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1. 发明授权

US06277441B1 Method of forming coating film on a substrate 失效
标题翻译：在基材上形成涂膜的方法
公开(公告)号：US06277441B1
公开(公告)日：2001-08-21
申请号：US08389119
申请日：1995-02-15
申请人： Hiroki Endo , Hideya Kobari , Koji Ueda , Hiroyoshi Sago
发明人： Hiroki Endo , Hideya Kobari , Koji Ueda , Hiroyoshi Sago
IPC分类号： B05D312
CPC分类号： H01L21/6715 , B05D1/005 , C03C17/001 , C03C2218/116 , H01L21/02126 , H01L21/02282 , H01L21/31051 , H01L21/316
摘要： According to the invention disclosed, application liquid such as spin-on-glass (SOG) is dropped on the surface of a substrate such as a semiconductor wafer having irregularities thereon and is dispersed on the substrate surface using a centrifugal force generated by rotating the substrate. The rotation of the substrate is performed in a first rotational action at a low speed and a second rotational action at a high speed, the first and second rotational actions being separated by a time interval. The second rotation may be at a constant speed. Alternatively, the rotational speed of the second rotational action may comprise rotation at an intermediate speed continuously followed by rotation at a higher speed. The time interval between the first and second rotational actions is ten times the duration of the first rotational action or longer. The duration of the second rotational action is three times that of the first rotational action or longer. Such time interval and relative durations make the application liquid more conformable to the substrate surface and causes the application liquid to be sufficiently dispersed on the substrate to provide a film having the desired thickness on the substrate, even though the substrate has irregularities thereon.
摘要翻译：根据所公开的发明，将诸如旋涂玻璃（SOG）的涂布液滴落在其上具有不规则性的半导体晶片等基板的表面上，并使用通过旋转基板产生的离心力将其分散在基板表面上。基板的旋转以低速的第一旋转动作和高速的第二旋转动作进行，第一和第二旋转动作以时间间隔分开。第二旋转可以是恒定的速度。或者，第二旋转动作的旋转速度可以包括以中间速度连续地以较高速度旋转的旋转。第一和第二旋转动作之间的时间间隔是第一旋转动作的持续时间的十倍或更长。第二旋转动作的持续时间是第一旋转动作的持续时间的3倍以上。这样的时间间隔和相对持续时间使得施加液体更适合于衬底表面，并且使得施加液体充分地分散在衬底上，以在衬底上提供具有期望厚度的膜，即使衬底在其上具有不规则性。

