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1. 发明申请

US20110132734A1 ELECTRONIC DEVICE 有权
标题翻译：电子设备
公开(公告)号：US20110132734A1
公开(公告)日：2011-06-09
申请号：US12940303
申请日：2010-11-05
申请人： Tadashi NAKATANI , Hiroaki Inoue , Satoshi Ueda
发明人： Tadashi NAKATANI , Hiroaki Inoue , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01P1/12
摘要： An electronic device includes a substrate including an active layer, a signal electrode formed on a surface of the active layer, a first driving electrode that is formed on the surface of the active layer and is connected to a ground, and a second driving electrode including a first part that is formed on the surface of the active layer and a second part that is connected to the first part and is provided above the first driving electrode. The substrate is provided with a loop-like groove that penetrates through the active layer and encompasses the first part.
摘要翻译：一种电子器件包括：衬底，包括有源层，形成在有源层的表面上的信号电极，形成在有源层的表面上并连接到地的第一驱动电极;以及第二驱动电极，形成在有源层的表面上的第一部分和连接到第一部分并且设置在第一驱动电极上方的第二部分。衬底设置有穿过有源层并包围第一部分的环状沟槽。

2. 发明授权

US08293557B2 Manufacturing method of MEMS device, and substrate used therefor 失效
标题翻译： MEMS器件的制造方法及其使用的衬底
公开(公告)号：US08293557B2
公开(公告)日：2012-10-23
申请号：US13012104
申请日：2011-01-24
申请人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01L21/00
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate on which the cavity is formed and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface on which the thermally-oxidized film for the movable portion is formed; forming a sacrifice layer on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译：一种MEMS器件的制造方法，包括：准备具有形成有空腔的第一基板的基板和与形成有所述空腔的所述第一基板的一侧接合的第二基板，所述第二基板具有狭缝，在与空腔相对应的位置限定可移动部分，所述第二基板包括其面向所述第一基板的第一表面，所述第二基板具有在对应于所述可动部分的位置中选择性地形成在所述第一表面上的热氧化膜; 在形成有用于可动部分的热氧化膜的第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲层; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。

3. 发明申请

US20130022790A1 MANUFACTURING METHOD OF MEMS DEVICE, AND SUBSTRATE USED THEREFOR 审中-公开
标题翻译： MEMS器件的制造方法及其使用的衬底
公开(公告)号：US20130022790A1
公开(公告)日：2013-01-24
申请号：US13609703
申请日：2012-09-11
申请人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
IPC分类号： B32B3/30
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface; forming a sacrifice lager on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译：一种MEMS器件的制造方法，其特征在于，包括：准备具有形成有空腔的第一基板的基板和与所述第一基板的一侧接合的第二基板，所述第二基板包括用于限定所述第一基板的可动部的狭缝包括与第一基板相对的第一表面的第二基板设置有在与第一基板相对应的位置上选择性地形成在第一表面上的热氧化膜; 在与所述第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲物; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。

4. 发明授权

US08536963B2 Electronic device and method of manufacturing the same 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US08536963B2
公开(公告)日：2013-09-17
申请号：US12783124
申请日：2010-05-19
申请人： Tadashi Nakatani , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
发明人： Tadashi Nakatani , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , B81B7/007 , B81B2201/014 , H01L2224/16225 , H01L2924/1461 , H01L2924/16195 , H01L2924/19041 , H01L2924/30105
摘要： An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
摘要翻译：一种电子设备，包括基板，设置在基板上方的固定电极，设置成面向固定电极的可动电极，设置在基板上并围绕可动电极和固定电极的壁部;膜部件，被固定到壁部分并且密封包括可动电极和固定电极的空间，以及在可移动电极和固定电极之外还设置在基板上的壁部的内侧上的支撑部分电影会员从空间内。

5. 发明授权

US08519284B2 Electronic device 有权
标题翻译：电子设备
公开(公告)号：US08519284B2
公开(公告)日：2013-08-27
申请号：US12940303
申请日：2010-11-05
申请人： Tadashi Nakatani , Hiroaki Inoue , Satoshi Ueda
发明人： Tadashi Nakatani , Hiroaki Inoue , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01P1/12
摘要： An electronic device includes a substrate including an active layer, a signal electrode formed on a surface of the active layer, a first driving electrode that is formed on the surface of the active layer and is connected to a ground, and a second driving electrode including a first part that is formed on the surface of the active layer and a second part that is connected to the first part and is provided above the first driving electrode. The substrate is provided with a loop-like groove that penetrates through the active layer and encompasses the first part.
摘要翻译：一种电子器件包括：衬底，包括有源层，形成在有源层的表面上的信号电极，形成在有源层的表面上并连接到地的第一驱动电极;以及第二驱动电极，形成在有源层的表面上的第一部分和连接到第一部分并且设置在第一驱动电极上方的第二部分。衬底设置有穿过有源层并包围第一部分的环状沟槽。

