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1. 发明专利

JP2004333507A Apparatus and method for inspecting circuit pattern 有权
公开(公告)号：JP2004333507A
公开(公告)日：2004-11-25
申请号：JP2004204056
申请日：2004-07-12
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MIYAI YASUSHI , NINOMIYA HIROSHI , GUNJI YASUHIRO
IPC分类号： G01N23/225 , G03F7/20 , H01J37/28 , H01L21/027 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To place inspection regions of a substrate within a scanning range of an electron beam, even in the case the substrate is inclined in its moving direction, and to prevent inspection time from increasing or detections of false defects. SOLUTION: An apparatus for inspecting a circuit pattern is provided with a supporting means which supports the substrate having the circuit pattern; a moving means which has degrees of freedom for steering in two directions almost perpendicular to each other and steers the supporting means; and a means which scans the electron beam over a plurality of stripe-like inspection regions being set on the substrate and forms electron beam images of the inspection regions. The moving means moves the plurality of stripe-like inspection regions in their longitudinal direction so as to be matched in a direction at approximately 45 degrees to the two axes of the degree of freedom almost perpendicular to each other in the moving means, and is steered in a direction at approximately 45 degrees to the two axes almost perpendicular to each other. COPYRIGHT: (C)2005,JPO&NCIPI

2. 发明专利

JP2003083917A Visual inspection apparatus using electron beam 有权
标题翻译：使用电子束的视觉检查装置
公开(公告)号：JP2003083917A
公开(公告)日：2003-03-19
申请号：JP2001277418
申请日：2001-09-13
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： GUNJI YASUHIRO , NINOMIYA HIROSHI , FUNATSU RYUICHI , KAMETANI MASATSUGU , YAMAMOTO KENJIRO
IPC分类号： G01N23/225 , G01R31/02 , G01R31/302 , H01J37/147 , H01J37/28 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a visual inspection apparatus using an electron beam by which a defect hardly detectable by an optical image is detected with high accuracy by using an electron beam image, and by which a dose amount and an inspection speed as an inspection-apparatus single body as becoming a problem at this time can be controlled by a simple operation and with high accuracy. SOLUTION: In the inspection apparatus, the defect in a sample is detected on the basis of a detection signal of secondary charged particles generated by scanning the electron beam. The apparatus comprises a means which decides the inspection speed and a primary electron dose. The apparatus is provided with a function by which, when one from among both is decided, the other is automatically adjusted according to its result.
摘要翻译：要解决的问题：提供一种使用电子束的目视检查装置，其中通过使用电子束图像以高精度检测到难以被光学图像检测到的缺陷，并且通过其使用剂量和检查速度作为检查此时成为问题的装置单体可以通过简单的操作和高精度来控制。解决方案：在检查装置中，基于通过扫描电子束产生的二次带电粒子的检测信号来检测样品中的缺陷。该装置包括决定检查速度和初级电子剂量的装置。该装置具有如下功能：当两者之一决定时，另一个根据其结果自动调整。

3. 发明专利

JP2003031629A Method and apparatus for testing pattern 审中-公开
标题翻译：测试模式的方法和装置
公开(公告)号：JP2003031629A
公开(公告)日：2003-01-31
申请号：JP2001216254
申请日：2001-07-17
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HIROI TAKASHI , WATANABE MASAHIRO , TANAKA MAKI , KUNI TOMOHIRO , SHISHIDO CHIE , NISHIYAMA HIDETOSHI , OKUDA HIROTO , MIYAI YASUSHI , GUNJI YASUHIRO , SHIMODA ATSUSHI , OSHIMA YOSHIMASA
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To eliminate the problem that in a method wherein a charged particle beam is cast on a substrate to be tested, and secondary electrons or the like emitted are detected to obtain an image, and then the obtained image is compared with a reference image to test the substrate for pattern defects or a defect is checked by moving to a location of a pattern defect, the substrate to be tested is charged up by the irradiation of the charged particle beam, causing the charged particle beam to be bent and then the positional deviation of the defect.
SOLUTION: An amount of positional deviation at the time of inspection and an amount of positional deviation from a reference image are inspected and, at the same time, calculated to correct the location of the defect at the time of inspection. Defects information is added with an image at the time of inspection, and then is corrected for an amount of positional deviation between image information and layout information. The defects information is added with the image at the time of inspection, and then is compared with an image at the time of checking defects to correct the location of the defect. When checking defects, an image is obtained and then is added to the defects information, and the defects information is compared with the image at the time of checking defects and an image detected by another apparatus or with the layout information, to correct the location of the defect.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了消除在被测试的基板上投射带电粒子束的方法，并且检测发射的二次电子等以获得图像的问题，然后将获得的图像与通过移动到图案缺陷的位置来检查用于图案缺陷的基板的参考图像或缺陷，通过照射带电粒子束对待测试的基板进行充电，使带电粒子束弯曲，那么缺陷的位置偏差。解决方案：检查检查时的位置偏差量和与参考图像的位置偏差量，同时计算出在检查时纠正缺陷的位置。缺陷信息在检查时添加图像，然后对图像信息和布局信息之间的位置偏差量进行校正。缺陷信息在检查时与图像一起添加，然后与检查缺陷时的图像进行比较，以校正缺陷的位置。当检查缺陷时，获得图像，然后将其添加到缺陷信息中，并且在检查缺陷时的缺陷信息和与其他装置检测到的图像或布局信息相比较时，将缺陷信息与图像进行比较，以校正缺陷。

