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    • 3. 发明申请
    • THIN FILM FORMATION METHOD AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
    • 薄膜形成方法和半导体器件的制造方法
    • US20090253264A1
    • 2009-10-08
    • US12189335
    • 2008-08-11
    • Junichi Horie
    • Junichi Horie
    • H01L21/311
    • H01L22/12H01L22/26
    • A method of forming a thin film including a first portion having a first film thickness and a second portion having a second film thickness thinner than the first film thickness. A thin film having the first film thickness is formed on a substrate, an interference waveform upon film formation from reflected light by irradiating with laser light is acquired, the second portion of the thin film is etched, an interference waveform upon etching is acquired by irradiating, with laser light, the second portion, and calculating an interference waveform upon target etching on condition that the second portion has the second film thickness, based on the interference waveform upon film formation. The etching is stopped when the interference waveform upon etching becomes the same as the interference waveform upon target etching.
    • 一种形成薄膜的方法,所述薄膜包括具有第一薄膜厚度的第一部分和具有比第一薄膜厚度薄的第二薄膜厚度的第二部分。 在基板上形成具有第一膜厚度的薄膜,通过照射激光获得反射光成膜时的干涉波形,蚀刻第二部分薄膜,通过照射获得蚀刻时的干涉波形 基于成膜时的干涉波形,在第二部分具有第二膜厚的条件下,利用激光照射第二部分,并且在目标蚀刻时计算干涉波形。 当蚀刻时的干涉波形与目标蚀刻时的干涉波形相同时,停止蚀刻。
    • 5. 发明申请
    • Thermal type flow measuring apparatus
    • 热式流量测量仪
    • US20070024119A1
    • 2007-02-01
    • US11480979
    • 2006-07-06
    • Izumi WatanabeJunichi HorieKeiichi Nakada
    • Izumi WatanabeJunichi HorieKeiichi Nakada
    • B60L1/00
    • G01F1/692G01F1/6845G01F1/698
    • A thermal type flow measuring apparatus includes a heating resistor provided in a thin part of a substrate and a bridge circuit for driving the heating resistor to have a preset heating temperature, wherein resistor elements on sides forming the bridge circuit are temperature sensitive resistors, a part or whole of at least one of the temperature sensitive resistors is placed in the thin part and near the heating resistor so that the temperature sensitive resistor is influenced by a heat of the heating resistor, and the preset heating temperature is increased as the flow of fluid is increased. This configuration introduces flow dependency into the heating temperature of the heating resistor.
    • 一种热式流量测量装置包括设置在基板的薄部分中的加热电阻器和用于驱动加热电阻器以具有预设加热温度的桥接电路,其中形成桥接电路的侧面上的电阻器元件是温度敏感电阻器, 或整个温度敏感电阻器中的至少一个放置在薄部分和靠近加热电阻器处,使得温度敏感电阻器受到加热电阻器的热量的影响,并且预设加热温度随着流体流动而增加 增加了。 该配置将流依赖性引入加热电阻器的加热温度。
    • 6. 发明申请
    • Thermal flow sensor
    • 热流量传感器
    • US20060144138A1
    • 2006-07-06
    • US10546174
    • 2004-05-26
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • G01F1/68
    • G01F1/6845G01F1/698
    • A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature ({Th=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
    • 一种以低成本制造并具有改进的可靠性的热流传感器。 在形成在半导体衬底(2)中的空腔(7)上,在腔的中心附近形成至少一个加热电阻(4),其中电绝缘膜置于加热电阻和空腔之间。 加热电阻(4)的温度(Th)通过恒温({Th = Th-Ta))控制为高于介质温度(Ta)。 从加热电阻(4)的上游端到位于空腔上的电绝缘膜的上游端和恒温(DeltaTh)的气流方向的距离(Ws)满足以下关系: line-formula description =“In-line Formulas”end =“lead”?> DeltaTh / Ws <= 800(°C / mm)<?in-line-formula description =“In-line Formulas”end =“tail 因此,提供了能够防止由热诱导效应引起的诸如碳颗粒的漂浮微粒的沉积的热流量传感器,可以以低成本制造,并且具有高可靠性。