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1. 发明授权

US5785759A Rotating cup type liquid supply device 失效
标题翻译：旋转杯式液体供给装置
公开(公告)号：US5785759A
公开(公告)日：1998-07-28
申请号：US742581
申请日：1996-10-28
申请人： Hiroyoshi Sago , Shigemi Fujiyama , Futoshi Shimai , Koichi Nagasawa
发明人： Hiroyoshi Sago , Shigemi Fujiyama , Futoshi Shimai , Koichi Nagasawa
IPC分类号： B05C11/02 , B05C11/08 , G03F7/16 , H01L21/027 , H01L21/31 , H01L21/316 , B05B13/02 , B05C13/00
CPC分类号： B05C11/02 , G03F7/162
摘要： A rotating cup type liquid supply device comprises an inner cup 3, a vacuum chuck 5 disposed in the center of a bottom surface of the inner cup 3 for holding thereon a planar material W to be treated, and a tray 7 fixed onto the bottom surface of the inner cup 3 for substantially surrounding the planar material W held by the vacuum chuck 5. The tray is of a substantially rectangular shape in plan view and includes an tapered wall portion 9 turned inwardly along a circumferential wall portion thereof for defining an upper opening 8 of the tray 7. The tray 7 further includes a plurality of drain guiding conduits 10 each extending at a predetermined angle outwardly from an outer peripheral portion thereof. Also, the tray can be provided thereon with the cover having an opening slightly larger than the planar material W.
摘要翻译：旋转杯型液体供给装置包括内杯3，设置在内杯3的底面的中心的真空吸盘5，用于保持待处理的平面材料W，以及固定在底面上的托盘7 用于基本上围绕由真空吸盘5保持的平面材料W。托盘在平面图中具有基本上矩形的形状，并且包括沿着其周壁部分向内转动的锥形壁部分9，用于限定上开口托盘7还包括多个排水引导管道10，每个排水引导管道10以预定的角度从其外围部分向外延伸。此外，托盘可以设置在其上，盖具有比平面材料W稍大的开口。

2. 发明授权

US6015467A Method of removing coating from edge of substrate 失效
标题翻译：从基材边缘去除涂层的方法
公开(公告)号：US6015467A
公开(公告)日：2000-01-18
申请号：US859926
申请日：1997-05-21
申请人： Koichi Nagasawa , Naomi Kawaguchi , Futoshi Shimai , Mitsuru Sato , Kouji Harada , Jun Koshiyama
发明人： Koichi Nagasawa , Naomi Kawaguchi , Futoshi Shimai , Mitsuru Sato , Kouji Harada , Jun Koshiyama
IPC分类号： B08B3/10 , B08B3/12 , C11D7/06 , C11D7/26 , C11D7/32 , C11D7/50 , G03F7/16 , G03F7/42 , H01L21/00 , B08B1/02 , B08B3/08
CPC分类号： C11D7/261 , B08B3/10 , B08B3/12 , C11D7/06 , C11D7/3218 , C11D7/3281 , C11D7/5022 , G03F7/162 , G03F7/425 , H01L21/6708 , C11D7/263
摘要： In a method of removing a coating from an edge of a substrate a solvent reservoir is filled with a solvent to dissolve and remove a photoresist film, the solvent includes one of dipropylene glycol monoalkyl ether, a mixture of this ether and an easily volatile organic solvent (boiling point of 75-130.degree. C., vapor pressure of 5-75 mmHg at 20.degree. C.), and an alkaline aqueous solution, an edge of a substrate W is horizontally inserted in the reservoir, and thereafter, the edge of the substrate W is immersed in the solvent for a period of time, so as to dissolve and remove a coating such as photoresist from the edge of the substrate. The solvent may be filled into the solvent reservoir either before or after the edge of the substrate is inserted therein, and the method may further involve aspirating the solvent from the reservoir after the substrate edge has been inserted therein.
摘要翻译：在从基材的边缘去除涂层的方法中，溶剂储存器填充有溶剂以溶解并除去光致抗蚀剂膜，溶剂包括二丙二醇单烷基醚，该醚和易挥发的有机溶剂的混合物（沸点75-130℃，20℃蒸气压5-75mmHg）和碱性水溶液，将基材W的边缘水平地插入储存器中，然后将边缘将衬底W浸入溶剂中一段时间，从而从衬底的边缘溶解并除去诸如光致抗蚀剂的涂层。在将基材的边缘插入其中之前或之后，可以将溶剂填充到溶剂容器中，并且该方法还可以包括在衬底边缘已插入其中之后从储存器吸出溶剂。

3. 发明授权

US06423139B1 Chemical liquid treatment apparatus 有权
标题翻译：化学液体处理设备
公开(公告)号：US06423139B1
公开(公告)日：2002-07-23
申请号：US09153590
申请日：1998-09-15
申请人： Futoshi Shimai , Koichi Nagasawa , Junji Kutsuzawa
发明人： Futoshi Shimai , Koichi Nagasawa , Junji Kutsuzawa
IPC分类号： B05C502
CPC分类号： H01L21/6715 , B05C5/0254 , B05C11/08 , H01L21/67051
摘要： A liquid chemical treatment apparatus includes a coating apparatus for applying a coating liquid such as resist onto the surface of a substantially planar substrate such as a glass substrate. The coating apparatus includes a nozzle with an elongate injection outlet such as a slit with a width substantially the same as that of the substrate, and a liquid circulating passage connected to the nozzle for supplying the coating liquid to the nozzle. Mechanisms are provided with the circulating passage and the nozzle to remove air from the liquid, and to maintain the circulating liquid at a substantially constant temperature and a substantially constant flow rate. When performing a coating operation with the coating liquid, a flow amount thereof is increased up to 1,500 though 3,000 ml/min, from a condition under which the liquid is prevented from dropping from the slit-like injection outlet while circulating within the circulating passage at a flow rate of 500 through 700 ml/min, for example, by closing a valve or by means of a pump 35 included with the passage. The liquid output from the slit-like injection outlet 4a takes on the form of a curtain to be applied over substantially the entire surface of the substrate, without any drops of the coating liquid remaining within the nozzle after the coating operation.
摘要翻译：液体化学处理装置包括用于将诸如抗蚀剂的涂布液施加到诸如玻璃基板的基本平坦的基板的表面上的涂覆装置。涂布装置包括具有细长的注射口的喷嘴，例如宽度与基底宽度基本相同的狭缝，以及连接到喷嘴的液体循环通道，用于向喷嘴供应涂布液。提供了循环通道和喷嘴以从液体中除去空气并且将循环液体保持在基本上恒定的温度和基本上恒定的流速的机构。当用涂布液进行涂布操作时，其流量可以从循环通道中循环的液体被防止从狭缝状喷射出口滴落的状态增加到1500〜3000ml / min 流量为500至700ml / min，例如通过关闭阀或通过通道附带的泵35。从狭缝状喷射出口输出的液体呈窗帘的形式施加在基体的基本整个表面上，涂布操作之后没有任何滴落的喷涂液体残留在喷嘴内。

4. 发明申请

US20120154736A1 PIXEL ARRAY SUBSTRATE STRUCTURE, METHOD OF MANUFACTURING PIXEL ARRAY SUBSTRATE STRUCTURE, DISPLAY DEVICE, AND ELECTRONIC APPARATUS 有权
标题翻译：像素阵列基板结构，制造像素阵列基板结构的方法，显示装置和电子装置
公开(公告)号：US20120154736A1
公开(公告)日：2012-06-21
申请号：US13305320
申请日：2011-11-28
申请人： Koichi Nagasawa , Masaya Tamaki , Shuji Hayashi , Masaaki Kabe , Yoko Fukunaga
发明人： Koichi Nagasawa , Masaya Tamaki , Shuji Hayashi , Masaaki Kabe , Yoko Fukunaga
IPC分类号： G02F1/1333
CPC分类号： G02F1/134336 , G02F1/13306 , G02F1/133707 , G02F1/13452 , G02F2001/133742 , G02F2001/134345 , H01L27/124 , H01L27/1248
摘要： A pixel array substrate structure includes: first and second planarizing films sequentially stacked on a substrate where a circuit unit is formed; and a relay wire formed between the first and second planarizing films, in which the relay wire electrically connects a first contact portion formed on the first planarizing film and connected to the circuit unit with a second contact portion formed at a position different from the first contact portion when seen from above, on the second planarizing film.
摘要翻译：像素阵列基板结构包括：顺序堆叠在形成电路单元的基板上的第一和第二平坦化膜; 以及形成在所述第一和第二平坦化膜之间的中继线，其中所述继电器线将形成在所述第一平坦化膜上的第一接触部分电连接到所述电路单元，所述第二接触部形成在与所述第一接触部不同的位置处的第二接触部在第二平面化膜上从上方观察。

