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1. 发明申请

US20050142320A1 Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
标题翻译：光致抗蚀剂母版的处理方法，记录介质的制造方法，记录介质的制造方法，光致抗蚀剂母版，记录媒体使用主和记录介质
公开(公告)号：US20050142320A1
公开(公告)日：2005-06-30
申请号：US10507429
申请日：2003-03-10
申请人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
发明人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
IPC分类号： B05D3/00 , B30B15/06 , B32B3/26 , G03F7/20 , G11B7/0045 , G11B7/013 , G11B7/26
CPC分类号： G11B7/261 , B23K26/0622 , B23K26/0823 , B23K26/0869 , B23K26/40 , B23K2103/50 , G03F7/70383 , G11B7/00456 , G11B7/24085 , G11B7/263 , G11B23/0085 , Y10S430/146 , Y10T428/24355 , Y10T428/31504
摘要： The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
摘要翻译：本发明涉及一种用于处理光刻胶涂覆板的方法，一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法，该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案，使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c，从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。当要形成的预制凹坑的长度短于4T时，例如，输入到光调制器109的脉冲信号序列的占空比在约50％至65％的范围内变化，使得脉冲随着要形成的预制凹坑的长度变长，激光束的功率由如此产生的脉冲信号列调制，产生具有较高占空比的信号序列。另一方面，当要形成的预制凹坑的长度等于或大于4T时，例如，产生具有恒定占空比的脉冲信号序列，独立于预制凹坑的长度形成的激光束的功率由如此产生的脉冲信号串调制。

2. 发明授权

US07297472B2 Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
标题翻译：用于处理光致抗蚀剂涂覆的玻璃板的方法，用于制造用于记录介质的压模的方法，记录介质的制造方法，光致抗蚀剂涂覆的玻璃板，用于记录介质的压模和记录介质
公开(公告)号：US07297472B2
公开(公告)日：2007-11-20
申请号：US10507429
申请日：2003-03-10
申请人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
发明人： Hisaji Oyake , Tatsuya Kato , Hajime Utsunomiya , Masanori Shibahara , Kenji Yoneyama
IPC分类号： G11B7/45 , G11B7/26
CPC分类号： G11B7/261 , B23K26/0622 , B23K26/0823 , B23K26/0869 , B23K26/40 , B23K2103/50 , G03F7/70383 , G11B7/00456 , G11B7/24085 , G11B7/263 , G11B23/0085 , Y10S430/146 , Y10T428/24355 , Y10T428/31504
摘要： The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
摘要翻译：本发明涉及一种用于处理光刻胶涂覆板的方法，一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法，该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案，使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c，从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。当要形成的预制凹坑的长度短于4T时，例如，输入到光调制器109的脉冲信号序列的占空比在约50％至65％的范围内变化，使得脉冲随着要形成的预制凹坑的长度变长，激光束的功率由如此产生的脉冲信号列调制，产生具有较高占空比的信号序列。另一方面，当要形成的预制凹坑的长度等于或大于4T时，例如，产生具有恒定占空比的脉冲信号序列，独立于预制凹坑的长度形成的激光束的功率由如此产生的脉冲信号串调制。

3. 发明授权

US07859968B2 Information readout method for non mask layer type optical information medium 有权
标题翻译：非掩模层型光信息介质的信息读出方法
公开(公告)号：US07859968B2
公开(公告)日：2010-12-28
申请号：US12352304
申请日：2009-01-12
申请人： Takashi Kikukawa , Tatsuya Kato , Hajime Utsunomiya , Hiroshi Shingai
发明人： Takashi Kikukawa , Tatsuya Kato , Hajime Utsunomiya , Hiroshi Shingai
IPC分类号： G11B7/0045
CPC分类号： G11B7/005 , G11B7/1263 , G11B7/24
摘要： An information readout method for an optical information medium comprising an information recording layer having pits or recorded marks representative of information data involves the step of irradiating a laser beam to the information recording layer through an objective lens for providing readings of the pits or recorded marks. When the laser beam has a wavelength λ of 400 to 410 nm, the objective lens has a numerical aperture NA of 0.70 to 0.85, and the pits or recorded marks have a minimum size PL of up to 0.36λ/NA, readout is carried out at a power Pr of at least 0.4 mW for the laser beam. When the laser beam has a wavelength λ of 630 to 670 nm, the objective lens has a numerical aperture NA of 0.60 to 0.65, and the pits or recorded marks have a minimum size PL of up to 0.36λ/NA, readout is carried out at a power Pr of at least 1.0 mW for the laser beam. Pits or recorded marks of a size approximate to the resolution limit determined by diffraction can be read out at a high C/N.
摘要翻译：包括具有表示信息数据的凹坑或记录标记的信息记录层的光信息介质的信息读出方法包括通过用于提供凹坑或记录标记的读数的物镜将激光束照射到信息记录层的步骤。当激光束具有400至410nm的波长λ时，物镜的数值孔径NA为0.70至0.85，并且凹坑或记录标记具有高达0.36λ/ NA的最小尺寸PL，读出被执行在激光束的功率Pr为至少0.4mW。当激光束具有630至670nm的波长λ时，物镜的数值孔径NA为0.60至0.65，并且凹坑或记录标记具有高达0.36λ/ NA的最小尺寸PL，读出被执行在激光束的功率Pr为至少1.0mW。通过衍射确定的大小接近分辨率极限的刻痕或记录标记可以高C / N读出。