2. 发明授权

US5439519A Solution applying apparatus 失效
标题翻译：解决方案应用设备
公开(公告)号：US5439519A
公开(公告)日：1995-08-08
申请号：US176204
申请日：1994-01-03
申请人： Hiroyoshi Sago , Hirotsugu Kumazawa , Futoshi Shimai , Shigemi Fujiyama , Hiroki Endo , Hideya Kobari
发明人： Hiroyoshi Sago , Hirotsugu Kumazawa , Futoshi Shimai , Shigemi Fujiyama , Hiroki Endo , Hideya Kobari
IPC分类号： B05C11/08 , G03F7/16 , H01L21/00 , B05C11/02 , B05C5/00
CPC分类号： H01L21/6715 , B05C11/08 , G03F7/162
摘要： A solution applying apparatus has inner and outer cups each having an upper opening, the inner cup being rotatably disposed in the outer cup. The inner cup houses a planar workpiece such as a glass substrate therein which is to be coated with a coating solution such as a resist solution. The solution applying apparatus also has a lid assembly having an outer cup lid for closing the upper opening of the outer cup and an inner cup lid for closing the upper opening of the inner cup, the inner cup lid being rotatable with respect to the outer cup lid. The inner cup has drain holes defined in an outer circumferential portion thereof for providing communication between a space within the inner cup and a space outside of the inner cup to drain an excessive coating solution from the inner cup. The outer cup has an annular collection passage defined therein along the outer circumferential portion of the inner cup, the drain holes opening into the annular collection passage. The lid assembly includes a self-centering valve body that can be vertically movable into and out of snugly fitting relation to a through hole defined in the inner cup lid and a lost motion mechanism for moving the valve body to an open position thereof while the first and second cup lids remain closed and for opening the outer cup lid while the inner cup lid remains closed. After the workpiece has been coated with the coating solution, the valve body is lifted out of the through hole to smoothly eliminate a vacuum developed in the inner cup, and then the inner cup is opened.
摘要翻译：溶液施加装置具有各自具有上开口的内杯和外杯，内杯可旋转地设置在外杯中。内杯容纳有诸如抗蚀剂溶液等涂布溶液的平面状的工件，例如玻璃基板。溶液施加装置还具有盖组件，其具有用于封闭外杯的上开口的外杯盖和用于封闭内杯的上开口的内杯盖，内杯盖可相对于外杯旋转盖。内杯具有限定在其外圆周部分中的排水孔，用于提供内杯内的空间和内杯外部的空间之间的连通，以从内杯排出过量的涂层溶液。外杯具有沿着内杯的外圆周部分限定在其中的环形收集通道，排出孔通向环形收集通道。盖组件包括自定心阀体，其可以垂直移动进入和离开与内杯盖中限定的通孔的紧密配合关系，以及用于将阀体移动到其打开位置的空动机构，而第一并且第二杯盖保持关闭并且在内杯盖保持关闭时打开外杯盖。在工件被涂布溶液之后，将阀体从通孔中提出，以平滑地消除在内杯中显影的真空，然后打开内杯。

3. 发明授权

US06214104B1 Coating solution for forming silica coating and method of forming silica coating 失效
标题翻译：用于形成二氧化硅涂层的涂层溶液和形成二氧化硅涂层的方法
公开(公告)号：US06214104B1
公开(公告)日：2001-04-10
申请号：US08692005
申请日：1996-08-02
申请人： Hiroyuki Iida , Hiroki Endo , Hideya Kobari , Yoshio Hagiwara , Toshimasa Nakayama
发明人： Hiroyuki Iida , Hiroki Endo , Hideya Kobari , Yoshio Hagiwara , Toshimasa Nakayama
IPC分类号： B05D712
CPC分类号： C09D4/00 , C08G77/04
摘要： A substrate onto which a coating solution is dropped is rotated at a low speed in a first rotational mode and then after an interval of time at a high speed in a second rotational mode. At the end of the first rotational mode, the coating solution is coated to a thickness larger than a given thickness on irregularities on the substrate such as twin patterns and a global pattern, with the coating solution being coated to a thickness smaller than the given thickness between the twin patterns. Subsequently, at the start of the second rotational mode, the coating solution coated on the twin patterns and the global pattern flows into spaces between these patterns. At the end of the second rotational mode, the thickness of the coating solution on the twin patterns is almost nil, and the thickness of the coating solution on the global pattern is small in its entirety though it is somewhat large in the central area of the global pattern.
摘要翻译：在第一旋转模式中以低速旋转涂布溶液滴落到其上的基板，然后在第二旋转模式中以高速度在一段时间之后旋转。在第一旋转模式结束时，将涂布溶液涂覆到基板上的不规则部分上的厚度大于给定厚度，例如双图案和全局图案，涂布溶液的涂布厚度小于给定厚度在双胞胎之间。随后，在第二旋转模式开始时，涂覆在双模式上的涂布溶液和全局图案流入这些图案之间的空间。在第二旋转模式结束时，两个图案上的涂布溶液的厚度几乎为零，并且全局图案上的涂布溶液的厚度整体上小，但是其中心区域全球格局。

