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1. 发明申请

US20130022790A1 MANUFACTURING METHOD OF MEMS DEVICE, AND SUBSTRATE USED THEREFOR 审中-公开
标题翻译： MEMS器件的制造方法及其使用的衬底
公开(公告)号：US20130022790A1
公开(公告)日：2013-01-24
申请号：US13609703
申请日：2012-09-11
申请人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
IPC分类号： B32B3/30
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface; forming a sacrifice lager on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译：一种MEMS器件的制造方法，其特征在于，包括：准备具有形成有空腔的第一基板的基板和与所述第一基板的一侧接合的第二基板，所述第二基板包括用于限定所述第一基板的可动部的狭缝包括与第一基板相对的第一表面的第二基板设置有在与第一基板相对应的位置上选择性地形成在第一表面上的热氧化膜; 在与所述第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲物; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。

2. 发明授权

US08293557B2 Manufacturing method of MEMS device, and substrate used therefor 失效
标题翻译： MEMS器件的制造方法及其使用的衬底
公开(公告)号：US08293557B2
公开(公告)日：2012-10-23
申请号：US13012104
申请日：2011-01-24
申请人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01L21/00
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate on which the cavity is formed and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface on which the thermally-oxidized film for the movable portion is formed; forming a sacrifice layer on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译：一种MEMS器件的制造方法，包括：准备具有形成有空腔的第一基板的基板和与形成有所述空腔的所述第一基板的一侧接合的第二基板，所述第二基板具有狭缝，在与空腔相对应的位置限定可移动部分，所述第二基板包括其面向所述第一基板的第一表面，所述第二基板具有在对应于所述可动部分的位置中选择性地形成在所述第一表面上的热氧化膜; 在形成有用于可动部分的热氧化膜的第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲层; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。

3. 发明申请

US20110132734A1 ELECTRONIC DEVICE 有权
标题翻译：电子设备
公开(公告)号：US20110132734A1
公开(公告)日：2011-06-09
申请号：US12940303
申请日：2010-11-05
申请人： Tadashi NAKATANI , Hiroaki Inoue , Satoshi Ueda
发明人： Tadashi NAKATANI , Hiroaki Inoue , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01P1/12
摘要： An electronic device includes a substrate including an active layer, a signal electrode formed on a surface of the active layer, a first driving electrode that is formed on the surface of the active layer and is connected to a ground, and a second driving electrode including a first part that is formed on the surface of the active layer and a second part that is connected to the first part and is provided above the first driving electrode. The substrate is provided with a loop-like groove that penetrates through the active layer and encompasses the first part.
摘要翻译：一种电子器件包括：衬底，包括有源层，形成在有源层的表面上的信号电极，形成在有源层的表面上并连接到地的第一驱动电极;以及第二驱动电极，形成在有源层的表面上的第一部分和连接到第一部分并且设置在第一驱动电极上方的第二部分。衬底设置有穿过有源层并包围第一部分的环状沟槽。

4. 发明授权

US08536963B2 Electronic device and method of manufacturing the same 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US08536963B2
公开(公告)日：2013-09-17
申请号：US12783124
申请日：2010-05-19
申请人： Tadashi Nakatani , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
发明人： Tadashi Nakatani , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , B81B7/007 , B81B2201/014 , H01L2224/16225 , H01L2924/1461 , H01L2924/16195 , H01L2924/19041 , H01L2924/30105
摘要： An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
摘要翻译：一种电子设备，包括基板，设置在基板上方的固定电极，设置成面向固定电极的可动电极，设置在基板上并围绕可动电极和固定电极的壁部;膜部件，被固定到壁部分并且密封包括可动电极和固定电极的空间，以及在可移动电极和固定电极之外还设置在基板上的壁部的内侧上的支撑部分电影会员从空间内。

