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1. 发明授权

US07381948B2 Mass spectroscope and method of calibrating the same 有权
标题翻译：质谱仪及其校准方法
公开(公告)号：US07381948B2
公开(公告)日：2008-06-03
申请号：US11508323
申请日：2006-08-23
申请人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
发明人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
IPC分类号： B01D59/44 , H01J49/00 , G01D18/00 , G12B13/00
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0027
摘要： An ion resonance condition is corrected accurately in an ion trapping device. Measurements are repeated by alternately applying and not applying a resonance frequency voltage while spectral data is obtained continuously. Data obtained in the absence of the resonance frequency voltage is used as reference data to correct the set data of a resonance condition. As a result, calibration can be made while taking into consideration the variations in the amount of ions that are introduced into the ion trap.
摘要翻译：在离子捕获装置中精确校正离子共振条件。通过在连续获得光谱数据的同时交替地施加并不施加共振频率电压来重复测量。在没有谐振频率电压的情况下获得的数据被用作参考数据，以校正谐振条件的设定数据。结果，可以考虑到引入到离子阱中的离子量的变化来进行校准。

2. 发明申请

US20080054173A1 Ion trap mass spectrometry method 有权
标题翻译：离子阱质谱法
公开(公告)号：US20080054173A1
公开(公告)日：2008-03-06
申请号：US11889232
申请日：2007-08-10
申请人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
IPC分类号： H01J49/04
CPC分类号： H01J49/4265 , H01J49/0081
摘要： According to an aspect of the present invention, there are provided an ion trap mass spectrometry method and an ion trap mass spectrometry device using a mass spectrometer, the mass spectrometer including: an ion source part for ionizing a sample; an ion trap part for trapping ions generated in the ion source; a main high frequency power source for applying a main high frequency voltage to the ion trap part, and an auxiliary high frequency power source for applying an auxiliary high frequency voltage thereto; and a detector for detecting the ions ejected from the ion trap. The ion trap mass spectrometry method and the ion trap mass spectrometry device includes the steps of: accumulating desired ions into the ion trap part by ejecting undesired ions while accumulating ions into the ion trap part; and ejecting undesired ions that remain in the ion trap part and leaving the desired ions in the ion trap part are repeated alternately.
摘要翻译：根据本发明的一个方面，提供了一种离子阱质谱法和使用质谱仪的离子阱质谱仪，该质谱仪包括：用于电离样品的离子源部分; 用于捕获在离子源中产生的离子的离子阱部分; 用于向离子阱部分施加主高频电压的主高频电源和用于向其提供辅助高频电压的辅助高频电源; 以及用于检测从离子阱排出的离子的检测器。离子阱质谱方法和离子阱质谱装置包括以下步骤：通过在将离子聚集到离子阱部分的同时喷出不期望的离子将期望的离子累积到离子阱部分中; 并且交替地重复留在离子阱部分中并留下离子阱部分中的期望离子的不需要的离子。

3. 发明授权

US07115862B2 Mass spectroscope and method of calibrating the same 有权
标题翻译：质谱仪及其校准方法
公开(公告)号：US07115862B2
公开(公告)日：2006-10-03
申请号：US11018375
申请日：2004-12-22
申请人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
发明人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
IPC分类号： B01D59/44 , H01J49/00 , G01D18/00 , G12B13/00
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0027
摘要： An ion resonance condition is corrected accurately in an ion trapping device. Measurements are repeated by alternately applying and not applying a resonance frequency voltage while spectral data is obtained continuously. Data obtained in the absence of the resonance frequency voltage is used as reference data to correct the set data of a resonance condition. As a result, calibration can be made while taking into consideration the variations in the amount of ions that are introduced into the ion trap.
摘要翻译：在离子捕获装置中精确校正离子共振条件。通过在连续获得光谱数据的同时交替地施加并不施加共振频率电压来重复测量。在没有谐振频率电压的情况下获得的数据被用作参考数据，以校正谐振条件的设定数据。结果，可以考虑到引入到离子阱中的离子量的变化来进行校准。

4. 发明授权

US07989764B2 Ion trap mass spectrometry method 有权
标题翻译：离子阱质谱法
公开(公告)号：US07989764B2
公开(公告)日：2011-08-02
申请号：US11889232
申请日：2007-08-10
申请人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
IPC分类号： H01J49/42 , H01J49/40
CPC分类号： H01J49/4265 , H01J49/0081
摘要： According to an aspect of the present invention, there are provided an ion trap mass spectrometry method and an ion trap mass spectrometry device using a mass spectrometer, the mass spectrometer including: an ion source part for ionizing a sample; an ion trap part for trapping ions generated in the ion source; a main high frequency power source for applying a main high frequency voltage to the ion trap part, and an auxiliary high frequency power source for applying an auxiliary high frequency voltage thereto; and a detector for detecting the ions ejected from the ion trap. The ion trap mass spectrometry method and the ion trap mass spectrometry device includes the steps of: accumulating desired ions into the ion trap part by ejecting undesired ions while accumulating ions into the ion trap part; and ejecting undesired ions that remain in the ion trap part and leaving the desired ions in the ion trap part are repeated alternately.
摘要翻译：根据本发明的一个方面，提供了一种离子阱质谱法和使用质谱仪的离子阱质谱仪，该质谱仪包括：用于电离样品的离子源部分; 用于捕获在离子源中产生的离子的离子阱部分; 用于向离子阱部分施加主高频电压的主高频电源和用于向其提供辅助高频电压的辅助高频电源; 以及用于检测从离子阱排出的离子的检测器。离子阱质谱方法和离子阱质谱装置包括以下步骤：通过在将离子聚集到离子阱部分的同时喷出不期望的离子将期望的离子累积到离子阱部分中; 并且交替地重复留在离子阱部分中并留下离子阱部分中的期望离子的不需要的离子。

