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1. 发明授权

US09195069B2 Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：照明光学装置，曝光装置和装置的制造方法
公开(公告)号：US09195069B2
公开(公告)日：2015-11-24
申请号：US11783561
申请日：2007-04-10
申请人： Hirohisa Tanaka , Hideki Komatsuda
发明人： Hirohisa Tanaka , Hideki Komatsuda
IPC分类号： G03B27/54 , G03B27/44 , G03B27/72 , G03B27/32 , G02B27/09 , G03F7/20 , G03B27/68 , G03B27/42 , G03B27/52
CPC分类号： G02B27/0905 , G02B27/0961 , G02B27/0972 , G03F7/70108 , G03F7/70208 , G03F7/70275 , G03F7/70283
摘要： An illumination optical apparatus has a beam splitting member which splits an incident beam into a first light beam and a second light beam to form a first illumination region and a second illumination region, a first light-guide optical system which guides the first light beam to the first illumination region, and a second light-guide optical system which guides the second light beam to the second illumination region locate apart from the first illumination region.
摘要翻译：照明光学装置具有：分束构件，其将入射光束分成第一光束和第二光束，以形成第一照明区域和第二照明区域;第一导光光学系统，其将第一光束引导到第一照明区域和将第二光束引导到第二照明区域的第二导光光学系统与第一照明区域分离。

2. 发明申请

US20070258077A1 Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：照明光学装置，曝光装置和装置的制造方法
公开(公告)号：US20070258077A1
公开(公告)日：2007-11-08
申请号：US11783561
申请日：2007-04-10
申请人： Hirohisa Tanaka , Hideki Komatsuda
发明人： Hirohisa Tanaka , Hideki Komatsuda
IPC分类号： G03B27/54
CPC分类号： G02B27/0905 , G02B27/0961 , G02B27/0972 , G03F7/70108 , G03F7/70208 , G03F7/70275 , G03F7/70283
摘要： An illumination optical apparatus has a beam splitting member which splits an incident beam into a first light beam and a second light beam to form a first illumination region and a second illumination region, a first light-guide optical system which guides the first light beam to the first illumination region, and a second light-guide optical system which guides the second light beam to the second illumination region locate apart from the first illumination region.
摘要翻译：照明光学装置具有：分束构件，其将入射光束分成第一光束和第二光束，以形成第一照明区域和第二照明区域;第一导光光学系统，其将第一光束引导到第一照明区域和将第二光束引导到第二照明区域的第二导光光学系统与第一照明区域分离。

3. 发明授权

US10522843B1 Supported Ni-M materials for electrooxidation of hydrazine 有权
公开(公告)号：US10522843B1
公开(公告)日：2019-12-31
申请号：US15423763
申请日：2017-02-03
申请人： Alexey Serov , Plamen B Atanassov , Tomokazu Sakamoto , Hirohisa Tanaka , Koichiro Asazawa
发明人： Alexey Serov , Plamen B Atanassov , Tomokazu Sakamoto , Hirohisa Tanaka , Koichiro Asazawa
IPC分类号： H01M4/90 , H01M8/22
摘要： A supported bi-metallic non-platinum catalyst that is capable of oxidizing hydrazine to produce, as by-products of energy production, nitrogen, water, and zero or near-zero levels of ammonia is described. The catalyst is suitable for use in fuel cells, particularly those that utilizes an anion-exchange membrane and a liquid fuel such as hydrazine.

4. 发明授权

US08993475B2 Oxygen storage material 有权
标题翻译：储氧材料
公开(公告)号：US08993475B2
公开(公告)日：2015-03-31
申请号：US12307571
申请日：2007-06-22
申请人： Mareo Kimura , Keiichi Narita , Akimasa Hirai , Akiya Chiba , Naoto Miyoshi , Kazunobu Ishibashi , Takaaki Kanazawa , Takeru Yoshida , Hirohisa Tanaka , Mari Uenishi , Isao Tan , Masashi Taniguchi
发明人： Mareo Kimura , Keiichi Narita , Akimasa Hirai , Akiya Chiba , Naoto Miyoshi , Kazunobu Ishibashi , Takaaki Kanazawa , Takeru Yoshida , Hirohisa Tanaka , Mari Uenishi , Isao Tan , Masashi Taniguchi
IPC分类号： B01J23/10 , B01D53/94 , C01G25/02 , B01D53/02 , B01J23/00 , B01J23/63
CPC分类号： C01G25/02 , B01D53/02 , B01D2253/112 , B01D2255/407 , B01D2256/12 , B01D2259/4525 , B01J23/002 , B01J23/63 , B01J2523/00 , C01P2002/72 , C01P2002/85 , C01P2004/82 , C01P2006/12 , Y10S502/526 , B01J2523/25 , B01J2523/3712 , B01J2523/48 , B01J2523/36
摘要： An excellent oxygen storage capacity is achieved even in the case used for a long period of time under high temperature conditions. An oxygen storage material contains a first particle made of a composite oxide of cerium and zirconium or a composite oxide of cerium, a rare-earth element other than cerium and zirconium, a second particle including a composite oxide of a rare-earth element, an alkaline-earth element and zirconium, and a precious metal. A part of the precious metal forms a solid solution with the composite oxide included in the second particle.
摘要翻译：即使在高温条件下长时间使用的情况下也能实现极好的储氧能力。储氧材料包含由铈和锆的复合氧化物制成的第一颗粒或铈，铈和锆以外的稀土元素的复合氧化物，包含稀土元素的复合氧化物的第二颗粒，碱土元素和锆，以及贵金属。贵金属的一部分与第二颗粒中包含的复合氧化物形成固溶体。

