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1. 发明申请

US20060164109A1 Laser beam inspection equipment 有权
标题翻译：激光束检测设备
公开(公告)号：US20060164109A1
公开(公告)日：2006-07-27
申请号：US10542650
申请日：2004-01-16
申请人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
发明人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
IPC分类号： G01R31/265 , G01R33/12
CPC分类号： G01R31/311
摘要： The present invention relates to a laser beam inspection apparatus for inspecting a defect on a sample such as semiconductor integrated circuits by using a laser beam. The laser beam inspection apparatus irradiates a laser beam to a sample supplied with a constant current or applied by a constant voltage, and then detects indirectly a change in current or a change in electric field corresponding to a change in the value of resistance developed by scanning the laser beam along the surface of the sample. For example, the change in current is conducted indirectly in such a manner that a magnetic field detecting apparatus detects the change in the magnetic field caused by a current flowing the power supply line provided between a constant voltage source and a sample, and whereby it becomes possible to specify the defective area of the sample based on the detection of the change in the magnetic field.
摘要翻译：本发明涉及一种用于通过使用激光束检查诸如半导体集成电路的样本上的缺陷的激光束检查装置。激光束检查装置将激光束照射到供给恒定电流的样品或通过恒定电压施加，然后间接检测电流的变化或电场的变化，与扫描所产生的电阻值的变化相对应沿着样品表面的激光束。例如，电流的变化是以磁场检测装置检测由流过设置在恒定电压源和试样之间的电源线的电流引起的磁场变化的方式间接进行的，从而成为可以基于磁场变化的检测来指定样本的缺陷区域。

2. 发明授权

US07230436B2 Laser beam inspection equipment 有权
标题翻译：激光束检测设备
公开(公告)号：US07230436B2
公开(公告)日：2007-06-12
申请号：US10542650
申请日：2004-01-16
申请人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
发明人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
IPC分类号： G01R31/302
CPC分类号： G01R31/311
摘要： The present invention relates to a laser beam inspection apparatus for inspecting a defect on a sample such as semiconductor integrated circuits by using a laser beam. The laser beam inspection apparatus irradiates a laser beam to a sample supplied with a constant current or applied by a constant voltage, and then detects indirectly a change in current or a change in electric field corresponding to a change in the value of resistance developed by scanning the laser beam along the surface of the sample. For example, the change in current is conducted indirectly in such a manner that a magnetic field detecting apparatus detects the change in the magnetic field caused by a current flowing the power supply line provided between a constant voltage source and a sample, and whereby it becomes possible to specify the defective area of the sample based on the detection of the change in the magnetic field.
摘要翻译：本发明涉及一种用于通过使用激光束检查诸如半导体集成电路的样本上的缺陷的激光束检查装置。激光束检查装置将激光束照射到供给恒定电流的样品或通过恒定电压施加，然后间接检测电流的变化或电场的变化，与扫描所产生的电阻值的变化相对应沿着样品表面的激光束。例如，电流的变化是以磁场检测装置检测由流过设置在恒定电压源和试样之间的电源线的电流引起的磁场变化的方式间接进行的，从而成为可以基于磁场变化的检测来指定样本的缺陷区域。

3. 发明申请

US20120113534A1 IMMERSION LENS HOLDING DEVICE 有权
标题翻译：倾斜镜头保持装置
公开(公告)号：US20120113534A1
公开(公告)日：2012-05-10
申请号：US13375496
申请日：2010-05-28
申请人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
发明人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
IPC分类号： G02B7/02 , G02B7/04
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译：固体浸没透镜支撑装置包括：透镜保持器30，其保持固体浸没透镜20处于自由状态，透镜底面22通过下开口32向下突出，以便不固定固体浸没透镜;以及透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与固体浸没透镜20的球面透镜顶表面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分通过物镜观察透镜盖40。由此，可以实现能够有效地进行浸渍透镜的移动，安装和定位的浸没透镜支撑装置。

