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    • 6. 发明专利
    • THIN-FILM MAGNETIC HEAD AND ITS MANUFACTURE
    • JPH0258718A
    • 1990-02-27
    • JP20984388
    • 1988-08-24
    • HITACHI LTD
    • TSUCHIYA MASATOSHIASHIDA EIJIKONUMA AKIRAFUYAMA MORIAKINARUSHIGE SHINJITOGAWA EISEI
    • G11B5/31
    • PURPOSE:To work a magnetic gap with high accuracy and yield by making the end face of a gap member at the back gap position at which an upper magnetic body is connected with a lower magnetic body, perpendicular or almost perpendicular to the lower magnetic body. CONSTITUTION:The end face of a gap member 4 is made perpendicular or almost perpendicular to a lower magnetic body 3 at the back gap position where an upper magnetic body 7 is connected with the lower magnetic body 3. When a base film, the lower magnetic body, the gap member, and an organic insulating film are formed on a base plate in prescribed order and dry etching is performed with a reactive gas by using the insulating film as a mask, the end face of the gap member becomes perpendicular or almost perpendicular to the lower magnetic body at the back gap position where the upper and lower magnetic bodies are connected with each other. Therefore, the contact area between the upper and lower magnetic bodies becomes the maximum and the magnetic resistance becomes the minimum. In addition, the gap opening starting position can be detected with high accuracy when a grinding work is performed at the front gap position of the preceding body of this thin-film magnetic head.