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1. 发明申请

US20120113534A1 IMMERSION LENS HOLDING DEVICE 有权
标题翻译：倾斜镜头保持装置
公开(公告)号：US20120113534A1
公开(公告)日：2012-05-10
申请号：US13375496
申请日：2010-05-28
申请人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
发明人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
IPC分类号： G02B7/02 , G02B7/04
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译：固体浸没透镜支撑装置包括：透镜保持器30，其保持固体浸没透镜20处于自由状态，透镜底面22通过下开口32向下突出，以便不固定固体浸没透镜;以及透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与固体浸没透镜20的球面透镜顶表面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分通过物镜观察透镜盖40。由此，可以实现能够有效地进行浸渍透镜的移动，安装和定位的浸没透镜支撑装置。

2. 发明授权

US08619377B2 Immersion lens holding device 有权
标题翻译：浸透镜保持装置
公开(公告)号：US08619377B2
公开(公告)日：2013-12-31
申请号：US13375496
申请日：2010-05-28
申请人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
发明人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
IPC分类号： G02B7/02
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译：固体浸没透镜支撑装置包括：透镜保持器30，其保持固体浸没透镜20处于自由状态，透镜底面22通过下开口32向下突出，以便不固定固体浸没透镜;以及透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与固体浸没透镜20的球面透镜顶表面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分通过物镜观察透镜盖40。由此，可以实现能够有效地进行浸渍透镜的移动，安装和定位的浸没透镜支撑装置。

3. 发明申请

US20060164109A1 Laser beam inspection equipment 有权
标题翻译：激光束检测设备
公开(公告)号：US20060164109A1
公开(公告)日：2006-07-27
申请号：US10542650
申请日：2004-01-16
申请人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
发明人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
IPC分类号： G01R31/265 , G01R33/12
CPC分类号： G01R31/311
摘要： The present invention relates to a laser beam inspection apparatus for inspecting a defect on a sample such as semiconductor integrated circuits by using a laser beam. The laser beam inspection apparatus irradiates a laser beam to a sample supplied with a constant current or applied by a constant voltage, and then detects indirectly a change in current or a change in electric field corresponding to a change in the value of resistance developed by scanning the laser beam along the surface of the sample. For example, the change in current is conducted indirectly in such a manner that a magnetic field detecting apparatus detects the change in the magnetic field caused by a current flowing the power supply line provided between a constant voltage source and a sample, and whereby it becomes possible to specify the defective area of the sample based on the detection of the change in the magnetic field.
摘要翻译：本发明涉及一种用于通过使用激光束检查诸如半导体集成电路的样本上的缺陷的激光束检查装置。激光束检查装置将激光束照射到供给恒定电流的样品或通过恒定电压施加，然后间接检测电流的变化或电场的变化，与扫描所产生的电阻值的变化相对应沿着样品表面的激光束。例如，电流的变化是以磁场检测装置检测由流过设置在恒定电压源和试样之间的电源线的电流引起的磁场变化的方式间接进行的，从而成为可以基于磁场变化的检测来指定样本的缺陷区域。

4. 发明授权

US07230436B2 Laser beam inspection equipment 有权
标题翻译：激光束检测设备
公开(公告)号：US07230436B2
公开(公告)日：2007-06-12
申请号：US10542650
申请日：2004-01-16
申请人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
发明人： Hirotoshi Terada , Hiroyoshi Suzuki , Toshimichi Ishizuka
IPC分类号： G01R31/302
CPC分类号： G01R31/311
摘要： The present invention relates to a laser beam inspection apparatus for inspecting a defect on a sample such as semiconductor integrated circuits by using a laser beam. The laser beam inspection apparatus irradiates a laser beam to a sample supplied with a constant current or applied by a constant voltage, and then detects indirectly a change in current or a change in electric field corresponding to a change in the value of resistance developed by scanning the laser beam along the surface of the sample. For example, the change in current is conducted indirectly in such a manner that a magnetic field detecting apparatus detects the change in the magnetic field caused by a current flowing the power supply line provided between a constant voltage source and a sample, and whereby it becomes possible to specify the defective area of the sample based on the detection of the change in the magnetic field.
摘要翻译：本发明涉及一种用于通过使用激光束检查诸如半导体集成电路的样本上的缺陷的激光束检查装置。激光束检查装置将激光束照射到供给恒定电流的样品或通过恒定电压施加，然后间接检测电流的变化或电场的变化，与扫描所产生的电阻值的变化相对应沿着样品表面的激光束。例如，电流的变化是以磁场检测装置检测由流过设置在恒定电压源和试样之间的电源线的电流引起的磁场变化的方式间接进行的，从而成为可以基于磁场变化的检测来指定样本的缺陷区域。

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