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    • 3. 发明授权
    • Excimer laser apparatus
    • 准分子激光装置
    • US06532246B1
    • 2003-03-11
    • US09657653
    • 2000-09-07
    • Hiromasa FukuyamaKatsuya TomaMotohiro Arai
    • Hiromasa FukuyamaKatsuya TomaMotohiro Arai
    • H01S322
    • H01S3/036H01S3/225
    • In an excimer laser apparatus comprising a laser chamber 1 filled with a laser gas, a discharge excitation portion 2 provided in the laser chamber 1, a rotary shaft 3 to which a gas circulating fan 4 for circulating the laser gas is fixed, a shield partition wall 61 for forming a sealed space to enclose the rotary shaft 3, a magnetic bearing of a control type including a rotor portion 32 provided on the rotary shaft 3 side and a stator portion 6 provided outside the shield partition wall 61 and serving to pivotally support the rotary shaft 3 in non-contact, a driving motor 13 provided outside the laser chamber 1, magnetic coupling portions 33, 11 and 121 for transmitting driving force of the driving motor 13 to the rotary shaft 3 through the shield partition wall 61 in non-contact, and rotary shaft sensors 8 and 9 for detecting a position of the rotor portion 32 with respect to the stator portion 6. The shield partition wall 61 of the magnetic coupling portions 33, 11 and 121 is formed of ceramic and the shield partition wall 61 of the magnetic bearing is formed of metal.
    • 在包含激光气体的激光室1的准分子激光装置中,设置在激光室1内的放电激励部2,固定用于循环激光气体的气体循环风扇4的旋转轴3, 用于形成用于包围旋转轴3的密封空间的壁61,包括设置在旋转轴3侧的转子部32的控制型的磁性轴承和设置在屏蔽分隔壁61的外侧的定子部6, 不接触的旋转轴3,设置在激光室1外的驱动电动机13,用于通过非屏蔽分隔壁61将驱动电动机13的驱动力传递到旋转轴3的磁耦合部33,11和121 以及用于检测转子部分32相对于定子部分6的位置的旋转轴传感器8和9。形成磁耦合部分33,11和121的屏蔽分隔壁61 并且磁性轴承的屏蔽分隔壁61由金属形成。
    • 4. 发明授权
    • Magnetic coupling mechanism for use in laser apparatus
    • 用于激光设备的磁耦合机构
    • US06417591B1
    • 2002-07-09
    • US09573067
    • 2000-05-16
    • Takashi SaitoMotohiro Arai
    • Takashi SaitoMotohiro Arai
    • H02K711
    • H01S3/036H01S3/225Y10T464/30
    • A magnetic coupling mechanism which can transmit rotational force of a motor with high efficiency and is simple in mechanism and unlikely to damage bearings, etc. and also unlikely to contaminate a laser gas, and in which flakes from plating or the like will not cause an operational abnormality. The magnetic coupling mechanism transmits rotational force from a motor shaft outside a laser chamber filled with a laser gas to a shaft of a gas-circulating fan in the laser chamber to rotate the fan. A first magnet group is provided on an inner peripheral surface at one end of the motor shaft. A second magnet group is radially coupled to the first magnet group through a ceramic partition constituting a part of the wall of a container of the laser chamber. The second magnet group is provided on the outer peripheral surface of the fan shaft.
    • 一种能够以高效率传递电动机的旋转力并且机构简单且不易损坏轴承等并且不太可能污染激光气体的磁耦合机构,并且其中来自电镀等的片不会导致 操作异常。 磁耦合机构将来自激光气体的激光室外部的马达轴的旋转力传递到激光室中的气体循环风扇的轴,以使风扇旋转。 第一磁体组设置在电动机轴的一端的内周面上。 第二磁体组通过构成激光室的容器的壁的一部分的陶瓷隔片径向耦合到第一磁体组。 第二磁体组设置在风扇轴的外周面上。
    • 5. 发明授权
    • Solid-state laser device which is pumped by light output from laser diode
    • 由激光二极管的光输出泵浦的固体激光器件
    • US5859868A
    • 1999-01-12
    • US788915
    • 1997-01-22
    • Yukio KyushoMotohiro Arai
    • Yukio KyushoMotohiro Arai
    • H01S3/094H01S3/0941H01S5/40H01S3/091
    • H01S3/09415H01S5/4025
    • The diameter of the spot of the light output from a laser diode is reduced through a coupled optical system so as to be smaller than the incidence aperture of a tapered total reflection rod. The light output from the coupling optics is focused into the incidence aperture of the total reflection rod. The total reflection rod is equipped with a smaller emission aperture than the diameter of the incidence aperture and further reduces the spot of the focused light. That is, the light passing through the total reflection rod is reduced to a smaller diameter while being totally reflected internally. A laser medium is in optical contact with the emission aperture of the total reflection rod and is pumped by the light which is output from the total reflection rod.