4. 发明授权

US5707687A Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus 失效
标题翻译：旋转杯式涂布装置以及用这种旋转杯式涂布装置涂覆物体的方法
公开(公告)号：US5707687A
公开(公告)日：1998-01-13
申请号：US637357
申请日：1996-04-24
申请人： Koji Ueda , Hiroki Endo , Hidenori Miyamoto
发明人： Koji Ueda , Hiroki Endo , Hidenori Miyamoto
IPC分类号： B05D1/40 , B05C11/08 , G03F7/16 , H01L21/00 , H01L21/027 , B05D3/12 , B05C11/02 , B05D1/18
CPC分类号： H01L21/6715 , B05C11/08 , G03F7/162
摘要： A suction chuck and an inner cup are rotated in unison with each other to spread a coating solution uniformly over a planar object in the inner cup under centrifugal forces. Vent holes defined in an outer cup lid which closes an outer cup are held out of communication with vent holes defined in a ring-shaped closure member, so that the interior space in the outer cup is kept out of communication with the exterior space around the outer cup. The concentration of a solvent in the outer cup remains so high that no mist is produced in the outer cup. After the planar object has been coated and before the outer cup lid is opened, the ring-shaped closure member is turned to align the vent holes in the outer cup lid with the vent holes in the ring-shaped closure member, breaking any vacuum in the outer cup with ambient air introduced through the vent holes into the outer cup. Thereafter, the outer and inner cup lids are opened, and the coated planar object is taken out.
摘要翻译：吸盘和内杯彼此一致地旋转，以在离心力下在内杯中的平面物体上均匀地涂覆涂布溶液。限定在封闭外杯的外杯盖中的排气孔与环形封闭构件中限定的通气孔保持不连通，使得外杯中的内部空间与外围空间相连接外杯。外杯中的溶剂的浓度保持如此高，使得外杯中不产生雾。在平面物体被涂覆之后并且在外杯盖打开之前，环形封闭构件被转动以使外杯盖中的通气孔与环形封闭构件中的通气孔对齐，从而破坏具有环境空气的外杯通过通气孔引入外杯中。此后，打开外杯盖和内杯盖，并取出涂覆的平面物体。

5. 发明授权

US5879457A Rotating cup coating device 失效
标题翻译：旋转杯涂装置
公开(公告)号：US5879457A
公开(公告)日：1999-03-09
申请号：US783988
申请日：1997-01-14
申请人： Tsutomu Sahoda , Koji Ueda , Hiroki Endo , Hidenori Miyamoto
发明人： Tsutomu Sahoda , Koji Ueda , Hiroki Endo , Hidenori Miyamoto
IPC分类号： B05C11/08 , G03F7/16 , H01L21/00 , H01L21/027 , B05C5/00 , B05C13/00
CPC分类号： H01L21/6715 , B05C11/08
摘要： A rotating cup type liquid coating device with structure for suppressing pulsatory movement of the coated liquid when stopping rotation of the inner cup 3, includes a buffer space S formed for connecting an inner space of the inner cup 3 and an inner space of an outer cup 2 surrounding the inner cup, on an outer periphery of the inner cup 3 , through respective throttle portions 16, 17.
摘要翻译：具有用于在停止内杯3的旋转时抑制被涂液体的脉动运动的结构的旋转杯式液体涂布装置包括形成为用于连接内杯3的内部空间和外杯的内部空间的缓冲空间S 2通过相应的节流部分16,17围绕内杯3在内杯3的外周上。

6. 发明授权

US09623860B2 Hybrid vehicle and control method therefor 有权
公开(公告)号：US09623860B2
公开(公告)日：2017-04-18
申请号：US14782851
申请日：2014-04-04
申请人： Kazuma Aoki , Koji Hokoi , Hiroki Endo
发明人： Kazuma Aoki , Koji Hokoi , Hiroki Endo
IPC分类号： B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , B60W50/08 , F01N9/00 , G05B15/02 , B60W20/16
CPC分类号： B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , B60W20/13 , B60W20/16 , B60W50/082 , B60W2510/244 , B60W2540/04 , B60W2550/00 , B60W2550/402 , B60W2710/0677 , B60W2710/0694 , B60W2710/087 , B60W2710/244 , B60Y2300/474 , F01N9/00 , F01N2590/11 , F01N2900/08 , G05B15/02 , Y02T10/47 , Y10S903/93
摘要： A hybrid vehicle includes an input device that is used by a user to request an increase in the amount of charge of the power storage device. When a request for increasing the amount of charge is made using the input device, a control device controls charging of a power storage device by a generating device so that charging of the power storage device is promoted, warms a catalyst device by operating an internal combustion engine while limiting the output of the internal combustion engine, and when the warming of the catalyst device and the request for increasing the amount of charge that is made using the input device overlap each other, the control device eases the output limitation of the internal combustion engine.