6. 发明申请

US20100294633A1 ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US20100294633A1
公开(公告)日：2010-11-25
申请号：US12783124
申请日：2010-05-19
申请人： Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
发明人： Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , B81B7/007 , B81B2201/014 , H01L2224/16225 , H01L2924/1461 , H01L2924/16195 , H01L2924/19041 , H01L2924/30105
摘要： An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
摘要翻译：一种电子设备，包括基板，设置在基板上方的固定电极，设置成面向固定电极的可动电极，设置在基板上并围绕可动电极和固定电极的壁部;膜部件，被固定到壁部分并且密封包括可动电极和固定电极的空间，以及在可移动电极和固定电极之外还设置在基板上的壁部的内侧上的支撑部分电影会员从空间内。

7. 发明申请

US20110223702A1 MANUFACTURING METHOD OF MEMS DEVICE, AND SUBSTRATE USED THEREFOR 失效
标题翻译： MEMS器件的制造方法及其使用的衬底
公开(公告)号：US20110223702A1
公开(公告)日：2011-09-15
申请号：US13012104
申请日：2011-01-24
申请人： Hiroaki INOUE , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki INOUE , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01L21/02 , B32B3/30
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate on which the cavity is formed and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface on which the thermally-oxidized film for the movable portion is formed; forming a sacrifice layer on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译：一种MEMS器件的制造方法，包括：准备具有形成有空腔的第一基板的基板和与形成有所述空腔的所述第一基板的一侧接合的第二基板，所述第二基板具有狭缝，在与空腔相对应的位置限定可移动部分，所述第二基板包括其面向所述第一基板的第一表面，所述第二基板具有在对应于所述可动部分的位置中选择性地形成在所述第一表面上的热氧化膜; 在形成有用于可动部分的热氧化膜的第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲层; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。

8. 发明授权

US07307827B2 Variable capacitor and method of manufacturing variable capacitor 失效
标题翻译：可变电容器及制造可变电容器的方法
公开(公告)号：US07307827B2
公开(公告)日：2007-12-11
申请号：US11104453
申请日：2005-04-13
申请人： Takeaki Shimanouchi , Masahiko Imai , Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda
IPC分类号： H01G5/01 , H01G7/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译：第一可动电极是平坦的，但是第二可动电极变形为凸形。电介质层被放置在第二可动电极的相对表面上。通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力，确保两个电极之间的任意距离，并获得所需的静电电容。当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。

9. 发明申请

US20070080764A1 Switch 失效
标题翻译：开关
公开(公告)号：US20070080764A1
公开(公告)日：2007-04-12
申请号：US11544017
申请日：2006-10-06
申请人： Yu Yonezawa , Naoyuki Mishima , Tadashi Nakatani , Anh Nguyen , Satoshi Ueda
发明人： Yu Yonezawa , Naoyuki Mishima , Tadashi Nakatani , Anh Nguyen , Satoshi Ueda
IPC分类号： H01P1/10
CPC分类号： H01H9/40 , H01H1/0036 , H01H9/42 , H01H2001/0078
摘要： A switch includes a first member, one end of which being secured to a substrate, multiple first beam portions respectively having multiple first contact portions, one ends of the multiple beam portions being secured to the first member, multiple contact switch portions connected in parallel, the multiple first contact portions and multiple second contact portions being in a contact state or in a non-contact state in the multiple contact switch portions, and resistors arranged respectively between the multiple contact switch portions and a common connection point to which the multiple contact switch portions are coupled. When at least one of the multiple switch portions is in a contact state, one of the resistors corresponding to the at least one of the multiple switch portions in a contact state has a resistance value greater than another one of the resistors corresponding to at least one of the multiple contact switch portions that is in a non-contact state.
摘要翻译：开关包括第一构件，其一端固定到基板，分别具有多个第一接触部分的多个第一梁部分，多个梁部分的一端固定到第一构件，并联连接的多个接触开关部分，所述多个第一接触部分和多个第二接触部分在所述多个接触开关部分中处于接触状态或非接触状态，以及分别布置在所述多个接触开关部分和所述多个接触开关之间的公共连接点部分耦合。当多个开关部分中的至少一个处于接触状态时，与接触状态的多个开关部分中的至少一个相对应的电阻器中的一个具有大于对应于至少一个的电阻器中的另一个的电阻值处于非接触状态的多个接触开关部分。

10. 发明申请

US20060208611A1 Micro movable device and method of making the same using wet etching 有权
公开(公告)号：US20060208611A1
公开(公告)日：2006-09-21
申请号：US11376114
申请日：2006-03-16
申请人： Anh Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Anh Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01L41/00
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

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