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1. 发明授权

US5356686A X-ray mask structure 失效
标题翻译： X光掩模结构
公开(公告)号：US5356686A
公开(公告)日：1994-10-18
申请号：US182513
申请日：1994-01-14
申请人： Hidehiko Fujioka , Takeshi Miyachi , Yasuaki Fukuda , Yuji Chiba , Nobutoshi Mizusawa , Takao Kariya , Shunichi Uzawa
发明人： Hidehiko Fujioka , Takeshi Miyachi , Yasuaki Fukuda , Yuji Chiba , Nobutoshi Mizusawa , Takao Kariya , Shunichi Uzawa
IPC分类号： G03F1/22 , G03F1/60 , G03F7/20 , H01L21/027 , H01L21/30 , G03F9/00 , G21K5/00
CPC分类号： G03F1/22 , G03F7/70866 , Y10T428/21 , Y10T428/24612 , Y10T428/24851
摘要： An X-ray mask structure includes a mask substrate having a pattern; a supporting frame for carrying and supporting the mask substrate; and an adhesive material for fixing the mask substrate to the supporting frame; wherein a stress releasing groove is formed in at least one of the mask substrate and the supporting frame.
摘要翻译： X射线掩模结构包括具有图案的掩模基板; 用于承载和支撑掩模基板的支撑框架; 以及用于将掩模基板固定到支撑框架的粘合材料; 其中在所述掩模基板和所述支撑框架中的至少一个中形成有应力释放槽。

2. 发明授权

US5641264A Substrate conveying device and method of controlling the same 失效
标题翻译：基板输送装置及其控制方法
公开(公告)号：US5641264A
公开(公告)日：1997-06-24
申请号：US996870
申请日：1992-12-21
申请人： Mitsutoshi Kuno , Hidehiko Fujioka , Nobutoshi Mizusawa , Yuji Chiba , Takao Kariya , Koji Uda , Shunichi Uzawa , Eigo Kawakami
发明人： Mitsutoshi Kuno , Hidehiko Fujioka , Nobutoshi Mizusawa , Yuji Chiba , Takao Kariya , Koji Uda , Shunichi Uzawa , Eigo Kawakami
IPC分类号： G03F7/20 , H01L21/687 , B65G65/00
CPC分类号： G03F7/70741 , H01L21/68707 , Y10S294/907
摘要： A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined force.
摘要翻译：一种控制输送装置的方法，所述输送装置具有用于夹持要输送的物品的夹持手和用于输送夹持手的输送机构，其中检测到通过被输送物品施加到抓握手的按压力，并且输送操作当按压力超过预定力时，输送机构停止。

3. 发明授权

US5026239A Mask cassette and mask cassette loading device 失效
标题翻译：面膜盒和面膜盒装载装置
公开(公告)号：US5026239A
公开(公告)日：1991-06-25
申请号：US402601
申请日：1989-09-05
申请人： Yuji Chiba , Hidehiko Fujioka , Nobutoshi Mizusawa , Takao Kariya , Isamu Shimoda
发明人： Yuji Chiba , Hidehiko Fujioka , Nobutoshi Mizusawa , Takao Kariya , