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    • 1. 发明申请
    • METHOD OF MANUFACTURING FLUORINATED GAS COMPOUNDS AND APPARATUS FOR MANUFACTURING THE SAME
    • 制造氟化气体化合物的方法及其制造方法
    • US20100239485A1
    • 2010-09-23
    • US12740386
    • 2008-12-19
    • Hisao TanakaIsamu MoriKenji Tanaka
    • Hisao TanakaIsamu MoriKenji Tanaka
    • C01B21/083B01J19/00C01B7/24
    • C01B7/24C01B21/0832C01B21/0835
    • An apparatus of generating fluorinated gas compounds by means of reacting liquid stock with gaseous material is characterized by providing a circulating system comprised of a reaction chamber where a liquid mixture containing the liquid stock reacts with the gaseous material, a fluid conduit through which the liquid mixture alone flows, an upper fluid channel through which the reacted liquid mixture moves from the top of the reaction chamber to the top of the fluid conduit, and a lower fluid channel through which the liquid mixture moves from the bottom of the fluid conduit to the bottom of the reaction chamber, and sparging into the bottom of the reaction chamber (A) the virgin gaseous material and (B) at least one selected from the fluorinated gas compounds resulted from the reaction in the reaction chamber, including the first fluorinated gas product generated in the first cycle of the reaction and the second or later gas product resulted from further fluorinating the first or later gas product in the succeeding cycle, so as to circulate the liquid mixture.
    • 通过使液体原料与气态材料反应产生氟化气体化合物的装置的特征在于提供一种循环系统,其包括反应室,其中含有液体原料的液体混合物与气态物质反应,流体导管,液体混合物 单独流动,上部流体通道,反应的液体混合物通过该上部流体通道从反应室的顶部移动到流体导管的顶部;以及下部流体通道,液体混合物通过该下部流体通道从流体导管的底部移动到底部 的反应室(A)的底部喷射到原始气态物质,(B)选自反应室中的反应产生的氟化气体化合物中的至少一种,包括产生的第一氟化气体产物 在反应的第一个循环中,第二个或更迟的气体产物由第一个或更迟的氟化进一步产生 气体产品在随后的循环中,以便使液体混合物循环。
    • 6. 发明授权
    • Variable capacitance device
    • 可变电容器件
    • US09224536B2
    • 2015-12-29
    • US13568172
    • 2012-08-07
    • Akira KumadaTeruhisa ShibaharaKenji Tanaka
    • Akira KumadaTeruhisa ShibaharaKenji Tanaka
    • H01G5/00H01G7/00H01G7/06H01H57/00G01R27/26H01G5/16H03J3/20
    • H01G5/16H03J3/20H03J2200/19
    • A variable capacitance device that achieves a desired capacitance even when factors causing varied capacitances are generated is configured such that a capacitance detection pulse signal is applied from a capacitance detection signal generation unit to a driving capacitor and a reference capacitor of a MEMS mechanical unit. The device voltage of the driving capacitor based on the capacitance detection signal and a driving voltage is applied to the inverting input terminal of a comparator. The device voltage of the reference capacitor based on the capacitance detection signal and the driving voltage is applied to the non-inverting input terminal of the comparator. The comparator generates a comparison output signal including “Hi” and “Low” values from the difference between these device voltages, and applies the output signal to a driving voltage generation unit. The driving voltage generation unit increases or decreases the driving voltage based on the comparison output signal.
    • 即使产生导致变化的电容的因素,实现期望的电容的可变电容器件被配置为使得电容检测脉冲信号从电容检测信号生成单元施加到MEMS机械单元的驱动电容器和参考电容器。 基于电容检测信号的驱动电容器的器件电压和驱动电压被施加到比较器的反相输入端。 基于电容检测信号和驱动电压的参考电容器的器件电压被施加到比较器的非反相输入端。 比较器从这些器件电压之间的差产生包括“Hi”和“Low”值的比较输出信号,并将输出信号施加到驱动电压产生单元。 驱动电压产生单元根据比较输出信号来增大或减小驱动电压。