4. 发明授权

US08619377B2 Immersion lens holding device 有权
标题翻译：浸透镜保持装置
公开(公告)号：US08619377B2
公开(公告)日：2013-12-31
申请号：US13375496
申请日：2010-05-28
申请人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
发明人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
IPC分类号： G02B7/02
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译：固体浸没透镜支撑装置包括：透镜保持器30，其保持固体浸没透镜20处于自由状态，透镜底面22通过下开口32向下突出，以便不固定固体浸没透镜;以及透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与固体浸没透镜20的球面透镜顶表面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分通过物镜观察透镜盖40。由此，可以实现能够有效地进行浸渍透镜的移动，安装和定位的浸没透镜支撑装置。

5. 发明授权

US08582202B2 Observing device and method 有权
标题翻译：观察装置和方法
公开(公告)号：US08582202B2
公开(公告)日：2013-11-12
申请号：US12665588
申请日：2008-06-13
申请人： Hirotoshi Terada , Hiroshi Tanabe
发明人： Hirotoshi Terada , Hiroshi Tanabe
IPC分类号： G02B21/00
CPC分类号： G02B21/0016 , G01N21/9501 , G02B7/022 , G02B21/248 , G02B21/33
摘要： When it is detected that a solid immersion lens comes into contact with the semiconductor device, the lens is caused to vibrate by a vibration generator unit. Next, a reflected light image from the lens is input to calculate a reflected light quantity of the reflected light image, and it is judged whether a ratio of the reflected light quantity to an incident light quantity is not greater than a threshold value. When the ratio is greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is not achieved, and the lens is again caused to vibrate. When the ratio is not greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is achieved, and an observed image of the semiconductor device is acquired.
摘要翻译：当检测到固体浸没透镜与半导体器件接触时，透镜被振动发生器单元振动。接下来，输入来自透镜的反射光图像以计算反射光图像的反射光量，并且判断反射光量与入射光量的比率是否不大于阈值。当比率大于阈值时，判断透镜和半导体器件之间的光学紧密接触没有实现，并且再次使透镜振动。当比率不大于阈值时，判断透镜和半导体器件之间的光学紧密接触是实现的，并且获得了半导体器件的观察图像。

6. 发明申请

US20130120563A1 IMAGE GENERATION DEVICE 审中-公开
标题翻译：图像生成装置
公开(公告)号：US20130120563A1
公开(公告)日：2013-05-16
申请号：US13806486
申请日：2011-06-17
申请人： Hirotoshi Terada , Yoshitake Iwaki , Tomonori Nakamura , Teruo Takahashi
发明人： Hirotoshi Terada , Yoshitake Iwaki , Tomonori Nakamura , Teruo Takahashi
IPC分类号： G01B11/02
CPC分类号： G01B11/022 , G02B5/001 , G02B21/0016 , G02B21/002
摘要： An image generation device 1 comprises a laser light source 3, a laser output control unit 11, a laser scanner 5, a modulation pattern control unit 15 for such control as to irradiate the object with illumination light having a plurality of spatial modulation patterns, an electric signal detector 7 for detecting an electric signal issued from the object A, an electric signal imaging unit 17 for generating a two-dimensional characteristic image including characteristic distribution information associating illumination position information with characteristic information, and an image data operation unit 19 for generating a pattern image of the object A according to a plurality of characteristic images generated so as to correspond to the plurality of spatial modulation patterns.
摘要翻译：图像生成装置1包括激光光源3，激光输出控制部11，激光扫描器5，调制图案控制部15，用于对具有多个空间调制图案的照明光照射物体的控制，用于检测从对象A发出的电信号的电信号检测器7，用于产生包括将照明位置信息与特征信息相关联的特征分布信息的二维特征图像的电信号成像单元17和用于产生根据生成的与多个空间调制图案对应的多个特征图像，对象A的图案图像。