4. 发明专利

JP2003016983A Charged particle ray device and automatic astigmatic adjusting method 有权
标题翻译：充电粒子装置和自动平衡调整方法
公开(公告)号：JP2003016983A
公开(公告)日：2003-01-17
申请号：JP2001202904
申请日：2001-07-04
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： WATANABE MASAHIRO , TAKEDA MASATAKE , HAYAKAWA KOICHI , GUNJI YASUHIRO
IPC分类号： G01N23/225 , H01J37/153 , H01J37/28
CPC分类号： H01J37/153 , H01J37/28 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a charged particle ray device and an automatic astigmatic correction method allowing astigmatic and focus adjustment of high speed and high accuracy. SOLUTION: A small number of two-dimensional particle images acquired while changing the focus in two kinds of scanning directions are processed to detect the direction and grade of astigmatic difference and focus offset which are batch-converted into two kinds of astigmatic correction quantity and focus correction quantity to make a correction, thus realizing automatic astigmatic and focus adjustment of high speed and high accuracy. An astigmatic difference error is corrected to realize automatic astigmatic and focus adjustment of higher accuracy and further to realize the device that realizes inspection and measurement of high accuracy over a long time using the automatic astigmatic and focus adjustment.
摘要翻译：要解决的问题：提供一种带电粒子射线装置和自动散光校正方法，允许高速和高精度的像散和焦点调节。解决方案：处理在两种扫描方向上改变焦点时获取的少量二维粒子图像，以检测散焦差异和聚焦偏移的方向和等级，将其分批转换为两种散光校正量和焦点校正量进行校正，从而实现高速，高精度的自动散光和焦点调节。校正散光差异误差，实现更高精度的自动散光和聚焦调整，并进一步实现使用自动散光和聚焦调整实现长时间高精度检测和测量的设备。

5. 发明专利

JP2006162609A Method and system for pattern inspection using electron beam 有权
标题翻译：使用电子束的图案检查的方法和系统
公开(公告)号：JP2006162609A
公开(公告)日：2006-06-22
申请号：JP2005333561
申请日：2005-11-18
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HIROI TAKASHI , KUNI TOMOHIRO , WATANABE MASAHIRO , SHISHIDO CHIE , SHINADA HIROYUKI , GUNJI YASUHIRO , TAKATO ATSUKO
IPC分类号： G01N23/225 , G01B15/04 , H01J37/22 , H01J37/244 , H01J37/28 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a method and a system for pattern inspection using electron beam, which can solve the problem inherent to the present technology in electron optics systems or detectors requiring detector of above a certain area or larger as an important factor for irradiating electron beam and detect its secondary electrons, etc. at a high speed, where the detection of 200 Msps or higher is actually difficult due to the constraint of the frequency being inversely proportional to the area.
SOLUTION: For example, to detect at 400 Msps with the required area set as 4 mm angle and speed at this 4 mm angle as 150 Msps, four simple detectors of high-speed 2 mm angle are aligned, signals of them are amplified and then added to be subject to A/D conversion. Alternatively, a secondary electronic deflector is used to allow secondary electrons to sequentially be incident into the detector of 8 mm angle, detected at 100 Msps, and then aligned after A/D conversion. Both of these methods can achieve an area of 4 mm angle and a speed of 400 Msps.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种使用电子束进行图案检查的方法和系统，其可以解决当前技术中固有的电子光学系统或需要高于某一区域或更大的检测器的检测器的重要问题作为重要的问题用于照射电子束的因子并且以高速检测其二次电子等，其中由于频率与面积成反比的约束，实际上难以检测到200 Msps或更高。
解决方案：例如，为了检测400 Msps，所需区域设置为4 mm角，速度为4 mm，为150 Msps，高速2 mm角的四个简单检测器对齐，其信号为放大后再添加进行A / D转换。或者，二次电子偏转器用于允许二次电子顺序地入射到以100 Msps检测到的8mm角的检测器中，然后在A / D转换之后对准。这两种方法都可以达到4 mm角，400 Msps的速度。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

