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1. 发明授权

US06265113B1 Stress adjustment method of X-ray mask 失效
标题翻译： X射线掩模的应力调整方法
公开(公告)号：US06265113B1
公开(公告)日：2001-07-24
申请号：US09116334
申请日：1998-07-16
申请人： Hideki Yabe , Kaeko Kitamura , Kenji Marumoto , Sunao Aya , Koji Kise
发明人： Hideki Yabe , Kaeko Kitamura , Kenji Marumoto , Sunao Aya , Koji Kise
IPC分类号： G03F900
CPC分类号： G03F1/22
摘要： An X-ray absorber is deposited on a membrane. A stress adjust step is applied so that the average film stress of the X-ray absorber is 0. After patterning the X-ray absorber, the position accuracy of the pattern is measured. Then, a stress adjust process is applied to the patterned X-ray mask. Accordingly, a stress adjustment method is used to acquire an X-ray mask that has no pattern position offset of the X-ray absorber.
摘要翻译：在膜上沉积X射线吸收剂。施加应力调整步骤，使得X射线吸收体的平均膜应力为0.在对X射线吸收体进行图案化之后，测量图案的位置精度。然后，对图案化的X射线掩模施加应力调整处理。因此，使用应力调整方法来获取没有X射线吸收体的图案位置偏移的X射线掩模。

2. 发明授权

US06212252B1 X-ray mask provided with an alignment mark and method of manufacturing the same 失效
标题翻译：具有对准标记的X射线掩模及其制造方法
公开(公告)号：US06212252B1
公开(公告)日：2001-04-03
申请号：US09177826
申请日：1998-10-23
申请人： Koji Kise , Hideki Yabe , Sunao Aya , Kaeko Kitamura , Kenji Marumoto , Shigeto Ami
发明人： Koji Kise , Hideki Yabe , Sunao Aya , Kaeko Kitamura , Kenji Marumoto , Shigeto Ami
IPC分类号： G21K500
CPC分类号： G03F1/22 , G03F1/42 , G03F9/7076
摘要： An X-ray mask which is provided with an alignment mark and a transfer circuit pattern having a high position accuracy can be manufactured through a simplified manufacturing process. A membrane allowing passage of X-rays is formed on a substrate. A X-ray absorber intercepting transmission of X-rays is formed on the membrane. The substrate includes a window exposing the membrane. The X-ray absorber includes a transfer circuit pattern and an alignment mark formed in a region not overlapping with the window in a plan view.
摘要翻译：可以通过简化的制造工艺制造具有对准标记的X射线掩模和具有高定位精度的传输电路图案。在基板上形成允许X射线通过的膜。在膜上形成截止X射线透射的X射线吸收器。衬底包括暴露膜的窗口。 X射线吸收体包括在平面图中形成在与窗不重叠的区域中的转印电路图案和对准标记。

3. 发明授权

US5834142A Method of manufacturing X-ray mask and heating apparatus 失效
公开(公告)号：US5834142A
公开(公告)日：1998-11-10
申请号：US738287
申请日：1996-10-25
申请人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
发明人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
IPC分类号： G03F1/22 , H01L21/027 , H01L21/324 , G03F9/00
CPC分类号： G03F1/22
摘要： The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.

4. 发明授权

US5677090A Method of making X-ray mask having reduced stress 失效
标题翻译：制造应力减小的X射线掩模的方法
公开(公告)号：US5677090A
公开(公告)日：1997-10-14
申请号：US604678
申请日：1996-02-21
申请人： Kenji Marumoto , Hideki Yabe , Sunao Aya , Koji Kise , Kei Sasaki
发明人： Kenji Marumoto , Hideki Yabe , Sunao Aya , Koji Kise , Kei Sasaki
IPC分类号： B81B3/00 , B81C1/00 , G03F1/22 , G03F9/00
CPC分类号： G03F1/22 , B81C1/00666 , B81C2201/0167 , B81C2201/0169
摘要： A method of making a X-ray mask including: a step of forming a X-ray absorber above a substrate; a step of controlling a stress of the X-ray absorber by a predetermined condition; and wherein the predetermined condition for controlling the stress of the X-ray absorber formed above the substrate is determined by a measured value of a stress of a X-ray absorber formed on a monitor substrate.
摘要翻译：一种制造X射线掩模的方法，包括：在衬底上形成X射线吸收体的步骤; 控制X射线吸收体的应力为预定条件的步骤; 并且其中用于控制形成在基板上方的X射线吸收体的应力的预定条件由形成在监视器基板上的X射线吸收体的应力的测量值确定。