7. 发明申请

US20100202041A1 OBSERVING DEVICE AND METHOD 有权
标题翻译：观察装置和方法
公开(公告)号：US20100202041A1
公开(公告)日：2010-08-12
申请号：US12665588
申请日：2008-06-13
申请人： Hirotoshi Terada , Hiroshi Tanabe
发明人： Hirotoshi Terada , Hiroshi Tanabe
IPC分类号： G02B21/02
CPC分类号： G02B21/0016 , G01N21/9501 , G02B7/022 , G02B21/248 , G02B21/33
摘要： When a semiconductor device 11 is observed, first, when it is detected that a solid immersion lens 6 comes into contact with the semiconductor device 11, the solid immersion lens 6 is caused to vibrate by a vibration generator unit. Next, a reflected light image from the solid immersion lens 6 is input to calculate a reflected light quantity m of the reflected light image, and it is judged whether a ratio (m/n) of the reflected light quantity m to an incident light quantity n is not greater than a threshold value A. When the ratio (m/n) is greater than the threshold value A, it is judged that optical close contact between the solid immersion lens 6 and the semiconductor device 11 is not achieved, and the solid immersion lens 6 is again caused to vibrate. When the ratio (m/n) is not greater than the threshold value A, it is judged that optical close contact between the solid immersion lens 6 and the semiconductor device 11 is achieved, and an observed image of the semiconductor device 11 is acquired. Thereby, achieving an observation apparatus and method capable of improving the close contact between the solid immersion lens and an observation object.
摘要翻译：当观察到半导体器件11时，首先，当检测到固体浸没透镜6与半导体器件11接触时，使固体浸没透镜6由振动发生器单元振动。接下来，输入来自固体浸没透镜6的反射光图像以计算反射光图像的反射光量m，并且判断反射光量m与入射光量的比（m / n） n不大于阈值A.当比率（m / n）大于阈值A时，判断为没有实现固体浸没透镜6与半导体器件11之间的光学紧密接触，并且再次使固体浸没透镜6振动。当比率（m / n）不大于阈值A时，判断固体浸没透镜6与半导体器件11之间的光学紧密接触，并且获得半导体器件11的观察图像。由此，能够实现能够改善固体浸没透镜与观察对象物之间的紧密接触的观察装置和方法。

8. 发明申请

US20070146871A1 Microscope and sample observation method 审中-公开
标题翻译：显微镜和样品观察法
公开(公告)号：US20070146871A1
公开(公告)日：2007-06-28
申请号：US11711638
申请日：2007-02-28
申请人： Hirotoshi Terada , Ikuo Arata
发明人： Hirotoshi Terada , Ikuo Arata
IPC分类号： G02B21/00
CPC分类号： G01N21/1717 , G01N21/8806 , G01N21/9501 , G01N2021/0342 , G02B21/02 , G02B21/365
摘要： For a semiconductor device S as a sample of an observed object, there are provided an image acquisition part 1 for carrying out observation of the semiconductor device S, and an optical system 2 comprising an objective lens 20. A solid immersion lens (SIL) 3 for magnifying an image of the semiconductor device S is arranged movable between an insertion position where the solid immersion lens includes an optical axis from the semiconductor device S to the objective lens 20 and is in close contact with a surface of the semiconductor device S, and a standby position off the optical axis. Then an image containing reflected light from SIL 3 is acquired with the SIL 3 at the insertion position, and the insertion position of SIL 3 is adjusted by SIL driver 30, with reference to the image. This realizes a semiconductor inspection apparatus (microscope) capable of readily performing observation of the sample necessary for an analysis of microstructure of a semiconductor device or the like, and a semiconductor inspection method (sample observation method) therewith.
摘要翻译：对于作为观察对象的样本的半导体器件S，设置有用于执行半导体器件S的观察的图像获取部分1和包括物镜20的光学系统2.固体浸没透镜（SIL）3 用于放大半导体器件S的图像的布置可以在固体浸没透镜包括从半导体器件S到物镜20的光轴并且与半导体器件S的表面紧密接触的插入位置之间移动，以及离开光轴的待机位置。然后，通过SIL 3在插入位置获取包含来自SIL 3的反射光的图像，并且参考图像，通过SIL驱动器30调整SIL 3的插入位置。这实现了能够容易地观察对半导体装置等的微结构进行分析所需的样品的半导体检查装置（显微镜）以及半导体检查方法（样本观察方法）。