DE69734633T2 未知
公开(公告)号：DE69734633T2
公开(公告)日：2006-07-27
申请号：DE69734633
申请日：1997-09-09
申请人： HITACHI LTD , ZANAVY INFORMATICS KK
发明人： FUJIWARA TOSHIO , FUKUNAGA YASUSHI , NAKAMURA KOZO , KURATA KEN ICHIROU , GUNJI YASUHIRO , ENDO YOSHINORI , OKUDE MARIKO
IPC分类号： G01C21/20 , G09B29/10 , G01C21/00 , G01C21/36 , G08G1/0969

7. 发明专利

DE69124820T2 未知
公开(公告)号：DE69124820T2
公开(公告)日：1997-07-24
申请号：DE69124820
申请日：1991-04-25
申请人： HITACHI CABLE , HITACHI LTD
发明人： SANOBE HISAO , OHO SHIGERU , MAKINO JUNICHI , GUNJI YASUHIRO , KAJIOKA HIROSHI , KUMAGAI TATSUYA
IPC分类号： G01C19/72
摘要： In an optical fiber gyroscope, the sensitivity thereof is optimalized with a phase bias afforded by utilizing the phase characteristics of an optical branching/coupling unit (20). Further, the fluctuation of the intensity of a light source (10) and the error and secular change of the phase characteristics of the optical branching/coupling unit (20) are compensated by an electronic circuit. Moreover, an optical fiber loop (30) is received in a heat insulation casing (3, 4, 5) so as not to be affected by an ambient temperature change, thereby to prevent the drift of the optical fiber gyroscope attributed to the temperature change. Thus, the optical fiber gyroscope of high measurement accuracy is provided.

8. 发明专利

DE69734633D1 未知
公开(公告)号：DE69734633D1
公开(公告)日：2005-12-22
申请号：DE69734633
申请日：1997-09-09
申请人： HITACHI LTD , ZANAVY INFORMATICS KK
发明人： FUJIWARA TOSHIO , FUKUNAGA YASUSHI , NAKAMURA KOZO , KURATA KEN ICHIROU , GUNJI YASUHIRO , ENDO YOSHINORI , OKUDE MARIKO
IPC分类号： G09B29/10 , G01C21/00 , G01C21/36 , G08G1/0969 , G01C21/20

9. 发明专利

DE69124820D1 未知
公开(公告)号：DE69124820D1
公开(公告)日：1997-04-10
申请号：DE69124820
申请日：1991-04-25
申请人： HITACHI CABLE , HITACHI LTD
发明人： SANOBE HISAO , OHO SHIGERU , MAKINO JUNICHI , GUNJI YASUHIRO , KAJIOKA HIROSHI , KUMAGAI TATSUYA
IPC分类号： G01C19/72
摘要： In an optical fiber gyroscope, the sensitivity thereof is optimalized with a phase bias afforded by utilizing the phase characteristics of an optical branching/coupling unit (20). Further, the fluctuation of the intensity of a light source (10) and the error and secular change of the phase characteristics of the optical branching/coupling unit (20) are compensated by an electronic circuit. Moreover, an optical fiber loop (30) is received in a heat insulation casing (3, 4, 5) so as not to be affected by an ambient temperature change, thereby to prevent the drift of the optical fiber gyroscope attributed to the temperature change. Thus, the optical fiber gyroscope of high measurement accuracy is provided.

10. 发明专利

DE69420418T2 未知
公开(公告)号：DE69420418T2
公开(公告)日：2000-05-25
申请号：DE69420418
申请日：1994-11-29
申请人： ZANAVY INFORMATICS KK , HITACHI LTD
发明人： HOSHINO MASATOSHI , OHO SHIGERU , GUNJI YASUHIRO , KURODA HIROSHI , TAKANO KENJI , NAGASHIMA YOSHIMASA , ONARI MIKIHIKO
IPC分类号： G01C21/16 , G01C21/28 , G01S19/49 , H01Q1/12 , G01C21/20
摘要： A navigation system which can enhance the position determining accuracy of a mobile object without employing any high precision measuring instrument. The navigation system comprises a GPS range measuring device (101 in Fig. 1), an angular velocity measuring device (102), a velocity measuring device (103) and an azimuth measuring device (104), which measure the motion of the mobile object; a GPS range error estimating device (105), an angular velocity error estimating device (106), a velocity, error estimating device (107) and an azimuth error estimating device (108), which estimate errors involved in the respectively corresponding measuring devices; and a position calculating device (109) which calculates the position of the mobile object from the outputs of the error estimating devices. The error estimating devices are implemented by Kalman filters and averaging processes. The factors of the errors of the individual measuring devices are assumed, and the outputs thereof are corrected, so that the position of the mobile object can always be determined at a high accuracy without employing any high precision sensor.

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