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    • 7. 发明授权
    • Magnetic bearing system
    • 磁轴承系统
    • US06259179B1
    • 2001-07-10
    • US09440115
    • 1999-11-15
    • Hiromasa FukuyamaTakeshi Takizawa
    • Hiromasa FukuyamaTakeshi Takizawa
    • H02K709
    • F16C32/0451F16C32/0465F16C32/0489
    • A magnetic bearing system includes a rotor shaft 1, stationary electromagnetic pole, a radial displacement sensor 5 for detecting the position of the rotor shaft 1 with respect to the electromagnetic polarity, and a control circuit 220 which supplies a control current in accordance with an output from the radial displacement sensor 5. A permanent magnet 20 is disposed in the magnetic bearing so as to constitute a portion of a magnetic member 10 which forms a magnetic circuit between the rotor shaft 1 and the electromagnetic pole. The position where a balance exists between an attraction force developed in the permanent magnet 20 and static force, which acts on the rotor shaft 1 when no load is imposed on the rotor shaft 1, is set as a target position for the rotor shaft 1.
    • 磁轴承系统包括转子轴1,固定电磁极,用于检测转子轴1相对于电磁极性的位置的径向位移传感器5以及根据输出提供控制电流的控制电路220 永磁体20设置在磁性轴承中,以构成在转子轴1和电磁极之间形成磁路的磁性部件10的一部分。 作为转子轴1的目标位置,在永磁体20中产生的吸引力与作用在转子轴1上的静力之间产生平衡的位置被设定为转子轴1的目标位置。
    • 8. 发明授权
    • Magnetic bearing
    • 磁轴承
    • US6121704A
    • 2000-09-19
    • US124760
    • 1998-07-29
    • Hiromasa FukuyamaTakeshi Takizawa
    • Hiromasa FukuyamaTakeshi Takizawa
    • F16C32/04F16C39/06
    • F16C32/0465F16C32/0459F16C32/0489
    • There is disclosed a magnetic bearing which is an improvement over conventional radial magnetic bearings, and has a very small bearing loss. At least three U-shaped laminates 10 of electromagnetic steel sheets are circumferentially arranged around a rotation shaft 1, and are fixedly mounted on a housing 100. Exciting coils 31 and 32 are wound on each electromagnetic steel sheet laminate 10, and permanent magnets 20 and 21 are provided in the laminate 10. Rotor cores 2, each comprising a laminate of I-shaped electromagnetic steel sheets stacked together in the circumferential direction, are mounted on the rotation shaft 1 in such a manner that each rotor core 2 is opposed to magnetic pole surfaces of the electromagnetic steel sheet laminates 10. In accordance with a signal from position sensors 5 which detect the radial position of the rotation shaft 1, control current is caused to flow through the exciting coils 31 and 32 to thereby control the position of the rotation shaft 1. Thus, merely by causing the control current to flow through the exciting coils 31 and 32 when this is required, the control of the rotation shaft 1 can be achieved, and with this method, the energy consumption can be much reduced.
    • 公开了一种磁性轴承,其是对常规径向磁轴承的改进,并且具有非常小的轴承损耗。 电磁钢板的至少三个U形层叠体10围绕旋转轴1周向地布置,并且固定地安装在壳体100上。激磁线圈31和32缠绕在每个电磁钢板层压体10上,并且永磁体20和 21设置在层叠体10中。转子芯2,其各自包括沿圆周方向堆叠在一起的I形电磁钢板的层叠体,以使每个转子芯2与磁性体相对的方式安装在旋转轴1上 电磁钢板层叠体10的极面。根据检测旋转轴1的径向位置的位置传感器5的信号,使控制电流流过励磁线圈31,32,由此控制 因此,仅当需要控制电流才能流过励磁线圈31和32时,旋转轴1 可以实现,并且通过该方法可以大大减少能量消耗。
    • 9. 发明授权
    • Excimer laser apparatus
    • 准分子激光装置
    • US06532246B1
    • 2003-03-11
    • US09657653
    • 2000-09-07
    • Hiromasa FukuyamaKatsuya TomaMotohiro Arai
    • Hiromasa FukuyamaKatsuya TomaMotohiro Arai
    • H01S322
    • H01S3/036H01S3/225
    • In an excimer laser apparatus comprising a laser chamber 1 filled with a laser gas, a discharge excitation portion 2 provided in the laser chamber 1, a rotary shaft 3 to which a gas circulating fan 4 for circulating the laser gas is fixed, a shield partition wall 61 for forming a sealed space to enclose the rotary shaft 3, a magnetic bearing of a control type including a rotor portion 32 provided on the rotary shaft 3 side and a stator portion 6 provided outside the shield partition wall 61 and serving to pivotally support the rotary shaft 3 in non-contact, a driving motor 13 provided outside the laser chamber 1, magnetic coupling portions 33, 11 and 121 for transmitting driving force of the driving motor 13 to the rotary shaft 3 through the shield partition wall 61 in non-contact, and rotary shaft sensors 8 and 9 for detecting a position of the rotor portion 32 with respect to the stator portion 6. The shield partition wall 61 of the magnetic coupling portions 33, 11 and 121 is formed of ceramic and the shield partition wall 61 of the magnetic bearing is formed of metal.
    • 在包含激光气体的激光室1的准分子激光装置中,设置在激光室1内的放电激励部2,固定用于循环激光气体的气体循环风扇4的旋转轴3, 用于形成用于包围旋转轴3的密封空间的壁61,包括设置在旋转轴3侧的转子部32的控制型的磁性轴承和设置在屏蔽分隔壁61的外侧的定子部6, 不接触的旋转轴3,设置在激光室1外的驱动电动机13,用于通过非屏蔽分隔壁61将驱动电动机13的驱动力传递到旋转轴3的磁耦合部33,11和121 以及用于检测转子部分32相对于定子部分6的位置的旋转轴传感器8和9。形成磁耦合部分33,11和121的屏蔽分隔壁61 并且磁性轴承的屏蔽分隔壁61由金属形成。