7. 发明申请

US20140180517A1 HYBRID VEHICLE AND CONTROL METHOD THEREFOR 有权
标题翻译：混合动力车辆及其控制方法
公开(公告)号：US20140180517A1
公开(公告)日：2014-06-26
申请号：US14138227
申请日：2013-12-23
申请人： Hiroki Endo
发明人： Hiroki Endo
IPC分类号： B60W20/00 , B60W10/08 , B60W10/26 , B60W10/06
CPC分类号： B60W20/1062 , B60K6/445 , B60W10/06 , B60W10/08 , B60W10/26 , B60W20/14 , B60W2510/085 , B60W2710/0644 , Y02T10/6239 , Y02T10/6286 , Y02T10/7258 , Y10S903/93
摘要： A hybrid vehicle includes a controller that executes control such that a second motor is regeneratively driven within the range of input and output limits of a high-voltage battery that exchanges electric power with the second motor that outputs power for traveling without running an engine using a first motor when charging electric power is smaller than the input limit of the high-voltage battery and an EV traveling priority mode is set. The invention also relates to a control method for the hybrid vehicle.
摘要翻译：混合动力车辆包括执行控制的控制器，使得第二电动机在与不使用发动机运行的情况下输出动力的第二电动机交换电力的高压电池的输入和输出限制的范围内再生驱动第一电动机在充电电力小于高电压电池的输入极限时，设定EV行驶优先模式。本发明还涉及一种混合动力车辆的控制方法。

8. 发明申请

US20130041543A1 CONTROL DEVICE FOR HYBRID VEHICLE, AND HYBRID VEHICLE INCORPORATING CONTROL DEVICE 有权
标题翻译：混合动力车辆控制装置和混合动力车辆控制装置
公开(公告)号：US20130041543A1
公开(公告)日：2013-02-14
申请号：US13643941
申请日：2011-04-19
申请人： Hiroyuki Takayanagi , Hiroki Endo , Masaya Yamamoto
发明人： Hiroyuki Takayanagi , Hiroki Endo , Masaya Yamamoto
IPC分类号： B60W20/00
CPC分类号： B60W20/10 , B60K6/445 , B60L7/14 , B60L11/123 , B60L11/14 , B60L11/1816 , B60L11/1859 , B60L11/1862 , B60L11/1877 , B60L2210/30 , B60L2240/12 , B60L2240/423 , B60L2240/443 , B60L2240/461 , B60L2240/545 , B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , B60W2710/086 , F02D29/02 , Y02T10/6217 , Y02T10/6239 , Y02T10/6286 , Y02T10/642 , Y02T10/7005 , Y02T10/7044 , Y02T10/705 , Y02T10/7072 , Y02T10/7077 , Y02T10/7088 , Y02T10/7241 , Y02T90/121 , Y02T90/127 , Y02T90/14
摘要： A Wout control unit increases a discharge allowable power to W1 greater than W0 when the running mode is at a CD mode and an engine is stopped. An engine operation determination unit determines whether the engine is to be set at load operation or not based on W0 when the running mode is at the CS mode, and based on W1 when the running mode is at the CD mode. In the case where the engine is at no-load operation, the engine operation determination unit determines whether the engine is to be set at load operation or not based on W0 even if the running mode is at the CD mode.
摘要翻译：当运行模式处于CD模式并且发动机停止时，Wout控制单元将放电容许功率增加到大于W0的W1。当运行模式处于CS模式时，发动机运转判定单元基于W0，当运行模式处于CD模式时，基于W1来判定是否将发动机设定为负载运转。在发动机为空载动作的情况下，即使运行模式为CD模式，发动机运转判定部也基于W0判定是否将发动机设定为负载运转。