4. 发明授权

US07496019B2 Information readout method for non mask layer type optical information medium 有权
标题翻译：非掩模层型光信息介质的信息读出方法
公开(公告)号：US07496019B2
公开(公告)日：2009-02-24
申请号：US10125476
申请日：2002-04-19
申请人： Takashi Kikukawa , Tatsuya Kato , Hajime Utsunomiya , Hiroshi Shingai
发明人： Takashi Kikukawa , Tatsuya Kato , Hajime Utsunomiya , Hiroshi Shingai
IPC分类号： G11B7/0045
CPC分类号： G11B7/005 , G11B7/1263 , G11B7/24
摘要： An information readout method for an optical information medium comprising an information recording layer having pits or recorded marks representative of information data involves the step of irradiating a laser beam to the information recording layer through an objective lens for providing readings of the pits or recorded marks. When the laser beam has a wavelength λ of 400 to 410 nm, the objective lens has a numerical aperture NA of 0.70 to 0.85, and the pits or recorded marks have a minimum size PL of up to 0.36λ/NA, readout is carried out at a power Pr of at least 0.4 mW for the laser beam. When the laser beam has a wavelength λ of 630 to 670 nm, the objective lens has a numerical aperture NA of 0.60 to 0.65, and the pits or recorded marks have a minimum size PL of up to 0.36λ/NA, readout is carried out at a power Pr of at least 1.0 mW for the laser beam. Pits or recorded marks of a size approximate to the resolution limit determined by diffraction can be read out at a high C/N.
摘要翻译：包括具有表示信息数据的凹坑或记录标记的信息记录层的光信息介质的信息读出方法包括通过用于提供凹坑或记录标记的读数的物镜将激光束照射到信息记录层的步骤。当激光束具有400至410nm的波长λ时，物镜的数值孔径NA为0.70至0.85，并且凹坑或记录标记具有高达0.36λ/ NA的最小尺寸PL，读出被执行在激光束的功率Pr为至少0.4mW。当激光束具有630至670nm的波长λ时，物镜的数值孔径NA为0.60至0.65，并且凹坑或记录的标记具有高达0.36λ/ NA的最小尺寸PL，读出被执行在激光束的功率Pr为至少1.0mW。通过衍射确定的大小接近分辨率极限的刻痕或记录标记可以高C / N读出。