5. 发明授权

US07838402B2 Method of manufacturing electronic apparatus and electronic apparatus 有权
标题翻译：制造电子设备和电子设备的方法
公开(公告)号：US07838402B2
公开(公告)日：2010-11-23
申请号：US12275448
申请日：2008-11-21
申请人： Koichi Nagasawa , Takashi Yamaguchi , Nobutaka Ozaki , Yasuhiro Kanaya , Hirohisa Takeda , Yasuo Mikami , Yoshifumi Mutoh
发明人： Koichi Nagasawa , Takashi Yamaguchi , Nobutaka Ozaki , Yasuhiro Kanaya , Hirohisa Takeda , Yasuo Mikami , Yoshifumi Mutoh
IPC分类号： H01L21/26 , H01L21/42
CPC分类号： H01L29/78633 , G02F1/133555 , G02F1/13394 , G02F1/136227 , H01L27/1248
摘要： A method of manufacturing an electronic apparatus having a resist pattern provided over a substrate provided with a thin film transistor, the method includes the steps of forming by application a resist film over the substrate in the state of covering the thin film transistor, forming a resist pattern by subjecting the resist film to exposure to light and a developing treatment, and irradiating the resist pattern with at least one of ultraviolet light and visible light in a dry atmosphere in the condition where a channel part of the thin film transistor is prevented from being irradiated with light having a wavelength of shorter than 260 nm, wherein a step of heat curing the resist pattern is conducted after the irradiation with at least one of ultraviolet light and visible light.
摘要翻译：一种制造具有设置在设置有薄膜晶体管的基板上的抗蚀剂图案的电子设备的方法，该方法包括以下步骤：在覆盖薄膜晶体管的状态下在基板上施加抗蚀剂膜，形成抗蚀剂通过使抗蚀剂膜曝光并进行显影处理，并且在防止薄膜晶体管的沟道部分被阻止的条件下，在干燥气氛中用紫外光和可见光中的至少一种照射抗蚀剂图案用波长短于260nm的光照射，其中在用紫外光和可见光中的至少一种照射之后进行热固化抗蚀图案的步骤。

6. 发明授权

US07187039B2 Semiconductor integrated circuit device 有权
公开(公告)号：US07187039B2
公开(公告)日：2007-03-06
申请号：US11101446
申请日：2005-04-08
申请人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
发明人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
IPC分类号： H01L29/76
CPC分类号： H01L23/562 , G03F9/7076 , G03F9/7084 , H01L21/31053 , H01L21/76819 , H01L21/76838 , H01L23/522 , H01L23/585 , H01L24/05 , H01L24/10 , H01L24/13 , H01L2224/0401 , H01L2224/05554 , H01L2224/13 , H01L2224/13099 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01082 , H01L2924/05042 , H01L2924/12042 , H01L2924/1305 , H01L2924/1306 , H01L2924/14 , H01L2924/19041 , H01L2924/30105 , H01L2924/00
摘要： Interconnections are formed over an interlayer insulating film which covers MISFETQ1 formed on the principal surface of a semiconductor substrate, while dummy interconnections are disposed in a region spaced from such interconnections. Dummy interconnections are disposed also in a scribing area. Dummy interconnections are not formed at the peripheries of a bonding pad and a marker. In addition, a gate electrode of a MISFET and a dummy gate interconnection formed of the same layer are disposed. Furthermore, dummy regions are disposed in a shallow trench element-isolation region. After such dummy members are disposed, an insulating film is planarized by the CMP method.

7. 发明申请

US20050040537A1 Semiconductor integrated circuit device 有权
公开(公告)号：US20050040537A1
公开(公告)日：2005-02-24
申请号：US10951939
申请日：2004-09-29
申请人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
发明人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
IPC分类号： H01L21/76 , H01L21/304 , H01L21/3205 , H01L21/768 , H01L21/8242 , H01L23/00 , H01L27/108 , H01L29/40
CPC分类号： H01L23/562 , G03F9/7076 , G03F9/7084 , H01L21/31053 , H01L21/76819 , H01L21/76838 , H01L23/522 , H01L23/585 , H01L24/05 , H01L24/10 , H01L24/13 , H01L2224/0401 , H01L2224/05554 , H01L2224/13 , H01L2224/13099 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01082 , H01L2924/05042 , H01L2924/12042 , H01L2924/1305 , H01L2924/1306 , H01L2924/14 , H01L2924/19041 , H01L2924/30105 , H01L2924/00
摘要： Interconnections are formed over an interlayer insulating film which covers MISFETQ1 formed on the principal surface of a semiconductor substrate, while dummy interconnections are disposed in a region spaced from such interconnections. Dummy interconnections are disposed also in a scribing area. Dummy interconnections are not formed at the peripheries of a bonding pad and a marker. In addition, a gate electrode of a MISFET and a dummy gate interconnection formed of the same layer are disposed. Furthermore, dummy regions are disposed in a shallow trench element-isolation region. After such dummy members are disposed, an insulating film is planarized by the CMP method.

