专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

DE2938240A1 未知
公开(公告)号：DE2938240A1
公开(公告)日：1980-03-27
申请号：DE2938240
申请日：1979-09-21
申请人： HITACHI LTD
发明人： MATSUOKA YOSHITAKA , SHIMAZOE MICHITAKA , YAMAMOTO YOSHIMI , AI MITSUO , MIYAUCHI KENJI , NEMOTO HIDEYUKI , TSUCHIYA MASATOSHI , TANABE MASANORI
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84 , G01L9/08

2. 发明专利

HU183665B SEMICONDUCTOR DIAPHRAGM, MECHANO-ELECTRIC CONVERTER AND DYNAMOMETER CELL OF SEMICONDUCTOR 未知
公开(公告)号：HU183665B
公开(公告)日：1984-05-28
申请号：HU330381
申请日：1981-11-05
申请人： HITACHI LTD
发明人： SHIMAZOE MICHITAKA , MATSUOKA YOSHITAKA
IPC分类号： G01L1/18 , G01L1/22
摘要： A load cell comprises a semiconductor diaphragm which includes an outer flange portion, a central rigid portion having a smaller thickness than the outer flange portion and a thin resilient portion provided between the outer flange portion and the central rigid portion. At least two piezo-resistors constituting at least part of a bridge circuit are formed in the resilient portion. The load cell further comprises a first glass block secured to the central rigid portion, and a second glass block for securing the outer flange portion. A load is applied to the semiconductor diaphragm through the first glass block, wherein measurement of the applied load is effected by detecting variation in resistance of the resistor bridge circuit.

3. 发明专利

DE3047619A1 未知
公开(公告)号：DE3047619A1
公开(公告)日：1981-09-24
申请号：DE3047619
申请日：1980-12-17
申请人： HITACHI LTD
发明人： SHIMAZOE MICHITAKA , MATSUOKA YOSHITAKA , AKAHANE RYOZO , SHIMIZU YASUSHI , NEMOTO HIDEYUKI , TANABE MASANORI
IPC分类号： G01L9/00 , G01L9/04 , G01L13/02 , G01L13/06
摘要： A differential pressure measuring transducer assembly including a measuring diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and a central boss area of large thickness and a peripheral support flange on the other surface thereof defining therebetween an annular portion of small thickness. The measuring diaphragm is attached at the peripheral support flange to a glass support member and a metallic support member formed with pressure conducting bores respectively communicating with each other. The metallic support member is formed of material having a Young's modulus substantially equal to that of the measuring diaphragm.

4. 发明专利

DE2809549A1 未知
公开(公告)号：DE2809549A1
公开(公告)日：1978-10-12
申请号：DE2809549
申请日：1978-03-06
申请人： HITACHI LTD
发明人： TANABE MASANORI , SHIMADA SATOSHI , NISHIHARA MOTOHISA , YAMADA KAZUJI , MATSUDA YASUMASA , SHIMAZOE MICHITAKA , MATSUOKA YOSHITAKA , TAKAHASHI YUKIO , KATOHGI KATSUYA , AI MITSUO
IPC分类号： G01L9/00 , H01L29/84 , H01L41/10

5. 发明专利

JPH0414512B2 失效
公开(公告)号：JPH0414512B2
公开(公告)日：1992-03-13
申请号：JP594282
申请日：1982-01-20
申请人： HITACHI LTD
发明人： KUGAYA TAKASHI , OKAYAMA TSUTOMU , SHIMAZOE MICHITAKA
IPC分类号： G01L9/04 , H01L29/84

6. 发明专利

JPS6093934A DETECTOR OF PRESSURE AND DIFFERENTIAL PRESSURE 失效
公开(公告)号：JPS6093934A
公开(公告)日：1985-05-25
申请号：JP20220983
申请日：1983-10-28
申请人： HITACHI LTD
发明人： SHIMAZOE MICHITAKA , MATSUOKA YOSHITAKA , YAMAMOTO YOSHIKI , OZAWA NOBORU
IPC分类号： G01L9/00 , G01L13/02
摘要： PURPOSE:To prevent changes in the zero point when one hand flange alone is heated or cooled by covering a diaphragm with flange covers better in the heat conductivity, which are thermally connected to flanges as opposed thereto. CONSTITUTION:Flange covers 11 and 12 are provided to protect flanges 1 and 2 from direct exposure to direct sunshine and a hot air. The flange cover 11 covering the side of the flange 1 is, for example, extended to the side of the flange 2 at the bottom thereof while lthe flange cover 12 covering the side of the flange 2 is, for example, extended to the side of the flange 1 at the bottom thereof. They are fixed to the flanges 1 and 2 with bolts 13 and 14 at the overlapped parts of the bottoms respectively. The flange covers 11 and 12 employ a metal plate better in the heat conductivity and with a small heat capacity and heat accumulated in the flange covers 11 and 12 is dispersed thoroughly and evenly transmitted to flanges 1 and 2 on both sides through bolts 13 and 14.