5. 发明申请

US20080239934A1 Optical recording medium and recording film material 有权
标题翻译：光记录介质和记录膜材料
公开(公告)号：US20080239934A1
公开(公告)日：2008-10-02
申请号：US12076070
申请日：2008-03-13
申请人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
发明人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
IPC分类号： G11B7/24
CPC分类号： G11B7/2433 , G11B7/24038 , G11B2007/2431 , G11B2007/24312 , G11B2007/24314 , G11B2007/25706 , G11B2007/25715 , Y10T428/21
摘要： An optical recording medium is provided which includes two or more information layers in which an Sb-based eutectic material is used as the material for a recording film of a translucent information layer. There is also provided a recording film material for the optical recording medium. The translucent information layer is configured to include a recording film formed of a phase change material SbxGeyInz containing Sb, Ge, and In in an atomic ratio of x:y:z, where 5≦y≦15 and 4≦z≦15 are satisfied. The recording film further includes Te in an atomic ratio of a, provided that x+y+z+a=100 and 4≦a≦15 are satisfied. An interface layer formed of a ZrO2—Cr2O3 film having a thickness of 2 nm or more and 10 nm or less is provided on the laser beam incident side of the recording film. When the compositional ratio of the ZrO2—Cr2O3 film is given by ZrO2:Cr2O3=B:C (mol %), 20≦B≦90, 10≦C≦80, and B+C=100 are satisfied.
摘要翻译：提供了一种光记录介质，其包括其中使用Sb基共晶材料作为半透明信息层的记录膜的材料的两个或更多个信息层。还提供了一种用于光学记录介质的记录膜材料。半透明信息层被配置为包括由包含Sb，Ge和Sb的相变材料Sb x Sub x Z z形成的记录膜;以及在x：y：z的原子比中，其中5 <= y <= 15且4 <= z <= 15。如果满足x + y + z + a = 100和4 <= a <= 15，则记录膜还包括原子比a的Te。提供由厚度为2nm以上且10nm以下的ZrO 2·2L 2 O 3·3膜形成的界面层在记录膜的激光束入射侧。当ZrO 2→2→2→3 <3>膜的组成比由ZrO 2：Cr： B = C（摩尔％），20 <= B <= 90，10 <= C <= 80，B + C = 100。

6. 发明申请

US20080175125A1 Optical recording medium and recording film material 有权
标题翻译：光记录介质和记录膜材料
公开(公告)号：US20080175125A1
公开(公告)日：2008-07-24
申请号：US12010163
申请日：2008-01-22
申请人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
发明人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
IPC分类号： G11B3/74
CPC分类号： G11B7/24038 , G11B7/2433 , G11B7/2578 , G11B7/259 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , G11B2007/25706 , G11B2007/25715 , Y10T428/21
摘要： A next-generation optical recording medium has two or more information layers which include a translucent information layer. The translucent information layer has a recording film and an interface layer, provided adjacent to the recording film on the side of the light incident surface. The recording film is made of a phase change material having SbxTeyGez elements and elemental ratios. Y satisfies 5≦y≦15 and z satisfies 5≦z≦15. When In having an elemental ratio of a is further added and x+y+z+a=100 holds, a satisfies 4≦a≦15. The interface layer comprises of ZrO2—Cr2O3 film thickness of which is in a range of from 2 nm to 10 nm. When ZrO2:Cr2O3═C:D (mol %), the compositional ratios ZrO2 and Cr2O3 in the ZrO2—Cr2O3 film, holds, the C satisfies 20≦C≦90, and the D satisfies 10≦D≦80, and the C and the D satisfy C+D=100. The ZrO2 is stabilized ZrO2 which contains Y2O3, when ZrO2:Y2O3=(100-X):X (mol %), the compositional ratios ZrO2 and Y2O3 in the stabilized ZrO2, holds, the X satisfies 2≦X≦10.
摘要翻译：下一代光记录介质具有包括半透明信息层的两个或多个信息层。半透明信息层具有记录膜和界面层，与光入射表面侧的记录膜相邻。该记录膜由具有Sb x Si x Y y z z z元素和元素比的相变材料制成。 Y满足5 <= y <= 15，z满足5 <= z <= 15。当进一步添加具有a的元素比率的In并且x + y + z + a = 100成立时，满足4 <= a <= 15。界面层包含ZrO 2→2→2→3→3→3膜，其膜厚在2nm至10nm的范围内。当ZrO 2：Cr 2 O 3 -C（D）（摩尔％）时，组成比ZrO 2 < 和ZrO 2 -r 2 O 3 O 3膜中的Cr 2 O 3 O 3 满足20 <= C <= 90，D满足10 <= D <= 80，C和D满足C + D = 100。当ZrO 2 2时，ZrO 2 2是稳定的含有Y 2 O 3 O 3的ZrO 2 （100-X）：X（摩尔％），组成比ZrO 2和Y _{2 3 <3>，X满足2 <= X <= 10。}

