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    • 1. 发明专利
    • Target of pickup tube
    • 抽吸管目标
    • JPS5780638A
    • 1982-05-20
    • JP15708580
    • 1980-11-10
    • Hitachi LtdNippon Hoso Kyokai
    • NONAKA IKUMITSUINOUE SHIGENORISHIDARA KEIICHIUCHIDA TERUO
    • H01J29/45H01L31/08
    • H01J29/45
    • PURPOSE:To prevent deterioration of the characteristic of a pickup tube, by charging the density of As in the direction of film thickness, while keeping the set density of As of an Se-As photo conductive film as a peak value, after distributing the density of As of the Se-As photo conductive film touching an Se- As-Te photo conductive film with its specific quantity through a specific depth in the direction of film thickness. CONSTITUTION:A transparent electrode 2 (SnO2) and an N type trnsparent electrode 3 (CeO2) are formed on a base 1. Nexr, a P type photo conductive film 4 (Se: 90-97wt%, As: the remainder, T1: 30-60nm) and a P type photo conductive film 5 (Se: 64wt%, As : 3wt%, Te: remaineder, T2: 60-120nm) are formed. Then, a P type photo conductive film 7 composed of a portion 7(a) (T4: 10-30nm) in which the density of Se is kept in a specific value of 70-90wt% (the remainder: As) and a portion 7(b) (T5: 60-100nm) in which the density of se changes from a specific value to 97wt% is formed on the P type photo conductive film 5, and a P type photo conductive film 8 (Se: 97wt%, As: the remainder) is further formed. Thereby, the variation of the density distribution of As becomes small, and voltage-current characteristic is improved.
    • 目的:为了防止拾取管的特性劣化,通过在将膜的厚度方向充满As的密度,同时保持Se-As光导膜的As的设定浓度为峰值,在分配密度 作为Se-As光导电膜的Se-As-Te光导电膜,其特定量通过膜厚方向上的特定深度接触。 构成:在基底1上形成透明电极2(SnO 2)和N型透明电极3(CeO 2)。Nexr,P型光导膜4(Se:90-97wt%,As:余数T1: 30-60nm)和P型光导膜5(Se:64wt%,As:3wt%,Te:残留物,T2:60-120nm)。 然后,将由Se的密度保持在70〜90重量%的特定值(余量:As)的部分7(a)(T4:10〜30nm)构成的P型光导膜7和 在P型光电导膜5上形成有从特定值向97重量%变化的密度为7(b)(T5:60〜100nm)的P型光导膜8(Se:97重量% As:其余部分)进一步形成。 由此,As的密度分布的变化变小,电压 - 电流特性提高。