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    • 3. 发明授权
    • Austenitic heat resistant alloy
    • 奥氏体耐热合金
    • US08313591B2
    • 2012-11-20
    • US12647028
    • 2009-12-24
    • Hiroyuki HirataAtsuro IsedaHirokazu OkadaHiroyuki SembaKaori KawanoOsamu Miyahara
    • Hiroyuki HirataAtsuro IsedaHirokazu OkadaHiroyuki SembaKaori KawanoOsamu Miyahara
    • C22C30/00C22C19/05
    • C22C38/44C21D6/001C21D6/002C21D6/004C22C38/001C22C38/002C22C38/008C22C38/02C22C38/04C22C38/06C22C38/50C22C38/52C22C38/54F22B37/04
    • An austenitic heat resistant alloy, which contains, by mass percent, C≦0.15%, Si≦2%, Mn≦3%, Ni: 40 to 80%, Cr: 15 to 40%, W and Mo: 1 to 15% in total content, Ti≦3%, Al≦3%, N≦0.03%, O≦0.03%, with the balance being Fe and impurities, and among the impurities P≦0.04%, S≦0.03%, Sn≦0.1%, As≦0.01%, Zn≦0.01%, Pb≦0.01% and Sb≦0.01%, and satisfies the conditions [P1=S+{(P+Sn)/2}+{(As+Zn+Pb+Sb)/5}≦0.050], [0.2≦P2=Ti+2Al≦7.5−10×P1], [P2≦9.0−100×O] and [N≦0.002×P2+0.019] can prevent both the liquation crack in the HAZ and the brittle crack in the HAZ and also can prevent defects due to welding fabricability, which occur during welding fabrication, and moreover has excellent creep strength at high temperatures. Therefore, the alloy can be used suitably as a material for constructing high temperature machines and equipment, such as power generating boilers, plants for the chemical industry and so on. The ally may contain a specific amount or amounts of one or more elements selected from Co, B, Ta, Hf, Nb, Zr, Ca, Mg, Y, La, Ce and Nd.
    • 一种奥氏体耐热合金,以质量%计含有0.15%,Si&NlE; 2%,Mn&NlE; 3%,Ni:40〜80%,Cr:15〜40%,W和Mo:1〜15% 在总含量中,Ti&NlE; 3%,Al&NlE; 3%,N& NlE; 0.03%,O&NlE; 0.03%,余量为Fe和杂质,杂质P< L; 0.04%,S&NlE; 0.03%,Sn& ,As / nlE; 0.01%,Zn和nlE; 0.01%,Pb和nlE; 0.01%和Sb≦̸ 0.01%,满足条件[P1 = S + {(P + Sn)/ 2} + {(As + Zn + Pb + Sb)/ 5}≦̸ 0.050],[0.2≦̸ P2 = Ti + 2Al≦̸ 7.5-10×P1],[P2≦̸ 9.0-100×O]和[N< lE; 0.002×P2 + 0.019]可以防止液化裂纹 HAZ和HAZ中的脆性裂纹,并且还可以防止在焊接制造期间发生的焊接可制造性的缺陷,并且还在高温下具有优异的蠕变强度。 因此,该合金可以适当地用作构成发电锅炉,化工工业用等的高温机器和设备的材料。 盟友可以含有一定量或数量的选自Co,B,Ta,Hf,Nb,Zr,Ca,Mg,Y,La,Ce和Nd中的一种或多种元素。
    • 4. 发明申请
    • RINSING METHOD AND DEVELOPING METHOD
    • 冲洗方法与开发方法
    • US20110229120A1
    • 2011-09-22
    • US13117483
    • 2011-05-27
    • Yasuhiro TAKAKIOsamu MiyaharaKeiichi TanakaShinya WakamizuTakashi Terada
    • Yasuhiro TAKAKIOsamu MiyaharaKeiichi TanakaShinya WakamizuTakashi Terada
    • G03D5/00
    • H01L21/67051G03F7/3021
    • A rinsing method for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon, includes a step (STEP 5) of throwing off a developing solution from the substrate after development; a step (STEP 6) of supplying a water-based cleaning liquid onto the substrate; a step (STEP 7) of supplying a surfactant-containing rinsing liquid onto the substrate to replace liquid remaining on the substrate with the surfactant-containing rinsing liquid; and a step (STEP 8) of rotating the substrate to expand and throw off the surfactant-containing rinsing liquid on the substrate. STEP 8 is arranged to supply the surfactant-containing rinsing liquid for a supply time of 5 seconds or less. STEP 9 is arranged to include a first period with a lower rotation number and a second period with a higher rotation number, and to set the rotation number of the substrate in the first period to be more than 300 rpm and less than 1,000 rpm.