7. 发明授权

US06965556B1 Optical information medium having high resolution beyond a diffraction limit and reading method 有权
$Optical information medium having high resolution beyond a diffraction limit and reading method$
标题翻译：光学信息介质具有超过衍射极限的分辨率和读取方法
公开(公告)号：US06965556B1
公开(公告)日：2005-11-15
申请号：US09609898
申请日：2000-07-03
申请人： Takashi Kikukawa , Hajime Utsunomiya , Hiroshi Shingai , Tatsuya Kato
发明人： Takashi Kikukawa , Hajime Utsunomiya , Hiroshi Shingai , Tatsuya Kato
IPC分类号： G11B7/005 , G11B7/24
CPC分类号： G11B7/24085 , B82Y10/00 , G11B7/0052 , G11B7/24
摘要： In an optical information medium having an information bearing surface having projections and depressions and/or capable of forming recorded marks, a functional layer is added. The information borne on the information bearing surface can be read by using reading light of a wavelength longer than 4NA·PL wherein PL is the minimum size of the projections and depressions or the recorded marks and NA is the numerical aperture of a reading optical system, setting the power of the reading light within such a range that the functional layer does not change its complex index of refraction, and irradiating the reading light to the information bearing surface constructed by the functional layer or to the information bearing surface through the functional layer or to the functional layer through the information bearing surface. The medium enables reading at a high resolution beyond the diffraction limit.
摘要翻译：在具有具有凹凸和/或能够形成记录标记的信息承载面的光信息介质中，添加功能层。可以通过使用长于4NA的波长的读取光读取承载在信息承载表面上的信息。其中P L L是最小尺寸的凹凸或记录标记，NA是读取光学系统的数值孔径，将读取光的功率设定在功能层不改变其复杂折射率的范围内，并将读取光照射到信息承载面通过功能层或信息承载表面通过功能层或通过信息承载表面到功能层构成。该介质能够以超过衍射极限的高分辨率进行读取。

8. 发明授权

US6115351A Phase change optical recording medium and its writing with high reliability after long period use and/or high environmental temperature storage 有权
标题翻译：相变光记录介质及其长期使用和/或高环境温度储存后的高可靠性写入
公开(公告)号：US6115351A
公开(公告)日：2000-09-05
申请号：US221125
申请日：1998-12-28
申请人： Hajime Utsunomiya , Tatsuya Kato , Hiroyasu Inoue
发明人： Hajime Utsunomiya , Tatsuya Kato , Hiroyasu Inoue
IPC分类号： G11B7/00 , G11B7/0045 , G11B7/0055 , G11B7/006 , G11B7/24 , G11B7/254 , G11B7/257 , G11B7/26
CPC分类号： G11B7/2578 , G11B7/006 , G11B7/24 , G11B7/26 , G11B2007/24308 , G11B2007/2431 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , G11B2007/25706 , G11B2007/2571 , G11B2007/25713 , G11B2007/25715 , G11B2007/25716 , G11B2007/25718 , G11B7/2531 , G11B7/2533 , G11B7/2534 , G11B7/2542 , G11B7/256 , G11B7/2585 , G11B7/2595
摘要： Prevented is the reliability loss in phase change optical recording media during high-temperature storage, and also prevented is the phenomenon of self-erase by which a part of record marks having been formed in the media are erased due to the lateral heat diffusion into the recording layer while recording laser beams are irradiated to the media. The optical recording medium disclosed has a recording layer of a phase change type and is applied to driving units for overwriting it at a linear velocity of V.sub.0. The medium is so designed as to satisfy the requirement of 1
摘要翻译：防止在高温存储期间相变光学记录介质中的可靠性损失，并且还防止了由于横向热扩散到介质中而在介质中形成的记录标记的一部分被擦除的自擦除现象记录激光束的记录层被照射到介质上。所公开的光记录介质具有相变型的记录层，并被施加到用于以V 0的线速度重写的驱动单元。该介质被设计成满足1