5. 发明授权

US08519284B2 Electronic device 有权
标题翻译：电子设备
公开(公告)号：US08519284B2
公开(公告)日：2013-08-27
申请号：US12940303
申请日：2010-11-05
申请人： Tadashi Nakatani , Hiroaki Inoue , Satoshi Ueda
发明人： Tadashi Nakatani , Hiroaki Inoue , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01P1/12
摘要： An electronic device includes a substrate including an active layer, a signal electrode formed on a surface of the active layer, a first driving electrode that is formed on the surface of the active layer and is connected to a ground, and a second driving electrode including a first part that is formed on the surface of the active layer and a second part that is connected to the first part and is provided above the first driving electrode. The substrate is provided with a loop-like groove that penetrates through the active layer and encompasses the first part.
摘要翻译：一种电子器件包括：衬底，包括有源层，形成在有源层的表面上的信号电极，形成在有源层的表面上并连接到地的第一驱动电极;以及第二驱动电极，形成在有源层的表面上的第一部分和连接到第一部分并且设置在第一驱动电极上方的第二部分。衬底设置有穿过有源层并包围第一部分的环状沟槽。

6. 发明申请

US20100294633A1 ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：电子设备及其制造方法
公开(公告)号：US20100294633A1
公开(公告)日：2010-11-25
申请号：US12783124
申请日：2010-05-19
申请人： Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
发明人： Tadashi NAKATANI , Hiroaki Inoue , Hitoshi Yamada , Satoshi Ueda
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , B81B7/007 , B81B2201/014 , H01L2224/16225 , H01L2924/1461 , H01L2924/16195 , H01L2924/19041 , H01L2924/30105
摘要： An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
摘要翻译：一种电子设备，包括基板，设置在基板上方的固定电极，设置成面向固定电极的可动电极，设置在基板上并围绕可动电极和固定电极的壁部;膜部件，被固定到壁部分并且密封包括可动电极和固定电极的空间，以及在可移动电极和固定电极之外还设置在基板上的壁部的内侧上的支撑部分电影会员从空间内。

7. 发明授权

US09553604B2 Information processing system, information compression device, information decompression device, information processing method, and program 有权
标题翻译：信息处理系统，信息压缩装置，信息解压装置，信息处理方法和程序
公开(公告)号：US09553604B2
公开(公告)日：2017-01-24
申请号：US13262181
申请日：2010-03-19
申请人： Hiroaki Inoue
发明人： Hiroaki Inoue
IPC分类号： H03M7/30 , G11C7/10 , H04L29/12 , G11C29/00
CPC分类号： H03M7/30 , G11C7/103 , G11C29/003 , H04L29/12311
摘要： In order to improve the compression rate for configuration information including address information and data information when transmitting or storing configuration information which includes addresses and data having differing characteristics, an information compression device is provided with a compressor which receives as input and compresses the configuration information provided with the addresses and data, and a compressed information storage module for storing the configuration information which is compressed, that is, compressed configuration information, as the information to be decompressed for the user, said compressor including an information separating module for separating the configuration information into address information and data information, an address compressor and data compressor which separately compress the separated address information and data information, and a compressed information outputting module for combining the compressed address information and data information and outputting the result as compressed configuration information.
摘要翻译：为了在发送或存储具有不同特征的地址和数据的配置信息的情况下提高包括地址信息和数据信息的配置信息的压缩率，信息压缩装置设置有作为输入接收并压缩提供的配置信息的压缩器具有地址和数据的压缩信息存储模块，以及用于将被压缩的配置信息（即，压缩配置信息）存储为要为用户解压缩的信息的压缩信息存储模块，所述压缩器包括用于分离配置信息的信息分离模块地址信息和数据信息，分离地压缩分离的地址信息和数据信息的地址压缩器和数据压缩器，以及压缩信息输出模块，用于将压缩的地址信息和数据信息并将结果作为压缩配置信息输出。

