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    • 1. 发明申请
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US20060134865A1
    • 2006-06-22
    • US11303583
    • 2005-12-14
    • Hiroyuki InuzukaTsukasa DoiKazumasa Mitsumune
    • Hiroyuki InuzukaTsukasa DoiKazumasa Mitsumune
    • H01L21/336H01L21/44
    • H01L21/76897H01L27/115H01L27/11521
    • According to the present invention, a method of manufacturing a semiconductor device which comprises a matrix of memory cells of the floating gate type is provided in which the silicon nitride layer is deposited as an etching stop layer on a control gate electrode for bottom borderless contact process with the threshold voltage of transistor arrangements being controlled not to change so that the productivity can remain not declined. In particular, the silicon nitride layer (115) is deposited as an etching stop layer on the control gate electrode (105) for bottom borderless contact process so that the concentration of hydrogen (H2) therein stays in a range from 1.5×1021 to 2.6×1021 atoms/cm3. Also, the silicon nitride layer (115) is deposited at a temperature of not higher than 700° C. by a low pressure CVD technique.
    • 根据本发明,提供一种制造半导体器件的方法,该半导体器件包括浮置型存储单元的矩阵,其中氮化硅层作为蚀刻停止层沉积在用于底部无边界接触工艺的控制栅极上 晶体管布置的阈值电压被控制为不改变,使得生产率可以保持不下降。 特别地,氮化硅层(115)作为蚀刻停止层沉积在用于底部无边界接触工艺的控制栅电极(105)上,使得其中的氢(H 2 H 2)的浓度保持在 从1.5×10 21至2.6×10 21原子/ cm 3的范围。 此外,氮化硅层(115)通过低压CVD技术在不高于700℃的温度下沉积。
    • 2. 发明授权
    • Synchronizing apparatus for spread spectrum communications
    • 用于扩频通信的同步装置
    • US5995571A
    • 1999-11-30
    • US832631
    • 1997-04-04
    • Hiroyuki Inuzuka
    • Hiroyuki Inuzuka
    • H04B1/707H04B1/7075H04L7/00H04L7/06
    • H04B1/70754H04B1/70718
    • An input data obtained by differential-decoding a signal transmitted from a transmitting equipment is input to a DMF. The DMF obtains a correlation value, and outputs the correlation value and data value to a maximum value detection unit. The maximum value detection unit extracts the maximum value from the correlation values output at the sampling timing, and outputs the position of the maximum correlation value (synchronous point signal) and the data value corresponding to the maximum correlation value. The synchronous point comparison unit monitors a synchronous point signal, detects whether or not a synchronous point deviates, and resets a counter based on the deviation of the synchronous point. A counter reset determination unit also monitors the synchronous point signal, and resets the counter so that the apparent position of the synchronous point can be around the center of the window when the counter value indicating the synchronous point is not in a predetermined range.
    • 将从发送设备发送的信号进行差分解码而获得的输入数据输入到DMF。 DMF获得相关值,并将相关值和数据值输出到最大值检测单元。 最大值检测单元从采样定时输出的相关值中提取最大值,并输出最大相关值(同步点信号)的位置和与最大相关值对应的数据值。 同步点比较单元监视同步点信号,检测同步点是否偏离,并基于同步点的偏差复位计数器。 计数器复位确定单元还监视同步点信号,并且重置计数器,使得当指示同步点的计数器值不在预定范围内时,同步点的视在位置可以在窗口的中心附近。
    • 3. 发明授权
    • Spread spectrum communications system and receiver
    • 扩频通信系统和接收机
    • US6154482A
    • 2000-11-28
    • US807380
    • 1997-02-27
    • Hiroyuki Inuzuka
    • Hiroyuki Inuzuka
    • H04B1/707H04B1/709H04B15/00H04K1/00H04L27/30
    • H04B1/707
    • When a multiplier receives data transmitted from a transmitting equipment in a spread spectrum communications system, it multiplies the received data by the periodic wave output from a crystal oscillator. The output data from the multiplier is filtered by a low-pass filter, and then binarized by a limiter. The multiplier and a delay circuit differential-decodes the binarized data. A correlation circuit obtains correlation between the decoded data and the PN code generated by the PN code generation circuit, and outputs the data as transfer data when the correlation is obtained. In another aspect, an input signal is divided, and then one is multiplied by an I-phase wave. Similarly, another is multiplied by a Q-phase wave. Each signal is individually processed and input to a correlation value/data value determination circuit. The correlation value/data value determination circuit compares an I-phase correlation value with a Q-phase correlation value, and obtains and outputs a data value of one of the phases whichever indicates a larger value.
    • 当乘法器接收从扩频通信系统中的发送设备发送的数据时,将接收的数据乘以晶体振荡器的周期波输出。 来自乘法器的输出数据由低通滤波器滤波,然后由限幅器进行二值化。 乘法器和延迟电路差分解码二进制数据。 相关电路获得解码数据与由PN码产生电路产生的PN码之间的相关性,并且在获得相关性时将该数据作为传输数据输出。 在另一方面,输入信号被分割,然后乘以I相波。 类似地,另一个乘以Q相波。 每个信号被单独处理并输入到相关值/数据值确定电路。 相关值/数据值确定电路将I相位相关值与Q相位相关值进行比较,并且获得并输出其中一个相位的数据值,以指示较大值。