7. 发明专利

JPS5938745B2 JPS5938745B2 - 失效
公开(公告)号：JPS5938745B2
公开(公告)日：1984-09-19
申请号：JP7203477
申请日：1977-06-20
申请人： Hitachi Ltd
发明人： SHIMAZOE MICHITAKA , KOSUGI TETSUO , TAKAHASHI YUKIO , KURIHARA YASUTOSHI
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84 , H01L45/00

8. 发明专利

JPS5928070B2 JPS5928070B2 - 失效
公开(公告)号：JPS5928070B2
公开(公告)日：1984-07-10
申请号：JP8603077
申请日：1977-07-20
申请人： Hitachi Ltd
发明人： KURIHARA YASUTOSHI , SHIMAZOE MICHITAKA , KOSUGI TETSUO
IPC分类号： G01B7/16 , H01L29/84 , H01L45/00

9. 发明专利

JPS5983023A SEMICONDUCTOR PRESSURE DIFFERENCE DETECTOR 失效
公开(公告)号：JPS5983023A
公开(公告)日：1984-05-14
申请号：JP19245482
申请日：1982-11-04
申请人： HITACHI LTD
发明人： SHIMAZOE MICHITAKA , OKAYAMA TSUTOMU , MATSUOKA YOSHITAKA
IPC分类号： G01L9/04 , G01L9/00
摘要： PURPOSE:To make the relationship between pressure and output linear even at the measuring time for low pressure, by providing regions having different thicknesses in a strain yielding part, and forming strain sensitive elements on the thick strain yielding parts. CONSTITUTION:The diaphragm part of a semiconductor pressure difference detector comprises two stepped parts having different thicknesses, i.e., convex strain yielding parts 34 having a relatively thick size and diaphragm parts 36 having th thickness thinner than the part 34. The end parts of the convex strain yielding parts 34 are connected to a fixing part 30 and form a cross shape. Gage resistors 38 in a P shape are formed on the upper surfaces of the convex strain yielding parts 34 and take out full bridge outputs by pressure. In this constitution, the convex strain yielding parts 34 can yield large strain based on small forces, i.e., low pressures. Therefore, the relationship between the pressure and the output can be made linear even at the measuring time of the low pressure.

10. 发明专利

JPS5882137A PRESSURE DETECTOR 失效
公开(公告)号：JPS5882137A
公开(公告)日：1983-05-17
申请号：JP17974281
申请日：1981-11-11
申请人： HITACHI LTD
发明人： TAKAHASHI YUKIO , SHIMAZOE MICHITAKA
IPC分类号： G01L9/04 , G01L9/00
摘要： PURPOSE:To raise safety and reliability by forming a pressure receiving chamber by making anode-connection of the diaphragm made of a semiconductor single crystal at a pressure conversion section with a member that is provided with a fluid introduction hole with thermal expansion coefficient that is about the same as the diaphragm. CONSTITUTION:A pressure conversion section 11 consists of a single crystal diaphragm 12 that is provided with a strain sensitive section, an insulation film that is formed on the diaphragm 12 and a thin film strain gauge 14 that is fixed on the insulation film 13. The pressure conversion section 11 is stacked on a metallic supporting base 20 made of Kovar through a glass base 18 on which a fluid introduction hole 17 with thermal expansion coefficient that is about the same as that of the diaphragm 12 on the pressure conversion section 11. The pressure conversion section 11 and the metallic supporting base 20 are electrically firmly connected by anode-connection to form a pressure receiving chamber 21. With this arrangement organic materials that deteriorate characteristic can be eliminated and also the effects of the strain of the weldment of the gauge 14 and others can be avoided.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式