9. 发明申请

US20130030634A1 CONTROL DEVICE FOR HYBRID VEHICLE, AND HYBRID VEHICLE INCORPORATING CONTROL DEVICE 有权
标题翻译：混合动力车辆控制装置和混合动力车辆控制装置
公开(公告)号：US20130030634A1
公开(公告)日：2013-01-31
申请号：US13639635
申请日：2010-04-07
申请人： Hiroki Endo , Masaya Yamamoto
发明人： Hiroki Endo , Masaya Yamamoto
IPC分类号： B60W20/00 , B60L9/00 , B60W10/08 , B60W10/26 , B60K6/442 , B60W10/06
CPC分类号： B60W20/13 , B60K6/445 , B60K6/46 , B60L11/02 , B60L2240/441 , B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , B60W50/082 , B60W2510/0638 , B60W2510/244 , B60W2710/06 , B60W2710/086 , B60Y2200/92 , B60Y2300/182 , B60Y2300/43 , B60Y2300/60 , B60Y2300/91 , F02N11/0818 , Y02T10/48 , Y02T10/6217 , Y02T10/6239 , Y02T10/6269 , Y02T10/6286 , Y10S903/93
摘要： An ECU includes a running mode control unit, a Wout control unit, and an engine start/stop determination unit. The running mode control unit controls switching of a running mode including a CD mode in which an engine is stopped and running using a motor generator alone is given priority, and a CS mode in which the engine is operated and the SOC of a power storage device is maintained at a predetermined target. The engine start/stop determination unit carries out a start determination of the engine based on a discharge allowable power indicating electric power that can be discharged by the power storage device. The Wout control unit modifies the discharge allowable power based on the running mode and operation/stop of the engine.
摘要翻译： ECU包括行驶模式控制单元，Wout控制单元和发动机起动/停止确定单元。运行模式控制单元控制包括使用电动发电机单独发动机停止和运行的CD模式的运行模式的切换优先，以及发动机运转的CS模式和蓄电装置的SOC 维持在预定目标。发动机起动/停止判定单元基于能够由蓄电装置进行放电的表示电力的排出容许电力进行发动机的开始判定。出水口控制单元根据运行模式和发动机的运行/停止来修改排气容许功率。

10. 发明申请

US20120323427A1 VEHICLE CONTROL APPARATUS AND VEHICLE CONTROL METHOD 审中-公开
标题翻译：车辆控制装置和车辆控制方法
公开(公告)号：US20120323427A1
公开(公告)日：2012-12-20
申请号：US13581422
申请日：2010-03-30
申请人： Hiroki Endo , Masaya Yamamoto
发明人： Hiroki Endo , Masaya Yamamoto
IPC分类号： B60W10/26 , B60W20/00
CPC分类号： B60W20/50 , B60K6/445 , B60W10/06 , B60W10/08 , B60W20/00 , B60W30/184 , B60W2510/246 , Y02T10/6239 , Y02T10/6269 , Y02T10/6286
摘要： An ECU executes a program including the steps of: executing first restriction control if the temperature of coolant is equal to or greater than a first temperature and smaller than a second temperature; executing second restriction control if the temperature of the coolant is equal to or greater than the second temperature; and executing normal control if the temperature of the coolant is smaller than the first temperature.
摘要翻译： ECU执行程序，包括以下步骤：如果冷却剂的温度等于或大于第一温度且小于第二温度，则执行第一限制控制; 如果冷却剂的温度等于或大于第二温度则执行第二限制控制; 并且如果冷却剂的温度小于第一温度，则执行正常控制。

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