5. 发明申请

US20090179148A1 MASS SPECTROMETER AND MASS SPECTROMETRY METHOD 审中-公开
标题翻译：质谱仪和质谱方法
公开(公告)号：US20090179148A1
公开(公告)日：2009-07-16
申请号：US12350328
申请日：2009-01-08
申请人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
IPC分类号： B01D59/44 , H01J49/00
CPC分类号： H01J49/004 , H01J49/063
摘要： Performing an MS3 with a tandem mass spectrometer causes problems of increase in size of the device and of increase in cost. Likewise, a plural number of times MS/MS analyses are even more difficult. An electrode to create a harmonic potential is disposed in a collision cell, and fragment ions produced by the first-time collision induced dissociation are accumulated in the harmonic potential. Target ions of the subsequent stage are let out, by means of an axial resonance excitation, selectively from the accumulated ions. The ions are excited in the axial direction to have a potential exceeding the harmonic potential. Thereby, the second-time collision induced dissociation is performed by means of a potential difference provided at the subsequent stage. In addition, an operation to return the ions back to the harmonic potential enables a plural number of times MS/MS analyses to be performed.
摘要翻译：使用串联质谱仪进行MS3会导致设备尺寸增加和成本增加的问题。同样，多次MS / MS分析更加困难。用于产生谐波电位的电极设置在碰撞室中，并且由第一次碰撞引起的解离产生的碎片离子累积在谐波电位中。选择性地从累积的离子中排出后续阶段的目标离子，借助于轴向共振激发。离子在轴向上被激发以具有超过谐波电位的电位。因此，通过在后续阶段提供的电位差来执行第二次碰撞诱导解离。此外，使离子返回到谐波电位的操作能够进行多次MS / MS分析。

6. 发明申请

US20070069123A1 Mass spectroscope and method of calibrating the same 有权
标题翻译：质谱仪及其校准方法
公开(公告)号：US20070069123A1
公开(公告)日：2007-03-29
申请号：US11508323
申请日：2006-08-23
申请人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
发明人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
IPC分类号： H01J49/00
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0027
摘要： An ion resonance condition is corrected accurately in an ion trapping device. Measurements are repeated by alternately applying and not applying a resonance frequency voltage while spectral data is obtained continuously. Data obtained in the absence of the resonance frequency voltage is used as reference data to correct the set data of a resonance condition. As a result, calibration can be made while taking into consideration the variations in the amount of ions that are introduced into the ion trap.
摘要翻译：在离子捕获装置中精确校正离子共振条件。通过在连续获得光谱数据的同时交替地施加并不施加共振频率电压来重复测量。在没有谐振频率电压的情况下获得的数据被用作参考数据，以校正谐振条件的设定数据。结果，可以考虑到引入到离子阱中的离子量的变化来进行校准。

7. 发明申请

US20050139763A1 Mass spectroscope and method of calibrating the same 有权
标题翻译：质谱仪及其校准方法
公开(公告)号：US20050139763A1
公开(公告)日：2005-06-30
申请号：US11018375
申请日：2004-12-22
申请人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
发明人： Shinji Nagai , Hiroyuki Yasuda , Tetsuya Nishida
IPC分类号： G01N27/62 , B01D59/44 , H01J49/40 , H01J49/42
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0027
摘要： An ion resonance condition is corrected accurately in an ion trapping device. Measurements are repeated by alternately applying and not applying a resonance frequency voltage while spectral data is obtained continuously. Data obtained in the absence of the resonance frequency voltage is used as reference data to correct the set data of a resonance condition. As a result, calibration can be made while taking into consideration the variations in the amount of ions that are introduced into the ion trap.
摘要翻译：在离子捕获装置中精确校正离子共振条件。通过在连续获得光谱数据的同时交替地施加并不施加共振频率电压来重复测量。在没有谐振频率电压的情况下获得的数据被用作参考数据，以校正谐振条件的设定数据。结果，可以考虑到引入到离子阱中的离子量的变化来进行校准。