    • 在对其上设置的曝光图案进行显影处理之后,在基板上进行漂洗处理的漂洗方法包括在显影后从显影基板抛出显影液的工序(步骤5) 向基板供给水性清洗液的工序(工序6) 将含表面活性剂的冲洗液供给到基板上以用含表面活性剂的冲洗液取代残留在基板上的液体的步骤(STEP7) 以及使基板旋转以使基板上含表面活性剂的冲洗液体膨胀和脱落的工序(步骤8)。 步骤8被布置成供给含有表面活性剂的冲洗液,供给时间为5秒以下。 步骤9被布置成包括具有较低转数的第一周期和具有较高转数的第二周期,并且将第一周期中的基板的转数设定为大于300rpm且小于1,000rpm。
    • 5. 发明申请
    • DEVELOPING METHOD AND DEVELOPING APPARATUS
    • 发展方法和发展手段
    • US20090079948A1
    • 2009-03-26
    • US12273165
    • 2008-11-18
    • Junichi KITANOOsamu MiyaharaShinya Wakamizu
    • Junichi KITANOOsamu MiyaharaShinya Wakamizu
    • G03B27/52
    • G03F7/40
    • A developing method is used for subjecting a light-exposed resist film disposed on a wafer W to a developing process by a developing solution and a rinsing process by a rinsing liquid. In a state where the resist film on the wafer W is wet with the developing solution or rinsing liquid before a drying process is performed on the wafer W, a chemical liquid (curing chemical liquid), which contains a resist curing aid contributory to curing of a resist film remaining on the wafer W, is supplied onto a surface of the wafer W. Then, ultraviolet rays are radiated onto a surface of the wafer to cure a resist film remaining on the wafer W by a synergistic effect of the resist curing aid and the ultraviolet rays thus radiated, so as to prevent pattern fall.
    • 使用显影方法对设置在晶片W上的曝光抗蚀剂膜进行显影液的显影处理和通过漂洗液的漂洗处理。 在对晶片W进行干燥处理之前,晶片W上的抗蚀剂膜与显影液或漂洗液体湿润的状态下,含有抗蚀剂固化助剂的化学液(固化化学液) 保留在晶片W上的抗蚀剂膜被提供到晶片W的表面上。然后,通过抗蚀剂固化助剂的协同效应将紫外线辐射到晶片的表面上以固化残留在晶片W上的抗蚀剂膜 并且因此辐射紫外线,以防止图案下降。
    • 6. 发明申请
    • Rinse Treatment Method and Development Process Method
    • 冲洗处理方法和开发过程方法
    • US20080274433A1
    • 2008-11-06
    • US11578055
    • 2005-03-02
    • Yasuhiro TakakiOsamu MiyaharaKeiichi TanakaShinya WakamizuTakashi Terada
    • Yasuhiro TakakiOsamu MiyaharaKeiichi TanakaShinya WakamizuTakashi Terada
    • G03F7/20B08B3/10
    • H01L21/67051G03F7/3021
    • A rinsing method for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon, includes a step (STEP 5) of throwing off a developing solution from the substrate after development; a step (STEP 6) of supplying a water-based cleaning liquid onto the substrate; a step (STEP 7) of supplying a surfactant-containing rinsing liquid onto the substrate to replace liquid remaining on the substrate with the surfactant-containing rinsing liquid; and a step (STEP 8) of rotating the substrate to expand and throw off the surfactant-containing rinsing liquid on the substrate. STEP 8 is arranged to supply the surfactant-containing rinsing liquid for a supply time of 5 seconds or less. STEP 9 is arranged to include a first period with a lower rotation number and a second period with a higher rotation number, and to set the rotation number of the substrate in the first period to be more than 300 rpm and less than 1,000 rpm.
    • 在对其上设置的曝光图案进行显影处理之后,在基板上进行漂洗处理的漂洗方法包括在显影后从显影基板抛出显影液的工序(步骤5) 向基板供给水性清洗液的工序(工序6) 将含表面活性剂的冲洗液供给到基板上以用含表面活性剂的冲洗液取代残留在基板上的液体的工序(STEP7) 以及使基板旋转以使基板上含表面活性剂的冲洗液体膨胀和脱落的工序(步骤8)。 步骤8被布置成供给含有表面活性剂的冲洗液,供给时间为5秒以下。 步骤9被布置成包括具有较低转数的第一周期和具有较高转数的第二周期,并且将第一周期中的基板的转数设定为大于300rpm且小于1,000rpm。
    • 10. 发明授权
    • Developing method and developing apparatus
    • 开发方法和开发设备
    • US08054443B2
    • 2011-11-08
    • US12273165
    • 2008-11-18
    • Junichi KitanoOsamu MiyaharaShinya Wakamizu
    • Junichi KitanoOsamu MiyaharaShinya Wakamizu
    • G03B27/32G03B27/54
    • G03F7/40
    • A developing method is used for subjecting a light-exposed resist film disposed on a wafer W to a developing process by a developing solution and a rinsing process by a rinsing liquid. In a state where the resist film on the wafer W is wet with the developing solution or rinsing liquid before a drying process is performed on the wafer W, a chemical liquid (curing chemical liquid), which contains a resist curing aid contributory to curing of a resist film remaining on the wafer W, is supplied onto a surface of the wafer W. Then, ultraviolet rays are radiated onto a surface of the wafer to cure a resist film remaining on the wafer W by a synergistic effect of the resist curing aid and the ultraviolet rays thus radiated, so as to prevent pattern fall.
    • 使用显影方法对设置在晶片W上的曝光抗蚀剂膜进行显影液的显影处理和通过漂洗液的漂洗处理。 在对晶片W进行干燥处理之前,晶片W上的抗蚀剂膜与显影液或漂洗液体湿润的状态下,含有抗蚀剂固化助剂的化学液(固化化学液) 保留在晶片W上的抗蚀剂膜被提供到晶片W的表面上。然后,通过抗蚀剂固化助剂的协同效应将紫外线辐射到晶片的表面上以固化残留在晶片W上的抗蚀剂膜 并且因此辐射紫外线,以防止图案下降。