    • 从激光二极管输出的光的光斑的直径通过耦合的光学系统减小,以便小于锥形全反射棒的入射孔。 来自耦合光学器件的光输出聚焦到全反射棒的入射孔内。 全反射棒具有比入射孔的直径更小的发射孔径,并进一步减少聚焦光的斑点。 也就是说,通过全反射棒的光在内部被完全反射的同时被减小到更小的直径。 激光介质与全反射棒的发射孔光学接触,并由从全反射棒输出的光泵送。
    • 7. 发明授权
    • Gas laser device that emits ultraviolet rays
    • 发射紫外线的气体激光装置
    • US06480519B2
    • 2002-11-12
    • US09732017
    • 2000-12-08
    • Koji KakizakiMotohiro Arai
    • Koji KakizakiMotohiro Arai
    • H01S3097
    • H01S3/038H01S3/0384
    • To reduce the cross-sectional area of a discharge circuit loop in the excitation circuit of a gas laser device that discharges ultraviolet rays, thereby reducing the inductance and enhancing the laser oscillation efficiency, the gas laser device is provided with a laser chamber (1) in which laser gas is sealed and which has a circulation means that circulates the laser gas within the chamber, a pair of main discharge electrodes (3, 4) disposed at a prescribed separation within said laser chamber (1), a discharge circuit having peaking capacitors (C3) that are connected in parallel with the pair of main discharge electrodes (3, 4,) and a preionization unit (15) in which a first electrode (9) and a second electrode (7) are disposed facing each other with a dielectric (8) interposed between them, the preionization unit (15) being disposed running along each side of one of the main discharge electrodes (4), that one of the main discharge electrodes (4) and the peaking capacitors (C3) being connected via a conduction member (25) that passes between the one of the main discharge electrodes (4) and the preionization unit (15).
    • 为了减小放电紫外线的气体激光装置的激励电路中的放电电路回路的截面积,从而降低电感并提高激光振荡效率,气体激光装置设置有激光室(1) 其中激光气体被密封并且具有使腔室内的激光气体循环的循环装置,在所述激光室(1)内以规定间隔设置的一对主放电电极(3,4),具有峰值的放电电路 与所述一对主放电电极(3,4)并联连接的电容器(C3)和其中第一电极(9)和第二电极(7)彼此面对地配置的预电离单元(15) 介于它们之间的电介质(8),所述预电离单元(15)沿着所述主放电电极(4)中的一个的每一侧设置,所述主放电电极(4)和所述峰值电容器(C3)中的一个为 通过在主放电电极(4)和预电离单元(15)之间通过的导电构件(25)连接。
    • 8. 发明授权
    • Corona preionization electrode unit for use in gas laser apparatus
    • 用于气体激光装置的电晕前置电极单元
    • US06654402B1
    • 2003-11-25
    • US09626417
    • 2000-07-26
    • Koji KakizakiKazuaki HottaMotohiro Arai
    • Koji KakizakiKazuaki HottaMotohiro Arai
    • H01S3097
    • H01S3/0385H01S3/0384H01S3/09713
    • A corona preionization electrode unit for use in gas laser apparatus, wherein the electric field for corona discharge is concentrated, and ultraviolet radiation is not blocked, and further the laser gas stream is not obstructed, thereby allowing efficient, stable and uniform corona preionization. The corona preionization electrode unit is disposed in a gas laser apparatus together with a pair of main discharge electrodes for ionizing and exciting a laser gas. The corona preionization electrode unit includes a first electrode covered with a dielectric material and a second electrode placed in contact with the outer surface of the dielectric material around the first electrode. The corona preionization electrode unit is positioned in the vicinity of either one of the main discharge electrodes. The second electrode is a plate-shaped member having a straight edge contacting at least the outer surface of the dielectric material. A portion of the plate-shaped member other than the edge is provided with a plurality of openings for passage of ultraviolet light for preionization and a circulating laser gas.
    • 一种用于气体激光装置的电晕前置电极单元,其中用于电晕放电的电场集中,并且紫外线辐射不被阻挡,并且进一步激光气流不被阻挡,由此允许有效,稳定和均匀的电晕预电离。 电晕前置电极单元与一对用于电离和激发激光气体的主放电电极一起设置在气体激光装置中。 电晕前置电极单元包括覆盖有介电材料的第一电极和与第一电极周围的电介质材料的外表面接触的第二电极。 电晕前置电极单元位于任一个主放电电极附近。 第二电极是具有与电介质材料的至少外表面接触的直边缘的板状构件。 除了边缘之外的板状构件的一部分设置有多个用于前体的紫外线通过的开口和循环的激光气体。