5. 发明授权

US08947635B2 Illumination optical system, exposure apparatus, and device manufacturing method 有权
标题翻译：照明光学系统，曝光装置和装置制造方法
公开(公告)号：US08947635B2
公开(公告)日：2015-02-03
申请号：US13168068
申请日：2011-06-24
申请人： Hirohisa Tanaka , Yasushi Mizuno
发明人： Hirohisa Tanaka , Yasushi Mizuno
IPC分类号： G03B27/72 , G02B27/09 , G03F7/20
CPC分类号： G02B27/0966 , G03F7/70091 , G03F7/70191
摘要： According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.
摘要翻译：根据一个实施例，照明光学系统设置有光学积分器，其在照明光学系统的照明光路中在照明光瞳平面上形成预定的光强度分布，其中光源装置的曝光光入射到照明光学系统中; 相对于光积分器布置在光罩侧的透射滤光器和在照明光学系统的光轴方向上包括照明光瞳面的第一调整区域，并且具有根据曝光位置而变化的透射率特性光线事件以及在第一调整区域中沿着光轴方向移动发送滤波器的移动机构。

6. 发明授权

US08945791B2 Oxygen side electrode for a fuel cell 有权
标题翻译：燃料电池用氧侧电极
公开(公告)号：US08945791B2
公开(公告)日：2015-02-03
申请号：US13636606
申请日：2011-03-23
申请人： Koichiro Asazawa , Koji Yamada , Hirohisa Tanaka , Kazuya Yamamoto , Tim Olson , Svitlana Pylypenko , Plamen Atanassov
发明人： Koichiro Asazawa , Koji Yamada , Hirohisa Tanaka , Kazuya Yamamoto , Tim Olson , Svitlana Pylypenko , Plamen Atanassov
IPC分类号： H01M8/10 , H01M4/90 , H01M4/88 , H01M4/86
CPC分类号： H01M4/8605 , H01M4/8828 , H01M4/9008 , H01M4/9083 , H01M8/1011 , H01M2004/8689 , H01M2250/20 , Y02E60/523 , Y02T90/32
摘要： In a fuel cell including an electrolyte layer allowing an anion component to migrate, and a fuel-side electrode and an oxygen-side electrode arranged to face each other while sandwiching the electrolyte layer, the oxygen-side electrode contains a first catalyst containing a first transition metal and polypyrrole, and a second catalyst containing a second transition metal and a porphyrin ring-containing compound so that the mixing ratio of the first catalyst relative to 100 parts by mass of the total amount of the first catalyst and the second catalyst is more than 10 parts by mass, and below 90 parts by mass.
摘要翻译：在包含允许阴离子成分迁移的电解质层的燃料电池中，并且在夹着电解质层的同时配置为彼此面对的燃料侧电极和氧气侧电极，所述氧气侧电极含有含有第一催化剂的第一催化剂，过渡金属和聚吡咯，以及含有第二过渡金属和含卟啉环的化合物的第二催化剂，使得第一催化剂与第一催化剂和第二催化剂的总量相对于100质量份的混合比更多 10质量份以下，90质量份以下。

7. 发明授权

US08300213B2 Illumination optics apparatus, exposure method, exposure apparatus, and method of manufacturing electronic device 有权
标题翻译：照明光学装置，曝光方法，曝光装置和制造电子装置的方法
公开(公告)号：US08300213B2
公开(公告)日：2012-10-30
申请号：US12287497
申请日：2008-10-08
申请人： Hirohisa Tanaka
发明人： Hirohisa Tanaka
IPC分类号： G03B27/72 , G03B27/54
CPC分类号： G03F7/70141 , F21V9/14 , G03F7/70566
摘要： An illumination optical apparatus which constantly controls a plurality of polarization states with high accuracy. An illumination optical system, which illuminates a pattern surface of a mask with illumination light, includes a polarization optical system and a depolarizer. The polarization optical system includes a half wavelength plate and PBS, which varies a polarization state of the illumination light to form a linear polarization state having a predetermined polarization direction. The depolarizer is arranged toward the mask from the polarization optical system and varies the polarization state of the illumination light emitted from the polarization optical system.
摘要翻译：一种以高精度恒定地控制多个偏振状态的照明光学装置。利用照明光照射掩模的图案表面的照明光学系统包括偏振光学系统和去偏振器。偏振光学系统包括半波长板和PBS，其改变照明光的偏振状态以形成具有预定偏振方向的线偏振状态。偏振器从偏振光学系统朝向掩模布置，并且改变从偏振光学系统发射的照明光的偏振状态。

