表面的电极5,在磨轮和电极之间施加电解电压的电源6 以及在砂轮和电极之间提供导电研磨流体的研磨液供给器8。 砂轮的锥形表面3a的角度形成为比要形成在中子透镜部件的表面上的V形槽的角度更尖锐,砂轮的轴线位于倾斜角 通过砂轮驱动装置4到中子透镜部件的旋转轴线,并且倾斜角度可以在该位置稍微变化。 因此,可以在由石墨等制成的中子透镜部件的表面上精确地形成精细的环状突起,并具有优异的表面光洁度和低的加工力。
    • 7. 发明授权
    • Plasma discharge truing apparatus and fine-machining methods using the apparatus
    • 使用该装置的等离子体放电整形装置和精加工方法
    • US06447376B1
    • 2002-09-10
    • US09518212
    • 2000-03-03
    • Hitoshi OhmoriYutaka YamagataSei Moriyasu
    • Hitoshi OhmoriYutaka YamagataSei Moriyasu
    • B24B5300
    • H05H1/48
    • A conductive grindstone 12, a circular disk-like discharge electrode 14 with an outer rim 14a that can access a machining surface 12a of the grindstone, an electrode rotating device 16, a position controlling device 18 that controls the relative position between the outer rim of the electrode and the grindstone, a voltage applying device 20 for applying voltage pulses between the grindstone and the electrode, and a mist-supplying device 22 that supplies pressurized conductive mist between the grindstone and the electrode are provided. The pressurized conductive mist is a mixture of a low-conductivity aqueous solution and compressed air. A plasma discharge is generated between the grindstone and the electrode by means of this pressurized conductive mist, and the grindstone is subjected to truing. In this way, grindstone essentricity and deflection can efficiently be removed, the grindstone does not deform, high-accuracy truing is achieved, the power supply can be compact with a small power output, no complicated control circuit or control device is needed, and consumable parts such as the electrode can easily be manufactured and remachined.
    • 导电磨石12,圆盘状放电电极14,具有能够接近砂轮的加工面12a的外缘14a,电极旋转装置16,位置控制装置18,其控制外缘之间的相对位置 电极和磨石,设置有用于在磨石与电极之间施加电压脉冲的电压施加装置20,以及在磨石与电极之间供给加压导电性雾的雾供给装置22。 加压导电雾是低电导率水溶液和压缩空气的混合物。 通过该加压导电薄膜在磨石与电极之间产生等离子体放电,对磨石进行研磨。 通过这种方式,可以有效地去除磨石的精度和挠度,磨石不变形,实现高精度的修整,电源可以紧凑,功率小,不需要复杂的控制电路或控制装置,消耗品 诸如电极的部件可以容易地制造和再加工。