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1. 发明申请

US20050066825A1 Method for manufacturing stamper for information medium manufacture, stamper, and photoresist original disk 审中-公开
标题翻译：用于信息介质制造，压模和光致抗蚀剂原盘的压模的制造方法
公开(公告)号：US20050066825A1
公开(公告)日：2005-03-31
申请号：US10500008
申请日：2002-12-27
申请人： Hisaji Oyake , Hiroaki Takahata , Hitoshi Arai , Hajime Utsunomiya
发明人： Hisaji Oyake , Hiroaki Takahata , Hitoshi Arai , Hajime Utsunomiya
IPC分类号： G11B7/26
CPC分类号： G11B7/261 , G03F7/0017 , G11B7/263
摘要： A stamper with a sharp protrusion/depression pattern is obtained, and high precision information media can be produced using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by laminating a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, and then forming an protrusion/depression pattern 106 in the photoresist layer 104 by forming and developing a latent image, providing Pd on the surface of the protrusion/depression pattern 106 as a preliminary treatment to conducting electroless plating onto the protrusion/depression pattern of the photoresist master 100, and forming a stamper 120 by forming a thin metal film 108 on top of the Pd-containing protrusion/depression pattern surface by using electroless plating, forming a Ni film 110 on top of this Ni thin film 108 using electroforming, and then removing the thin metal film 108 and the Ni film 110.
摘要翻译：获得具有尖锐突起/凹陷图案的压模，并且可以使用该压模生产高精度信息介质。制造压模的方法包括以下步骤：通过在基板102的顶部上层叠光吸收层103和光致抗蚀剂层104，然后在光致抗蚀剂层104中形成突起/凹陷图案106，通过形成并显影潜像，在突起/凹陷图案106的表面上提供Pd作为对光致抗蚀剂母版100的突起/凹陷图案进行化学镀的初步处理，以及通过形成薄金属膜108形成压模120 通过使用无电解电镀在含Pd的突起/凹陷图案表面的顶部上，使用电铸在该Ni薄膜108的顶部上形成Ni膜110，然后除去薄金属膜108和Ni膜110。

2. 发明申请

US20050042427A1 Method for manufacturing stamper for information medium manufacture, stamper, and stamper intermediate with master disk 审中-公开
标题翻译：用于制造用于信息介质制造的压模的方法，压模和用于主盘的压模
公开(公告)号：US20050042427A1
公开(公告)日：2005-02-24
申请号：US10500719
申请日：2003-01-06
申请人： Hisaji Oyake , Hiroaki Takahata , Hajime Utsunomiya
发明人： Hisaji Oyake , Hiroaki Takahata , Hajime Utsunomiya
IPC分类号： G11B7/26 , B41M5/00
CPC分类号： G11B7/261 , G11B7/263 , Y10T428/24802
摘要： A stamper with a sharp uneven pattern and a favorable surface state is obtained. A photoresist master 100 is manufactured by forming a light absorption layer 103 and a photoresist layer 104, in that order, on top of a substrate 102, and then forming an uneven pattern 106 in the photoresist layer 104 by forming and developing a latent image, a Ni thin film 108 is formed on top of the uneven pattern 106 of the photoresist master 100 using either a sputtering method or a vapor deposition method, a Ni film 110 is formed on top of the Ni thin film 108, and then the Ni thin film 108 and the Ni film 110 are separated from the photoresist master 100 to form a stamper 120.
摘要翻译：获得具有尖锐不均匀图案和良好表面状态的压模。通过在基板102的顶部依次形成光吸收层103和光致抗蚀剂层104，然后通过形成和显影潜像在光致抗蚀剂层104中形成不均匀图案106来制造光致抗蚀剂母版100，使用溅射法或气相沉积法在光致抗蚀剂母版100的不平坦图案106的顶部上形成Ni薄膜108，在Ni薄膜108的顶部形成Ni薄膜110，然后将Ni薄膜膜108和Ni膜110与光致抗蚀剂母版100分离以形成压模120。