9. 发明授权

US6096400A Optical recording medium 失效
标题翻译：光记录介质
公开(公告)号：US6096400A
公开(公告)日：2000-08-01
申请号：US220344
申请日：1998-12-24
申请人： Hiroyasu Inoue , Tatsuya Kato , Hajime Utsunomiya
发明人： Hiroyasu Inoue , Tatsuya Kato , Hajime Utsunomiya
IPC分类号： G11B7/0045 , G11B7/007 , G11B7/24 , B32B3/02
CPC分类号： G11B7/24079 , G11B7/00718 , G11B7/24 , G11B7/00454 , Y10T428/21
摘要： In a phase change-type optical recording medium of absorption coefficient control structure used by land/groove recording system, difference in reproduction characteristics between the land and the groove is minimized while ensuring sufficient output of the tracking signal. In the optical recording medium of the present invention, light absorption coefficient at the wavelength of said recording/reproducing beam is such that: Ac/Aa.gtoreq.0.8 when light absorption coefficient in crystalline region is Ac and light absorption coefficient in amorphous region is Aa; relation between groove width W.sub.G and land width W.sub.L is such that: x=2W.sub.G /(W.sub.L +W.sub.G).gtoreq.1.03; and the relation: .lambda.max.sup.i
摘要翻译：在由槽脊/沟槽记录系统使用的吸收系数控制结构的相变型光学记录介质中，在确保足够的跟踪信号的输出的同时，使焊盘和凹槽之间的再现特性差异最小化。在本发明的光记录介质中，所述记录/再现光束的波长处的光吸收系数使得当结晶区域的光吸收系数为Ac时的Ac / Aa> / = 0.8，非晶区域的光吸收系数为阿槽宽度WG和焊盘宽度WL之间的关系使得：x = 2WG /（WL + WG）> / = 1.03; 当反射光谱中的局部最小值的波长为λ迷你时，满足λmaxi <λu

10. 发明授权

US07960006B2 Optical recording medium and recording film material 有权
标题翻译：光记录介质和记录膜材料
公开(公告)号：US07960006B2
公开(公告)日：2011-06-14
申请号：US12010163
申请日：2008-01-22
申请人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
发明人： Hiroshi Shingai , Tatsuya Kato , Masanori Kosuda , Hiroshi Takasaki , Hideki Hirata , Hajime Utsunomiya
IPC分类号： B32B3/02
CPC分类号： G11B7/24038 , G11B7/2433 , G11B7/2578 , G11B7/259 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , G11B2007/25706 , G11B2007/25715 , Y10T428/21
摘要： A next-generation optical recording medium has two or more information layers which include a translucent information layer. The translucent information layer has a recording film and an interface layer, provided adjacent to the recording film on the side of the light incident surface. The recording film is made of a phase change material having SbxTeyGez elements and elemental ratios. Y satisfies 5≦y≦15 and z satisfies 5≦z≦15. When In having an elemental ratio of a is further added and x+y+z+a=100 holds, a satisfies 4≦a≦15. The interface layer comprises of ZrO2—Cr2O3 film thickness of which is in a range of from 2 nm to 10 nm. When ZrO2:Cr2O3═C:D (mol %), the compositional ratios ZrO2 and Cr2O3 in the ZrO2—Cr2O3 film, holds, the C satisfies 20≦C≦90, and the D satisfies 10≦D≦80, and the C and the D satisfy C+D=100. The ZrO2 is stabilized ZrO2 which contains Y2O3, when ZrO2:Y2O3=(100−X):X (mol %), the compositional ratios ZrO2 and Y2O3 in the stabilized ZrO2, holds, the X satisfies 2≦X≦10.
摘要翻译：下一代光记录介质具有包括半透明信息层的两个或多个信息层。半透明信息层具有记录膜和界面层，与光入射表面侧的记录膜相邻。记录膜由具有SbxTeeyGez元素和元素比的相变材料制成。 Y满足5＆nlE; y＆nlE; 15和z满足5＆nlE; z＆nlE; 15。当进一步添加具有a的元素比率的In并且x + y + z + a = 100成立时，a满足4＆nlE; a＆nlE; 15。界面层由ZrO 2 -Cr 2 O 3膜厚度在2nm至10nm的范围内。当ZrO 2：Cr 2 O 3 = C：D（摩尔％）时，ZrO 2 -Cr 2 O 3膜中的ZrO 2和Cr 2 O 3的组成比保持为C，满足20＆nlE; C＆nlE; 90，D满足10＆nlE; D＆nlE; 80，C D满足C + D = 100。当ZrO 2：Y 2 O 3 =（100-X）：X（摩尔％）时，ZrO 2为稳定的含有Y 2 O 3的ZrO 2，稳定的ZrO 2中的ZrO 2和Y 2 O 3的组成比例成立，X满足2＆nlE; X＆nlE; 10。

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