8. 发明授权

US06261883B1 Semiconductor integrated circuit device, and fabrication process and designing method thereof 失效
标题翻译：半导体集成电路器件及其制造工艺及其设计方法
公开(公告)号：US06261883B1
公开(公告)日：2001-07-17
申请号：US09050416
申请日：1998-03-31
申请人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
发明人： Yasushi Koubuchi , Koichi Nagasawa , Masahiro Moniwa , Youhei Yamada , Toshifumi Takeda
IPC分类号： H01L21336
CPC分类号： H01L23/562 , G03F9/7076 , G03F9/7084 , H01L21/31053 , H01L21/76819 , H01L21/76838 , H01L23/522 , H01L23/585 , H01L24/05 , H01L24/10 , H01L24/13 , H01L2224/0401 , H01L2224/05554 , H01L2224/13 , H01L2224/13099 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01082 , H01L2924/05042 , H01L2924/12042 , H01L2924/1305 , H01L2924/1306 , H01L2924/14 , H01L2924/19041 , H01L2924/30105 , H01L2924/00
摘要： Interconnections are formed over an interlayer insulating film which covers MISFETQ1 formed on the principal surface of a semiconductor substrate, while dummy interconnections are disposed in a region spaced from such interconnections. Dummy interconnections are disposed also in a scribing area. Dummy interconnections are not formed at the peripheries of a bonding pad and a marker. In addition, a gate electrode of a MISFET and a dummy gate interconnection formed of the same layer are disposed. Furthermore, dummy regions are disposed in a shallow trench element isolation region. After such dummy members are disposed, an insulating film is planarized by the CMP method.
摘要翻译：在覆盖形成在半导体衬底的主表面上的MISFETQ1的层间绝缘膜上形成互连，而虚设互连设置在与这种相互连接的区域中。虚拟互连也布置在划线区域中。在接合焊盘和标记的周边不形成虚拟互连。此外，设置MISFET的栅电极和由相同层形成的虚拟栅极互连。此外，虚设区域设置在浅沟槽元件隔离区域中。在这样的虚设部件设置之后，通过CMP方法将绝缘膜平坦化。

9. 发明授权

US08830436B2 Pixel structure, display device, and electronic apparatus 有权
标题翻译：像素结构，显示设备和电子设备
公开(公告)号：US08830436B2
公开(公告)日：2014-09-09
申请号：US13305316
申请日：2011-11-28
申请人： Masaya Tamaki , Koichi Nagasawa , Shuji Hayashi , Masaaki Kabe , Yoko Fukunaga
发明人： Masaya Tamaki , Koichi Nagasawa , Shuji Hayashi , Masaaki Kabe , Yoko Fukunaga
IPC分类号： G02F1/1343 , G09G3/36 , G02F1/1362 , G09G3/20 , G02F1/1333
CPC分类号： G02F1/13624 , G02F1/136227 , G02F1/136286 , G02F2001/133357 , G02F2001/134345 , G02F2001/13629 , G02F2203/30 , G09G3/207 , G09G3/3648 , G09G2300/0426 , G09G2300/0443 , G09G2300/0857
摘要： A pixel structure includes: a first planarizing film and a second planarizing film laminated in order on a substrate on which a circuit section is formed; and metallic wiring for electrically connecting two electrodes disposed on the second planarizing film to each other so as to be separated from each other, the metallic wiring being formed between the first planarizing film and the second planarizing film.
摘要翻译：像素结构包括：第一平面化膜和第二平面化膜依次层叠在其上形成有电路部分的基板上; 以及用于将设置在所述第二平坦化膜上的两个电极彼此分离地彼此分离的金属布线，所述金属布线形成在所述第一平坦化膜和所述第二平坦化膜之间。

10. 发明授权

US08475223B2 Method of manufacturing display device and display device 有权
标题翻译：显示设备和显示设备的制造方法
公开(公告)号：US08475223B2
公开(公告)日：2013-07-02
申请号：US13086861
申请日：2011-04-14
申请人： Koichi Nagasawa
发明人： Koichi Nagasawa
IPC分类号： H01J9/00
CPC分类号： G02F1/13394 , G02F1/136209 , G02F2201/40
摘要： A method of manufacturing a display device includes the steps of: forming a positive type photoresist above a surface of a first transparent substrate having a transistor formed on the surface thereof so as to cover the transistor; radiating a light from a back surface side of the first transparent substrate to the first transparent substrate having the positive type photoresist formed thereabove, for exposing the positive type photoresist; developing the positive type photoresist thus exposed to selectively leave the positive type photoresist located above the transistor, for forming a spacer; and laminating a second transparent substrate above the surface of the first transparent substrate through the spacer.
摘要翻译：一种制造显示装置的方法包括以下步骤：在其表面上形成有晶体管的第一透明基板的表面上形成正型光致抗蚀剂，以覆盖晶体管; 将光从第一透明基板的背面侧照射到具有形成在其上的正型光致抗蚀剂的第一透明基板，用于曝光正型光致抗蚀剂; 显影所曝露的正型光致抗蚀剂选择性地离开位于晶体管上方的正型光致抗蚀剂，用于形成间隔物; 以及通过所述间隔件在所述第一透明基板的表面上方层叠第二透明基板。

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