8. 发明授权

US09164905B2 Semiconductor integrated circuit device, method of controlling semiconductor integrated circuit device, and cache device 有权
标题翻译：半导体集成电路器件，半导体集成电路器件的控制方法及缓存器件
公开(公告)号：US09164905B2
公开(公告)日：2015-10-20
申请号：US13393814
申请日：2010-08-18
申请人： Hiroaki Inoue
发明人： Hiroaki Inoue
IPC分类号： G06F12/00 , G06F12/08
CPC分类号： G06F12/0802 , G06F2212/1028 , Y02D10/13
摘要： There are provided a semiconductor integrated circuit device, a method of controlling a semiconductor integrated circuit device, and a cache device capable of efficiently implementing power saving, wherein the cache device includes a low-voltage operation enabling cache (200), and a small-area cache (300) having a type different from that of the cache (200), the cache (200) and the cache (300) being independently supplied with source voltage; the cache (200) being operable at a voltage lower than the lower limit voltage at which the cache (300) is operable; a cache control unit (400) operating switchable controls between a first mode allowing only the cache (200) to operate, and a second mode allowing the cache (200) or the cache (300) to operate; and the cache (200) in the first mode operating to supply a voltage below the lower limit voltage at which the cache (300) is operable, while interrupting power supply to the cache (300).
摘要翻译：提供了一种半导体集成电路器件，一种半导体集成电路器件的控制方法和能够有效地实现功率节省的高速缓存器件，其中该高速缓存器件包括一个使能高速缓存（200）的低压工作，区域缓存（300）具有与高速缓存（200）不同的类型，高速缓存（200）和高速缓存（300）被独立地提供源电压; 高速缓存（200）可操作在低于高速缓存（300）可操作的下限电压的电压; 高速缓存控制单元（400）在允许仅高速缓存（200）操作的第一模式和允许高速缓存（200）或高速缓存（300）操作的第二模式之间操作可切换控制; 以及在所述第一模式下的所述高速缓存（200）工作以提供低于所述高速缓存（300）可操作的所述下限电压的电压，同时中断向所述高速缓存（300）的电力供应。

9. 发明授权

US09160361B2 Compressed data transceiver apparatus, data compressor device, compressed data receiver device and data compression method 有权
标题翻译：压缩数据收发设备，数据压缩设备，压缩数据接收设备和数据压缩方式
公开(公告)号：US09160361B2
公开(公告)日：2015-10-13
申请号：US13379271
申请日：2010-06-01
申请人： Hiroaki Inoue
发明人： Hiroaki Inoue
IPC分类号： H03M7/30
CPC分类号： H03M7/30 , H03M7/3086 , H03M7/6023
摘要： To provide a data compression method that can achieve a high data compression ratio and does not require a buffer circuit or only requires a buffer circuit having a small storage capacity at a receiving side. A data compressor device has an adjustment and compression tool operable to switch a plurality of code words having different code lengths and compress input data at a rate that does not exceed a predetermined receiving speed.
摘要翻译：为了提供可以实现高数据压缩比并且不需要缓冲电路或仅需要在接收侧具有小存储容量的缓冲电路的数据压缩方法。数据压缩装置具有可操作以切换具有不同代码长度的多个代码字的调整和压缩工具，并以不超过预定接收速度的速率压缩输入数据。

10. 发明授权

US09109344B2 Working machine 有权
标题翻译：工作机
公开(公告)号：US09109344B2
公开(公告)日：2015-08-18
申请号：US13321599
申请日：2010-05-19
申请人： Kouya Iizuka , Satoru Nishimura , Hiroshi Yoshida , Hiroaki Inoue
发明人： Kouya Iizuka , Satoru Nishimura , Hiroshi Yoshida , Hiroaki Inoue
IPC分类号： E02F9/22 , E02F9/20 , F15B11/17
CPC分类号： E02F9/2004 , E02F9/2228 , E02F9/2282 , E02F9/2285 , E02F9/2292 , F15B11/17 , F15B2211/324 , F15B2211/526
摘要： In the working machine, first and second pilot flow paths are directly or indirectly connected to a tank flow path (52). A first restrictor is disposed between the first pilot flow path and the tank flow path. A second restrictor is disposed between the second pilot flow path and the tank flow path. An actuator control unit is configured to control an actuator based on a hydraulic pressure detected by a first hydraulic pressure detector unit and that detected by a second hydraulic pressure detector unit sensor.
摘要翻译：在工作机器中，第一和第二先导流动路径直接或间接地连接到罐流动路径（52）。第一限流器设置在第一先导流路和箱流路之间。第二限流器设置在第二先导流路和罐流路之间。执行器控制单元被配置为基于由第一液压检测器单元检测到的液压并且由第二液压检测器单元传感器检测到的液压来控制致动器。

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