3. 发明授权

US07204188B2 Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master 失效
标题翻译：用于制造信息介质，压模和光致抗蚀剂母版的压模的方法
公开(公告)号：US07204188B2
公开(公告)日：2007-04-17
申请号：US10500816
申请日：2003-01-06
申请人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
发明人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
IPC分类号： B41F33/00
CPC分类号： G11B7/263 , G11B7/261
摘要： A stamper with a sharp uneven pattern for manufacturing high precision information media and a method of manufacturing a stamper. The method includes (1) manufacturing a photoresist master by forming a light absorption layer and a photoresist layer on substrate, (2) forming a latent image on the photoresist layer, and an uneven pattern in the photoresist layer by developing the latent image, (3) forming a Ni thin film on the uneven pattern by electroless plating, (4) forming a Ni film on the Ni thin film, and (5) removing the Ni thin film and the Ni film from the photoresist master. The method also includes, prior to the step of forming the Ni thin film on the photoresist layer, a metal catalyst being provided on the surface of the uneven pattern, the metal catalyst being activated, and the surface of the uneven pattern being washed with ultra pure water.
摘要翻译：具有用于制造高精度信息介质的尖锐不均匀图案的压模以及制造压模的方法。该方法包括：（1）通过在基板上形成光吸收层和光致抗蚀剂层来制造光致抗蚀剂母版，（2）通过显影潜像在光致抗蚀剂层上形成潜像和不透明图案（ 3）通过化学镀在不平坦图案上形成Ni薄膜，（4）在Ni薄膜上形成Ni膜，（5）从光致抗蚀剂母版中去除Ni薄膜和Ni薄膜。该方法还包括在光致抗蚀剂层上形成Ni薄膜的步骤之前，在不均匀图案的表面上设置金属催化剂，使金属催化剂活化，不均匀图案的表面用超级清洗纯净水。

4. 发明申请

US20050142320A1 Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
标题翻译：光致抗蚀剂母版的处理方法，记录介质的制造方法，记录介质的制造方法，光致抗蚀剂母版，记录媒体使用主和记录介质
公开(公告)号：US20050142320A1
公开(公告)日：2005-06-30
申请号：US10507429
申请日：2003-03-10
申请人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
发明人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
IPC分类号： B05D3/00 , B30B15/06 , B32B3/26 , G03F7/20 , G11B7/0045 , G11B7/013 , G11B7/26
CPC分类号： G11B7/261 , B23K26/0622 , B23K26/0823 , B23K26/0869 , B23K26/40 , B23K2103/50 , G03F7/70383 , G11B7/00456 , G11B7/24085 , G11B7/263 , G11B23/0085 , Y10S430/146 , Y10T428/24355 , Y10T428/31504
摘要： The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
摘要翻译：本发明涉及一种用于处理光刻胶涂覆板的方法，一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法，该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案，使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c，从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。当要形成的预制凹坑的长度短于4T时，例如，输入到光调制器109的脉冲信号序列的占空比在约50％至65％的范围内变化，使得脉冲随着要形成的预制凹坑的长度变长，激光束的功率由如此产生的脉冲信号列调制，产生具有较高占空比的信号序列。另一方面，当要形成的预制凹坑的长度等于或大于4T时，例如，产生具有恒定占空比的脉冲信号序列，独立于预制凹坑的长度形成的激光束的功率由如此产生的脉冲信号串调制。

5. 发明申请

US20050039621A1 Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master 失效
标题翻译：用于制造信息介质，压模和光致抗蚀剂母版的压模的方法
公开(公告)号：US20050039621A1
公开(公告)日：2005-02-24
申请号：US10500816
申请日：2003-01-06
申请人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
发明人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
IPC分类号： G11B7/26 , B41C1/00
CPC分类号： G11B7/263 , G11B7/261
摘要： A stamper with a sharp uneven pattern is obtained, and high precision information media can be manufactured using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by forming a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, forming a latent image on the photoresist layer 104, and then forming an uneven pattern 106 in the photoresist layer 104 by developing the latent image, forming a Ni thin film 108 on the uneven pattern 106 of the photoresist master 100 by electroless plating, forming a Ni film 110 on top of the Ni thin film 108, and then removing the Ni thin film 108 and the Ni film 110 from the photoresist master 100 to form the stamper 120, wherein as preliminary treatments prior to the step of forming the Ni thin film 108 on the photoresist layer 104, a metal catalyst is provided on the surface of the uneven pattern 106, the metal catalyst is activated, and the surface of the uneven pattern 106 on which the metal catalyst has been provided is washed with ultra pure water.
摘要翻译：获得具有尖锐不均匀图案的压模，并且可以使用该压模来制造高精度的信息介质。制造压模的方法包括以下步骤：通过在衬底102的顶部上形成光吸收层103和光致抗蚀剂层104，在光致抗蚀剂层104上形成潜像，然后形成不均匀图案来制造光致抗蚀剂母版100 通过显影潜像在光致抗蚀剂层104中，通过无电镀在光致抗蚀剂母版100的不平坦图案106上形成Ni薄膜108，在Ni薄膜108的顶部形成Ni膜110，然后除去 Ni薄膜108和来自光致抗蚀剂母版100的Ni膜110以形成压模120，其中作为在光致抗蚀剂层104上形成Ni薄膜108的步骤之前的预处理，在不均匀图案106，金属催化剂被活化，并且用超纯水洗涤其上提供金属催化剂的不平坦图案106的表面。

