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    • 8. 发明授权
    • Semiconductor device and test method
    • 半导体器件及测试方法
    • US08633571B2
    • 2014-01-21
    • US13482146
    • 2012-05-29
    • Akihiko OkutsuHitoshi SaitoYoshiaki Okano
    • Akihiko OkutsuHitoshi SaitoYoshiaki Okano
    • H01L23/544H01L29/66
    • G01R31/275G01R31/2601G01R31/2884H01L22/32H01L23/522H01L23/564H01L23/585H01L2224/05554H01L2924/0002H01L2924/00
    • A semiconductor device includes a semiconductor substrate including an element region, an inner sealing and an outer sealing which are formed on the element region and have a first opening part and a second opening part, respectively, a multilayer interconnection structure which is formed on the substrate and stacks multiple inter-layer insulation films each including a wiring layer, a moisture resistant film formed between a first inter-layer insulation film and a second inter-layer insulation film which are included in the multilayer interconnection structure, a first portion which extended from a first side of the moisture resistant film and passes the first opening part, a second portion which extended from a second side of the moisture resistant film and passes through the second opening part, and a wiring pattern including a via plug which penetrates the moisture resistant film and connects the first portion and the second portion.
    • 半导体器件包括:半导体衬底,包括元件区域,内部密封件和外部密封件,所述元件区域,内部密封件和外部密封件分别形成在所述元件区域上并具有第一开口部分和第二开口部分,所述多层互连结构分别形成在所述衬底上 并且堆叠多个层间绝缘膜,每个层间绝缘膜包括布线层,形成在包括在多层互连结构中的第一层间绝缘膜和第二层间绝缘膜之间的防潮膜,第一部分从 所述防潮膜的第一面通过所述第一开口部,所述第二部分从所述防湿膜的第二侧延伸并穿过所述第二开口部;以及布线图案,其包括穿过所述防潮膜的通孔塞 并且连接第一部分和第二部分。
    • 9. 发明申请
    • MAGNETIC FIELD OBSERVATION DEVICE AND MAGNETIC FIELD OBSERVATION METHOD
    • 磁场观测装置和磁场观测方法
    • US20130174302A1
    • 2013-07-04
    • US13819486
    • 2011-09-05
    • Hitoshi SaitoSatoru Yoshimura
    • Hitoshi SaitoSatoru Yoshimura
    • G01Q60/50
    • G01Q60/38G01Q60/50G01Q60/54G01R33/022G01R33/0385
    • A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface. The device including: a probe; excitation mechanism that excites it; scanning mechanism that relatively moves the probe and specimen; alternating magnetic field generation mechanism to make the probe periodically undergo magnetization reversal and apply thereto an alternating magnetic field having magnitude not making the specimen undergo magnetization reversal; and modulation measurement mechanism for measuring degree of periodical frequency modulation of the probe's oscillation caused by its apparent spring constant periodically changed by force of periodically changed intensity and applied to the probe by alternating force through magnetic interaction between magnetizations of the probe and specimen, by frequency demodulation or by measuring intensity of one sideband wave spectrum among spectrums generated by the frequency modulation. The method performed using the device.
    • 一种用于以高分辨率测量磁性材料试样表面附近的磁力并检测试样表面磁极极性的磁场观测装置和方法。 该装置包括:探头; 激发机制; 相对移动探头和试样的扫描机构; 交变磁场产生机构使探针周期性地进行磁化反转,并向其施加具有不使样本经历磁化反转的量值的交变磁场; 以及用于测量由其由周期性变化的强度周期性地改变的表观弹簧常数引起的探头振荡周期性频率调制程度的调制测量机构,并且通过以探针和样品的磁化之间的磁相互作用的交替力通过频率施加到探针 通过频率调制产生的频谱中的一个边带波谱的强度进行解调或测量。 使用该设备执行的方法。