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    • 3. 发明授权
    • Semiconductor device optimized to increase withstand voltage and reduce on resistance
    • 半导体器件经过优化,可提高耐压并降低导通电阻
    • US08022475B2
    • 2011-09-20
    • US12434128
    • 2009-05-01
    • Yasuhiro TakedaSeiji OtakeKazunori Fujita
    • Yasuhiro TakedaSeiji OtakeKazunori Fujita
    • H01L29/76H01L29/94
    • H01L21/823456H01L21/2815H01L21/823412H01L21/823487H01L29/0653H01L29/0878H01L29/41766H01L29/4236H01L29/42376H01L29/66734H01L29/7809H01L29/7813
    • An ON resistance of a trench gate type transistor and a withstand voltage of a planar type transistor are optimized at the same time. Each of first and second regions of a semiconductor layer is formed by epitaxial growth on each of first and second regions of a semiconductor substrate, respectively. A first buried layer is formed between the first region of the semiconductor substrate and the first region of the semiconductor layer, while a second buried layer is formed between the second region of the semiconductor substrate and the second region of the semiconductor layer. The first buried layer is formed of an N+ type first impurity-doped layer and an N type second impurity-doped layer that extends beyond the fist impurity-doped layer. The second buried layer is formed of an N+ type impurity-doped layer only. In the first region of the semiconductor layer, an impurity is diffused from a surface of the semiconductor layer deep into the semiconductor layer to form an N type third impurity-doped layer. The trench gate type transistor is formed in the first region of the semiconductor layer and the planar type transistor is formed in the second region of the semiconductor layer.
    • 同时优化沟槽栅型晶体管的导通电阻和平面型晶体管的耐电压。 半导体层的第一和第二区域中的每一个分别通过在半导体衬底的第一和第二区域中的每一个上外延生长而形成。 在半导体衬底的第一区域和半导体层的第一区域之间形成第一掩埋层,而在半导体衬底的第二区域和半导体层的第二区域之间形成第二掩埋层。 第一掩埋层由N +型第一杂质掺杂层和延伸超过第一杂质掺杂层的N型第二杂质掺杂层形成。 第二掩埋层仅由N +型杂质掺杂层形成。 在半导体层的第一区域中,杂质从半导体层的表面扩散到半导体层中以形成N型第三杂质掺杂层。 沟槽栅型晶体管形成在半导体层的第一区域中,并且平面型晶体管形成在半导体层的第二区域中。
    • 4. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20070272942A1
    • 2007-11-29
    • US11751162
    • 2007-05-21
    • Seiji Otake
    • Seiji Otake
    • H01L29/74
    • H01L29/8611H01L29/7412
    • In a semiconductor device of the present invention, an N type epitaxial layer is divided into a plurality of element formation regions by an isolation region. In one of the element formation regions, a resistance is formed. Around the resistance, a protection element having a PN junction region is formed. The PN junction region has a junction breakdown voltage lower than that of a PN junction region of the resistance. By use of this structure, when negative ESD surge is applied to a pad for an electrode which applies a voltage to a P type diffusion layer, the PN junction region of the protection element breaks down. Accordingly, the resistance can be protected.
    • 在本发明的半导体器件中,N型外延层通过隔离区域分成多个元件形成区域。 在元件形成区域之一中形成电阻。 围绕电阻,形成具有PN结区域的保护元件。 PN结区域的结击穿电压低于电阻的PN结区域的结击穿电压。 通过使用这种结构,当对用于向P型扩散层施加电压的电极的焊盘施加负的静电放电时,保护元件的PN结区域就会发生故障。 因此,可以保护电阻。
    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07291883B2
    • 2007-11-06
    • US11360286
    • 2006-02-22
    • Ryo KandaShuichi KikuchiSeiji Otake
    • Ryo KandaShuichi KikuchiSeiji Otake
    • H01L29/792
    • H01L29/7816H01L29/0878H01L29/1083H01L29/1087H01L29/42368H01L29/456H01L29/66681
    • In a conventional semiconductor device, there is a problem that an N-type diffusion region provided for protecting an element from an overvoltage is narrow and a breakdown current is concentrated so that a PN junction region for protection is broken. In a semiconductor device of the present invention, an N-type buried diffusion layer is formed across a substrate and an epitaxial layer. A P-type buried diffusion layer is formed across a wider region on an upper surface of the N-type buried diffusion layer so that a PN junction region for overvoltage protection is formed. A P-type diffusion layer is formed so as to be connected to the P-type diffusion layer. A breakdown voltage of the PN junction region is lower than a breakdown voltage between a source and a drain. With this structure, the concentration of the breakdown current is prevented so that the semiconductor device can be protected from the overvoltage.
    • 在传统的半导体器件中,存在用于保护元件免于过电压的N型扩散区域窄并且击穿电流被集中以使得用于保护的PN结区域被破坏的问题。 在本发明的半导体器件中,在衬底和外延层上形成N型掩埋扩散层。 在N型掩埋扩散层的上表面上的较宽区域上形成P型埋入扩散层,从而形成用于过电压保护的PN结区域。 P型扩散层形成为与P型扩散层连接。 PN结区域的击穿电压低于源极和漏极之间的击穿电压。 利用这种结构,防止了击穿电流的集中,从而可以防止半导体器件免受过电压。
    • 8. 发明申请
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US20070096261A1
    • 2007-05-03
    • US11512617
    • 2006-08-29
    • Seiji OtakeRyo KandaShuichi Kikuchi
    • Seiji OtakeRyo KandaShuichi Kikuchi
    • H01L29/861H01L31/107
    • H01L29/866H01L29/66106
    • In a conventional semiconductor device, there is a problem that zener diode characteristics vary due to a crystal defect on a silicon surface, and the like. In a semiconductor device of the present invention, an N type epitaxial layer 4 is formed on a P type single crystal silicon substrate 2. In the epitaxial layer 4, P type diffusion layers 5, 6, 7 and 8 as anode regions and an N type diffusion layer 9 as a cathode region are formed. A PN junction region between the P type diffusion layer 8 and the N type diffusion layer 9 forms a zener diode 1. By use of this structure, a current path is located in a deep portion of the epitaxial layer 4. Thus, it is made possible to prevent a variation in a saturation voltage of the zener diode 1 due to a crystal defect on a surface of the epitaxial layer 4, and the like.
    • 在传统的半导体器件中,存在齐纳二极管特性由于硅表面上的晶体缺陷等而变化的问题。 在本发明的半导体器件中,在P型单晶硅基板2上形成有N型外延层4.在外延层4中,作为阳极区域的P型扩散层5,6,7,8,N 形成作为阴极区域的扩散层9。 P型扩散层8和N型扩散层9之间的PN结区域形成齐纳二极管1.通过这种结构,电流路径位于外延层4的深部。因此, 可能防止由于外延层4的表面上的晶体缺陷导致的齐纳二极管1的饱和电压的变化等。