6. 发明授权

US06704274B2 Optical recording disc 有权
标题翻译：光记录盘
公开(公告)号：US06704274B2
公开(公告)日：2004-03-09
申请号：US10193222
申请日：2002-07-12
申请人： Hiroaki Takahata , Hisaji Oyake
发明人： Hiroaki Takahata , Hisaji Oyake
IPC分类号： G11B724
CPC分类号： G11B7/24079 , G11B7/24076 , G11B7/24082 , G11B7/24085 , G11B7/261
摘要： A groove is present in a surface of a disc substrate. A part of the groove is curved toward another groove adjacent to the groove to thereby form a land pre-pit. The following relations hold among DG, DP and r: 0.267≦(DP/DG)2·r≦0.701; and 3.185≦(DP/DG)/r≦8.553, where DG: depth of the groove 4B, DP: depth of the land pre-pit 5A, r [&mgr;m]: distance between the center of the land pre-pit 5A and the center line of the groove 4B having the curved land pre-pit 5A.
摘要翻译：在盘基片的表面存在凹槽。槽的一部分向与槽相邻的另一个槽弯曲，从而形成焊盘预制坑。在DG，DP和r之间保持以下关系：其中DG：槽4B的深度，DP：凹坑5A，r [mum]：焊盘预制槽5A的中心与具有弯曲的焊盘前凹坑5A的凹槽4B的中心线之间的距离。

7. 发明授权

US06498777B2 Optical recording medium having a land height ratio 有权
标题翻译：具有平台高度比的光学记录介质
公开(公告)号：US06498777B2
公开(公告)日：2002-12-24
申请号：US09845273
申请日：2001-05-01
申请人： Hiroaki Takahata , Hisaji Oyake
发明人： Hiroaki Takahata , Hisaji Oyake
IPC分类号： G11B370
CPC分类号： G11B7/24085 , G11B7/007 , G11B7/26
摘要： In an optical recording medium comprising a substrate including parallel extending lands and grooves on one surface thereof, the grooves serving as recording tracks, and the lands being formed with prepits, the height HP of the land disposed between the prepit and the groove divided by the height HL of the land in a prepit-free region, both as measured from the groove bottom, i.e., HP/HL ranges from 0.25 to less than 1. This enables to significantly increase the recording density of the medium without a substantial cost increase.
摘要翻译：在包括在其一个表面上具有平行的延伸焊盘和凹槽的基板的光学记录介质中，用作记录轨道的凹槽和用预凹坑形成的焊盘，设置在预凹坑和凹槽之间的焊盘的高度HP由从凹槽底部测量，即HP / HL的范围从0.25到小于1，在无预浸渍区域中的焊盘的高度HL。这使得能够显着地增加介质的记录密度而不会显着地增加成本。

8. 发明授权

US07297472B2 Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
标题翻译：用于处理光致抗蚀剂涂覆的玻璃板的方法，用于制造用于记录介质的压模的方法，记录介质的制造方法，光致抗蚀剂涂覆的玻璃板，用于记录介质的压模和记录介质
公开(公告)号：US07297472B2
公开(公告)日：2007-11-20
申请号：US10507429
申请日：2003-03-10
申请人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
发明人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
IPC分类号： G11B7/45 , G11B7/26
CPC分类号： G11B7/261 , B23K26/0622 , B23K26/0823 , B23K26/0869 , B23K26/40 , B23K2103/50 , G03F7/70383 , G11B7/00456 , G11B7/24085 , G11B7/263 , G11B23/0085 , Y10S430/146 , Y10T428/24355 , Y10T428/31504
摘要： The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
摘要翻译：本发明涉及一种用于处理光刻胶涂覆板的方法，一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法，该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案，使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c，从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。当要形成的预制凹坑的长度短于4T时，例如，输入到光调制器109的脉冲信号序列的占空比在约50％至65％的范围内变化，使得脉冲随着要形成的预制凹坑的长度变长，激光束的功率由如此产生的脉冲信号列调制，产生具有较高占空比的信号序列。另一方面，当要形成的预制凹坑的长度等于或大于4T时，例如，产生具有恒定占空比的脉冲信号序列，独立于预制凹坑的长度形成的激光束的功率由如此产生的脉冲信号串调制。