8. 发明申请

US20110248157A1 MASS SPECTROMETER AND MASS SPECTROMETRY METHOD 审中-公开
标题翻译：质谱仪和质谱方法
公开(公告)号：US20110248157A1
公开(公告)日：2011-10-13
申请号：US13123901
申请日：2009-10-13
申请人： Masuyuki Sugiyama , Yuichiro Hashimoto , Hideki Hasegawa , Masuyoshi Yamada , Hiroyuki Yasuda , Shinji Nagai , Shintaro Kubo , Takefumi Yokokura
发明人： Masuyuki Sugiyama , Yuichiro Hashimoto , Hideki Hasegawa , Masuyoshi Yamada , Hiroyuki Yasuda , Shinji Nagai , Shintaro Kubo , Takefumi Yokokura
IPC分类号： H01J49/42
CPC分类号： H01J49/063 , H01J49/4215
摘要： Objects of the present invention is to provide a quadrupole mass filter that can be fabricated at low cost and has a high transmission efficiency even under a high pressure (0.5 mTorr or more), and to provide a mass spectrometer or mass spectrometry method that reduces crosstalk in a wide mass range. Now, in a mass spectrometer, an ion separating unit is configured to include quadrupole rod electrodes that form a quadrupole radio-frequency electric field, electrodes that form a quadrupole electrostatic field, and a power supply that allows the voltage of the electrodes to form a quadrupole electrostatic field to change. In a collision cell configured to perform collision induced dissociation, harmonic potentials in a plurality of stages are produced to resonance excite ions in the axial direction, so that the ions obtain kinetic energy to move in the direction of the detector. This energy allows a time period to shorten for which ions stay in the collision cell.
摘要翻译：本发明的目的是提供一种即使在高压（0.5mTorr以上）下也能低成本制造且具有高透射率的四极质量过滤器，并提供降低串扰的质谱仪或质谱法在广泛的质量范围。现在，在质谱仪中，离子分离单元被构造为包括形成四极射频电场的四极杆电极，形成四极静电场的电极和允许电极的电压形成的电源四极静电场改变。在被配置为执行碰撞诱导解离的碰撞单元中，产生多个级中的谐波电位以使轴向上的激发离子共振，使得离子获得沿检测器的方向移动的动能。该能量允许缩短时间段，离子停留在碰撞池中。

9. 发明授权

US08471227B2 Extreme ultraviolet light source apparatus 有权
公开(公告)号：US08471227B2
公开(公告)日：2013-06-25
申请号：US13293914
申请日：2011-11-10
申请人： Kouji Kakizaki , Shinji Nagai , Tatsuya Yanagida
发明人： Kouji Kakizaki , Shinji Nagai , Tatsuya Yanagida
IPC分类号： G01N21/33 , G21K5/02 , H05H1/00
摘要： An extreme ultraviolet light source apparatus in which a target material is irradiated with a laser beam and turned into plasma and extreme ultraviolet light is emitted from the plasma may include: a chamber in which the extreme ultraviolet light is generated; an electromagnetic field generation unit for generating at least one of an electric field and a magnetic field inside the chamber; and a cleaning unit for charging and separating debris adhered to an optical element inside the chamber.

10. 发明授权

US08242474B2 Extreme ultraviolet light generation apparatus 有权
标题翻译：极紫外光发生装置
公开(公告)号：US08242474B2
公开(公告)日：2012-08-14
申请号：US13032172
申请日：2011-02-22
申请人： Shinji Nagai , Tamotsu Abe , Takanobu Ishihara , Osamu Wakabayashi
发明人： Shinji Nagai , Tamotsu Abe , Takanobu Ishihara , Osamu Wakabayashi
IPC分类号： G01N21/33 , H01J1/50 , G21K5/08
CPC分类号： H05G2/003 , G01J3/10 , G03F7/70033 , H05G2/005 , H05G2/008
摘要： An extreme ultraviolet light generation apparatus used in combination with a laser system, the apparatus may include: a chamber provided with at least one inlet port for introducing a laser beam outputted from the laser system into the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber, where the target material is irradiated with the laser beam; at least one optical element disposed inside the chamber; a magnetic field generation unit for generating a magnetic field around the predetermined region; an ion collection unit disposed in a direction of a line of magnetic force of the magnetic field for collection an ion which is generated when the target material is irradiated with the laser beam and is flowing along the line of magnetic force; and a gas introduction unit for introducing an etching gas into the chamber.
摘要翻译：一种与激光系统组合使用的极紫外光发生装置，该装置可以包括：设置有至少一个入口的腔室，用于将从激光系统输出的激光束引入腔室; 目标供给单元，其设置在所述室中，用于将所述目标材料供给到所述室内的预定区域，所述目标材料用所述激光束照射; 设置在所述室内的至少一个光学元件; 用于产生围绕预定区域的磁场的磁场产生单元; 离子收集单元，设置在所述磁场的磁力线的方向上，用于收集当所述靶材料被所述激光束照射并沿着所述磁力线流动时产生的离子; 以及用于将蚀刻气体引入到室中的气体引入单元。

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