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    • 1. 发明授权
    • Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    • 用于制造信息介质,压模和光致抗蚀剂母版的压模的方法
    • US07204188B2
    • 2007-04-17
    • US10500816
    • 2003-01-06
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • B41F33/00
    • G11B7/263G11B7/261
    • A stamper with a sharp uneven pattern for manufacturing high precision information media and a method of manufacturing a stamper. The method includes (1) manufacturing a photoresist master by forming a light absorption layer and a photoresist layer on substrate, (2) forming a latent image on the photoresist layer, and an uneven pattern in the photoresist layer by developing the latent image, (3) forming a Ni thin film on the uneven pattern by electroless plating, (4) forming a Ni film on the Ni thin film, and (5) removing the Ni thin film and the Ni film from the photoresist master. The method also includes, prior to the step of forming the Ni thin film on the photoresist layer, a metal catalyst being provided on the surface of the uneven pattern, the metal catalyst being activated, and the surface of the uneven pattern being washed with ultra pure water.
    • 具有用于制造高精度信息介质的尖锐不均匀图案的压模以及制造压模的方法。 该方法包括:(1)通过在基板上形成光吸收层和光致抗蚀剂层来制造光致抗蚀剂母版,(2)通过显影潜像在光致抗蚀剂层上形成潜像和不透明图案( 3)通过化学镀在不平坦图案上形成Ni薄膜,(4)在Ni薄膜上形成Ni膜,(5)从光致抗蚀剂母版中去除Ni薄膜和Ni薄膜。 该方法还包括在光致抗蚀剂层上形成Ni薄膜的步骤之前,在不均匀图案的表面上设置金属催化剂,使金属催化剂活化,不均匀图案的表面用超级清洗 纯净水。
    • 2. 发明申请
    • Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    • 用于制造信息介质,压模和光致抗蚀剂母版的压模的方法
    • US20050039621A1
    • 2005-02-24
    • US10500816
    • 2003-01-06
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • G11B7/26B41C1/00
    • G11B7/263G11B7/261
    • A stamper with a sharp uneven pattern is obtained, and high precision information media can be manufactured using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by forming a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, forming a latent image on the photoresist layer 104, and then forming an uneven pattern 106 in the photoresist layer 104 by developing the latent image, forming a Ni thin film 108 on the uneven pattern 106 of the photoresist master 100 by electroless plating, forming a Ni film 110 on top of the Ni thin film 108, and then removing the Ni thin film 108 and the Ni film 110 from the photoresist master 100 to form the stamper 120, wherein as preliminary treatments prior to the step of forming the Ni thin film 108 on the photoresist layer 104, a metal catalyst is provided on the surface of the uneven pattern 106, the metal catalyst is activated, and the surface of the uneven pattern 106 on which the metal catalyst has been provided is washed with ultra pure water.
    • 获得具有尖锐不均匀图案的压模,并且可以使用该压模来制造高精度的信息介质。 制造压模的方法包括以下步骤:通过在衬底102的顶部上形成光吸收层103和光致抗蚀剂层104,在光致抗蚀剂层104上形成潜像,然后形成不均匀图案来制造光致抗蚀剂母版100 通过显影潜像在光致抗蚀剂层104中,通过无电镀在光致抗蚀剂母版100的不平坦图案106上形成Ni薄膜108,在Ni薄膜108的顶部形成Ni膜110,然后除去 Ni薄膜108和来自光致抗蚀剂母版100的Ni膜110以形成压模120,其中作为在光致抗蚀剂层104上形成Ni薄膜108的步骤之前的预处理,在 不均匀图案106,金属催化剂被活化,并且用超纯水洗涤其上提供金属催化剂的不平坦图案106的表面。
    • 4. 发明申请
    • Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    • 光致抗蚀剂母版的处理方法,记录介质的制造方法,记录介质的制造方法,光致抗蚀剂母版,记录媒体使用主和记录介质
    • US20050142320A1
    • 2005-06-30
    • US10507429
    • 2003-03-10
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • B05D3/00B30B15/06B32B3/26G03F7/20G11B7/0045G11B7/013G11B7/26
    • G11B7/261B23K26/0622B23K26/0823B23K26/0869B23K26/40B23K2103/50G03F7/70383G11B7/00456G11B7/24085G11B7/263G11B23/0085Y10S430/146Y10T428/24355Y10T428/31504
    • The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
    • 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。
    • 5. 发明授权
    • Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    • 用于处理光致抗蚀剂涂覆的玻璃板的方法,用于制造用于记录介质的压模的方法,记录介质的制造方法,光致抗蚀剂涂覆的玻璃板,用于记录介质的压模和记录介质
    • US07297472B2
    • 2007-11-20
    • US10507429
    • 2003-03-10
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • G11B7/45G11B7/26
    • G11B7/261B23K26/0622B23K26/0823B23K26/0869B23K26/40B23K2103/50G03F7/70383G11B7/00456G11B7/24085G11B7/263G11B23/0085Y10S430/146Y10T428/24355Y10T428/31504
    • The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
    • 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。
    • 10. 发明授权
    • Method of manufacturing optical recording medium and optical recording medium
    • 制造光记录介质和光记录介质的方法
    • US07193960B2
    • 2007-03-20
    • US10488103
    • 2002-08-26
    • Mamoru UsamiTsuyoshi KomakiKenji Yoneyama
    • Mamoru UsamiTsuyoshi KomakiKenji Yoneyama
    • G11B7/24
    • G11B7/24038G11B7/26G11B7/266G11B7/268
    • The present invention provides a method of manufacturing an optical recording medium having two recording layers on a supporting substrate and an optical recording medium obtained according to the method. A method of manufacturing an optical recording medium including the steps of: (A) providing a radiation-curable resin layer backed with a lining sheet 12 on a stamper 11 for the formation of information pits and/or grooves for the first recording layer, irradiating the resin layer with radiation to cure the resin layer, and removing the stamper 11, thereby to form the light transmitting layer 6 supported by the lining sheet 12; (B) forming the first recording layer 5 on the light transmitting layer 6; (C) forming the second recording layer 3 on the supporting substrate 2 with information pits and/or grooves for the second recording layer formed; (D) laminating the lining sheet 12 and the supporting substrate 2 via the space layer 4 so that the first recording layer 5 and the second recording layer 3 are located inside; and (E) removing the lining sheet 12.
    • 本发明提供一种在支撑基板上制造具有两个记录层的光记录介质的方法和根据该方法获得的光记录介质。 一种制造光记录介质的方法,包括以下步骤:(A)在压模11上设置背衬衬板12的辐射固化树脂层,以形成用于第一记录层的信息凹坑和/或凹槽,照射 树脂层具有固化树脂层的辐射,并去除压模11,从而形成由衬板12支撑的透光层6; (B)在透光层6上形成第一记录层5; (C)在支撑基板2上形成具有用于形成第二记录层的信息凹坑和/或凹槽的第二记录层3; (D)经由空间层4层叠衬片12和支撑衬底2,使得第一记录层5和第二记录层3位于内部; 和(E)去除衬片12。