8. 发明授权

US08094290B2 Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：照明光学装置，曝光装置和装置的制造方法
公开(公告)号：US08094290B2
公开(公告)日：2012-01-10
申请号：US12266321
申请日：2008-11-06
申请人： Soichi Owa , Osamu Tanitsu , Hirohisa Tanaka
发明人： Soichi Owa , Osamu Tanitsu , Hirohisa Tanaka
IPC分类号： G03B27/54 , G03B27/72 , G03B27/32
CPC分类号： G02B27/0905 , G02B26/0833 , G02B27/0927 , G03F7/70075 , G03F7/70116 , G03F7/70583 , Y10T29/49826
摘要： An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.
摘要翻译：具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响，同时保持以脉冲发射的照明光的高使用效率。照明光学系统用脉冲发射的照明光照射被照射的平面，并且包括空间光调制器，其包括多个反射镜元件，每个反射镜元件根据照明光的入射位置对照明光进行空间调制。每当发射照明光的至少一个脉冲时，调制控制单元控制镜元件，使得光学元件彼此空间地调制照明光的脉冲，并且形成基本相同的强度分布，用于脉冲的在预定平面上的照明光。

9. 发明申请

US20100221643A1 FUEL CELL SYSTEM 有权
标题翻译：燃油电池系统
公开(公告)号：US20100221643A1
公开(公告)日：2010-09-02
申请号：US12733446
申请日：2008-09-04
申请人： Koichiro Asazawa , Kohi Yamada , Hirohisa Tanaka
发明人： Koichiro Asazawa , Kohi Yamada , Hirohisa Tanaka
IPC分类号： H01M8/04
CPC分类号： H01M8/222 , H01M8/04194 , H01M8/04201 , H01M8/04208 , H01M8/0444 , H01M8/04798 , H01M2250/20 , Y02E60/50 , Y02T90/32
摘要： A fuel cell system of the present invention includes a fixing unit that fixes or releases hydrazine, a fuel cell to which hydrazine released in the fixing unit is supplied as fuel, a supply line for supplying an aqueous hydrazine solution from a hydrazine supply source to the fixing unit, a drain line for draining drained water from the fixing unit, a first sensing unit for detecting a hydrazine concentration in an aqueous hydrazine solution flowing in the supply line, a second sensing unit for detecting a hydrazine concentration in drained water flowing in the drain line, and a detection unit that detects the amount of hydrazine fixed in the fixing unit based on the concentration values detected by the first sensing unit and the second sensing unit.
摘要翻译：本发明的燃料电池系统包括固定或释放肼的固定单元，将作为燃料供给到定影单元中的肼释放的燃料电池，用于从肼供给源供应肼水溶液的供给管线，定影单元，用于从定影单元排出排出的水的排水管，用于检测在供应管线中流动的肼水溶液中的肼浓度的第一感测单元，用于检测在该供液管中流动的排水中的肼浓度的第二感测单元以及检测单元，其基于由第一感测单元和第二感测单元检测的浓度值来检测固定在定影单元中的肼的量。

10. 发明申请

US20100204039A1 Exhaust Gas-Purifying Catalyst 有权
标题翻译：废气净化催化剂
公开(公告)号：US20100204039A1
公开(公告)日：2010-08-12
申请号：US12765693
申请日：2010-04-22
申请人： Satoshi MATSUEDA , Mareo Kimura , Hiroto Yoshida , Keiichi Narita , Hirohisa Tanaka , Mari Uenishi , Masashi Taniguchi
发明人： Satoshi MATSUEDA , Mareo Kimura , Hiroto Yoshida , Keiichi Narita , Hirohisa Tanaka , Mari Uenishi , Masashi Taniguchi
IPC分类号： B01J23/745 , B01J21/04 , B01J23/10 , B01J23/02 , B01J23/04 , B01J23/44
CPC分类号： B01J23/78 , B01J23/002 , B01J23/005 , B01J23/8892 , B01J2523/00 , B01J2523/31 , B01J2523/72 , B01J2523/845 , B01J2523/842 , B01J2523/24 , B01J2523/847 , B01J2523/22
摘要： The exhaust gas-purifying catalyst includes at least one of a first composite oxide represented by a formula A(Al2-xBx)O4 and a second composite oxide represented by a formula (Al2-yCy)O3, wherein element A is a divalent transition metal other than platinum-group elements, each of elements B and C is a transition metal other than platinum-group elements, x satisfies 0
摘要翻译：废气净化催化剂包括由式A（Al 2-x B x）O 4表示的第一复合氧化物和由式（Al2-yCy）O3表示的第二复合氧化物中的至少一种，其中元素A是二价过渡金属除了铂族元素之外，元素B和C都是铂族元素以外的过渡金属，x满足0

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