9. 发明申请

US20050232130A1 Production method for photoresist master, production method for optical recording medium-producing stamper, stamper, phtoresist master, stamper intermediate element and optical recroding medium 审中-公开
标题翻译：光致抗蚀剂母版的制造方法，光记录介质制造用模具的制造方法，压模，雕刻母版，压模中间元件和光学重绘介质
公开(公告)号：US20050232130A1
公开(公告)日：2005-10-20
申请号：US10515404
申请日：2003-05-30
申请人： Hisaji Oyake , Hiroaki Takahata , Kenji Shirasuna
发明人： Hisaji Oyake , Hiroaki Takahata , Kenji Shirasuna
IPC分类号： G11B7/24 , G03F7/00 , G11B7/26
CPC分类号： G03F7/0017 , G11B7/261
摘要： A stamper (36) used for fabricating an optical recording medium is fabricated by forming a convexo-concave pattern (22) without development of a photoresist layer (16). A fabrication method of the stamper used for fabricating an optical recording medium includes: forming a light-absorbing layer (14) and the photoresist layer (16) on a glass substrate (10); forming the convexo-concave pattern (22) of undeveloped photoresist by irradiating the photoresist layer (16) with laser light from a surface of the photoresist layer that is opposite to the light-absorbing layer (14) so as to remove a part of the photoresist layer by energy of the laser light, thereby fabricating a photoresist master (26); forming a metal thin layer (28) on the convexo-concave pattern (22) in the photoresist master (26); forming a metal layer (30) on the metal thin layer (28) by electro-plating; and forming the stamper (36) by separating the metal thin layer (28) and the metal layer (30) from the photoresist master (26).
摘要翻译：用于制造光学记录介质的压模（36）通过形成不形成光致抗蚀剂层（16）的凹凸图案（22）来制造。用于制造光记录介质的压模的制造方法包括：在玻璃基板（10）上形成光吸收层（14）和光致抗蚀剂层（16）; 通过用来自与光吸收层（14）相对的光致抗蚀剂层的表面的激光照射光致抗蚀剂层（16），形成未显影的光致抗蚀剂的凹凸图案（22），以便去除部分光致抗蚀剂层，由此制造光致抗蚀剂母版（26）; 在所述光致抗蚀剂主体（26）中的所述凹凸图案（22）上形成金属薄层（28）; 通过电镀在金属薄层（28）上形成金属层（30）; 以及通过从金属薄层（28）和金属层（30）与光刻胶母版（26）分离而形成压模（36）。

10. 发明申请

US20050118534A1 Method for manufacturing stamper for information medium manufacture, stamper, and photoresist master disk 审中-公开
标题翻译：用于制造信息介质制造，压模和光致抗蚀剂母盘的压模的方法
公开(公告)号：US20050118534A1
公开(公告)日：2005-06-02
申请号：US10500893
申请日：2003-01-06
申请人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
发明人： Hisaji Oyake , Hiroaki Takahata , Kenji Yoneyama , Yuuichi Kawaguchi
IPC分类号： G11B7/26 , G03C5/00
CPC分类号： G11B7/263
摘要： A stamper with a sharp uneven pattern is obtained, and high precision information media can be manufactured using this stamper. A photoresist master 100 is manufactured by forming a light absorption layer 103 with a film thickness T that satisfies T>180 (nm) and a photoresist layer 104, in that order, on top of a substrate 102, and then forming an uneven pattern 106 in the photoresist layer 104 by forming and developing a latent image, and a stamper 120 is manufactured by forming a Ni thin film 108 on top of the uneven pattern 106 of the photoresist master 100 by electroless plating, forming a Ni film 110 on top of this Ni thin film 108 by electroforming, and then separating the Ni thin film 108 and the Ni film 110 from the photoresist master 100.
摘要翻译：获得具有尖锐不均匀图案的压模，并且可以使用该压模来制造高精度的信息介质。通过在基板102的顶部依次形成具有满足T> 180（nm）的膜厚度T的光吸收层103和光致抗蚀剂层104，然后形成不均匀图案106来制造光致抗蚀剂母版100 通过形成潜像来形成和显影光致抗蚀剂层104，并且通过无电解电镀在光致抗蚀剂母版100的不平坦图案106的顶部上形成Ni薄膜108来制造压模120，在其上形成Ni膜110 该Ni薄膜108通过电铸，然后将Ni薄膜108和Ni薄膜110与光致抗蚀剂母版100分离。

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