9. 发明申请

US20050157292A1 Fluorescence lifetime distribution image measuring system and its measuring method 有权
标题翻译：荧光寿命分布图像测量系统及其测量方法
公开(公告)号：US20050157292A1
公开(公告)日：2005-07-21
申请号：US10516076
申请日：2003-05-28
申请人： Haruhisa Saitoh , Hirotoshi Terada
发明人： Haruhisa Saitoh , Hirotoshi Terada
IPC分类号： G01N21/64
CPC分类号： G01N21/6408
摘要： Pulse excitation light, emitted from a laser light source 10, is scanned in a first direction by a first scanning means 100, scanned in a second direction, perpendicular to the first direction, by a second scanning means 120, converged by an objective optical system 140, and illuminated onto sample 50. Fluorescences, emitted from sample 50, are output from objective optical system 140 to second scanning means 120, scanned in the second direction, perpendicular to the first direction, and output to a light separation means 110 by second scanning means 120, output from light separation means 110 to a streak camera, and recorded as variations of time of the fluorescence intensities by streak camera 30. Fluorescence lifetimes are calculated based on these variations with time of the fluorescence intensities and a fluorescence lifetime distribution image is prepared.
摘要翻译：由激光光源10发射的脉冲激发光由第一扫描装置100沿第一方向扫描，第一扫描装置100通过第二扫描装置120沿第二方向垂直于第一方向扫描，由物镜光学系统 140，并照射到样品50上。从样品50发射的荧光从物镜光学系统140输出到与第一方向垂直扫描的第二扫描装置120，并通过第二扫描装置120输出到光分离装置110，从光分离意味着110到条纹相机，并且被条纹相机30的荧光强度的时间变化记录下来。基于荧光强度随时间的变化计算荧光寿命并制备荧光寿命分布图像。

10. 发明申请

US20130088714A1 SUCTION APPARATUS, SEMICONDUCTOR DEVICE OBSERVATION DEVICE, AND SEMICONDUCTOR DEVICE OBSERVATION METHOD 有权
标题翻译：吸收装置，半导体装置观测装置和半导体装置观测方法
公开(公告)号：US20130088714A1
公开(公告)日：2013-04-11
申请号：US13701035
申请日：2011-06-21
申请人： Hirotoshi Terada , Hiroyuki Matsuura
发明人： Hirotoshi Terada , Hiroyuki Matsuura
IPC分类号： G01N21/95 , G01N21/01
CPC分类号： G01N21/9501 , G01N21/01 , H01L21/6838 , H01L21/68757 , H01L21/68785 , H01L22/12
摘要： A suction unit 10 includes a main body portion having a first surface 13 on which a semiconductor wafer W is arranged and a second surface 14 opposite to the first surface 13, and in which a through-hole 15 that penetrates through the first surface 13 and the second surface 14 is formed and a light transmitting portion having a light incident surface 16 and a light emitting surface 17, and which is fitted to the through-hole 15. Further, in the first surface 13, a first suction groove 13a for vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surface 16 is formed, and in the second surface 14, a second suction groove 14a for vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surface 17 is formed.
摘要翻译：抽吸单元10包括主体部分，其具有布置半导体晶片W的第一表面13和与第一表面13相对的第二表面14，并且其中穿过第一表面13的通孔15和形成第二表面14和具有光入射表面16和发光表面17并且安装到通孔15的透光部分。此外，在第一表面13中，具有用于真空的第一吸入槽13a 吸收半导体晶片W以将半导体器件D固定到光入射表面16，并且在第二表面14中，用于真空吸附固体浸没透镜S以将固体浸没透镜S固定到光的第二吸入槽14a 形成发光面17。

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