5. 发明授权

US5953492A Method of manufacturing X-ray mask and heating apparatus 失效
标题翻译：制造X射线掩模和加热装置的方法
公开(公告)号：US5953492A
公开(公告)日：1999-09-14
申请号：US975112
申请日：1997-11-20
申请人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
发明人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
IPC分类号： G03F1/22 , H01L21/027 , H01L21/324 , G03F9/00 , H05B3/20
CPC分类号： G03F1/22
摘要： The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.
摘要翻译：根据本发明制造的X射线掩模可以解决尽管X射线吸收体中的平均薄膜应力可以为零，但X射线吸收体的薄膜应力不能为零的问题。测量在硅基板1上形成X射线吸收体4之后的X射线吸收体4上的薄膜应力分布，然后改变对热板8的加热器9a，9b，9c的电力输入以便将X射线吸收体4根据可以使整个X射线吸收体中的薄膜应力为零的规定的温度分布加热到温度。

6. 发明授权

US06190808B1 X-ray mask and method of manufacturing the same 失效
标题翻译： X射线掩模及其制造方法
公开(公告)号：US06190808B1
公开(公告)日：2001-02-20
申请号：US09271297
申请日：1999-03-17
申请人： Koji Kise , Sunao Aya , Takaaki Murakami
发明人： Koji Kise , Sunao Aya , Takaaki Murakami
IPC分类号： G03F900
CPC分类号： G03F1/78 , G03F1/22 , G03F7/2051 , G03F7/70383 , G03F7/707
摘要： An X-ray mask including a transfer pattern having high accuracy is obtained. In a method of manufacturing the X-ray mask, an X-ray absorber film preventing transmission of an X-ray is formed on a substrate. A resist film is formed on the X-ray absorber film. The substrate is placed on a movable member. Steps of moving the movable member and irradiating the resist film with an energy beam are repeated for carrying out a drawing step of drawing a pattern on the resist film. Between the step of placing the substrate on the movable member and the drawing step, a step of holding a mask member including the resist film, the X-ray absorber film and the substrate to be in a state substantially identical to thermal equilibrium in the drawing step is carried out.
摘要翻译：获得包括高精度的转印图案的X射线掩模。在制造X射线掩模的方法中，在基板上形成防止透射X射线的X射线吸收膜。在X射线吸收膜上形成抗蚀剂膜。将基板放置在可动构件上。重复移动可动件并用能量束照射抗蚀剂膜的步骤，以进行在抗蚀剂膜上绘制图案的拉伸步骤。在将基板放置在可移动部件上的步骤和拉伸步骤之间，将包括抗蚀剂膜，X射线吸收膜和基板的掩模部件保持在与图中的热平衡基本相同的状态的步骤一步进行。

7. 发明授权

US08148812B2 Thermal resistor, semiconductor device using the same, and electric device 有权
标题翻译：热电阻器，使用其的半导体器件，以及电子器件
公开(公告)号：US08148812B2
公开(公告)日：2012-04-03
申请号：US12303879
申请日：2007-05-10
申请人： Koji Kise
发明人： Koji Kise
IPC分类号： H01L23/10 , H01L23/043
CPC分类号： H05K7/2049 , H01L23/10 , H01L23/3733 , H01L2224/16227 , H01L2924/01079 , H01L2924/15747 , H01L2924/15787 , H01L2924/3011 , H05K7/20445 , H01L2924/00
摘要： A thermal resistor is a metal body having a contact surface to be partially in contact to form a void and is electrically conductive as a whole. The thermal body may be a layered body having a plurality of metal bodies layered so as to be partially in contact with one another to form a void between them, or a metal body having a plurality of convex and concave portions on the surface, or a metal body formed by a plurality of metal plates each having a plurality of creases and layered so that the creases of the adjacent metal plates intersect, or a layered metal body formed by metal plates each having elasticity in the thickness direction and having elasticity in the layered direction as a whole, or metal body having a film formed by a different metal. Also disclosed in a semiconductor device having the thermal resistor inserted between a heating semiconductor element and a case cover and between a heat spreader and the case cover. Also disclosed is an electric device using the device.
摘要翻译：热敏电阻器是金属体，其具有部分地接触以形成空隙的接触表面，并且整体上是导电的。热体可以是具有多个金属体的层叠体，以便部分地彼此接触以在它们之间形成空隙，或者在表面上具有多个凸部和凹部的金属体，或金属体由多个金属板形成，每个金属板具有多个折痕并且层叠以使得相邻的金属板的折痕相交，或者由厚度方向上具有弹性并且在层叠中具有弹性的金属板形成的层状金属体作为整体的方向，或具有由不同金属形成的膜的金属体。还在具有插入在加热半导体元件和壳体盖之间以及散热器和壳体盖之间的热电阻器的半导体器件中公开。还公开了使用该装置的电子装置。

8. 发明授权

US08094447B2 Display device having wind path plate 有权
标题翻译：具有风路板的显示装置
公开(公告)号：US08094447B2
公开(公告)日：2012-01-10
申请号：US11972333
申请日：2008-01-10
申请人： Koji Kise , Kazuhiro Ioki , Yoshimi Iwasaki , Hironobu Kawaguchi
发明人： Koji Kise , Kazuhiro Ioki , Yoshimi Iwasaki , Hironobu Kawaguchi
IPC分类号： H05K7/20 , F28F7/00 , H05K5/00 , F21V29/00
CPC分类号： G02F1/133603 , G02F2001/133628
摘要： A display device includes a substrate having light emitting elements for display on a front surface; a substrate supporting body having an opening in the center and positioned on the back surface side of the substrate to support a peripheral region of the substrate; a case body positioned on the back surface side of the substrate supporting body and covering a part of the center opening; a fan unit arranged in the case body; a wind path plate arranged between the fan unit and the back surface of the substrate and forming a wind path to pass airflow generated by driving the fan unit only on the back surface side of the substrate; and a power supply arranged in the case body and on the back surface of the wind path plate; and wherein the airflow impinges the wind path plate through the fan, thereafter passes through the wind path and is discharged to the outside from the back side of the wind path plate. According to the present invention, it is possible to cool down a substrate uniformly and efficiently in a display device using light emitting elements arranged on the substrate without raising cost or complicating the structure.
摘要翻译：显示装置包括具有用于在前表面上显示的发光元件的基板; 基板支撑体，其具有位于所述基板的所述背面侧的中心的开口，以支撑所述基板的周边区域; 壳体，其位于所述基板支撑体的背面侧并覆盖所述中心开口的一部分; 布置在所述壳体中的风扇单元; 风道板，布置在所述风扇单元和所述基板的所述背面之间，并且形成风路，以仅通过在所述基板的背面侧驱动所述风扇单元而产生的气流; 以及布置在所述壳体中和所述风路板的后表面上的电源; 并且其中所述气流冲击所述风路板通过所述风扇，然后通过所述风道并从所述风路板的后侧排出到外部。根据本发明，可以在使用布置在基板上的发光元件的显示装置中均匀且有效地冷却基板，而不会增加成本或使结构复杂化。

9. 发明授权

US09664452B2 Heat exchange element 有权
公开(公告)号：US09664452B2
公开(公告)日：2017-05-30
申请号：US14386614
申请日：2012-06-13
申请人： Masaru Takada , Hajime Sotokawa , Yuichi Ishimaru , Takanori Imai , Mitsuhiko Ohira , Hidemoto Arai , Makoto Fukaya , Fumiaki Baba , Koji Kise , Shinya Tokizaki , Yuichi Matsuo
发明人： Masaru Takada , Hajime Sotokawa , Yuichi Ishimaru , Takanori Imai , Mitsuhiko Ohira , Hidemoto Arai , Makoto Fukaya , Fumiaki Baba , Koji Kise , Shinya Tokizaki , Yuichi Matsuo
IPC分类号： F28F21/06 , F28D9/00 , F28F3/04 , F28D21/00 , F24F12/00
CPC分类号： F28D9/0062 , F24F12/006 , F28D9/0037 , F28D21/0015 , F28F3/048 , F28F21/065 , Y02B30/563
摘要： The present invention relates to a heat exchange element in which unit constituent members, each of which includes a partition member that has a heat-transfer property and a moisture permeability and a spacing member that holds the partition member with a predetermined spacing, are stacked and in which a primary air flow that passes along an upper surface side of the partition member and a secondary air flow that passes along an undersurface side of the partition member and crosses the primary air flow exchange heat and moisture through the partition member, wherein a detachment suppressing rib is provided on the opposite side of the spacing member when viewed from the partition member at a bonded portion between the partition member and the spacing member, and the partition member is sandwiched by the spacing member and the detachment suppressing rib.

10. 发明申请

US20120013427A1 TRANSFORMER 有权
标题翻译：变压器
公开(公告)号：US20120013427A1
公开(公告)日：2012-01-19
申请号：US13258658
申请日：2009-06-23
申请人： Toshihiro Noda , Koji Kise
发明人： Toshihiro Noda , Koji Kise
IPC分类号： H01F27/10
CPC分类号： B61C17/00 , H01F27/12 , Y02T30/10
摘要： A transformer includes a tank that is attached under a floor of a vehicle, the tank being for housing an iron core, a coil, and an insulating liquid, thereby immersing the iron core and the coil in the insulating liquid; and a cooling unit for air-cooling the insulating liquid that has flowed from tank and returning the insulating liquid to tank, the cooling unit including a plurality of pipes arranged to be spaced from one another such that a spacing in a region relatively closer to floor of the vehicle is greater than a spacing in a region relatively away from floor of the vehicle.
摘要翻译：变压器包括安装在车辆地板下方的箱体，该箱体用于容纳铁芯，线圈和绝缘液体，从而将铁芯和线圈浸入绝缘液体中; 以及冷却单元，用于对从罐中流出并将绝缘液体返回到罐的绝缘液体进行空气冷却，所述冷却单元包括布置成彼此间隔开的多个管，使得在相对更靠近地面的区域中的间隔的车辆大于相对远离车辆地板的区域中的间隔。

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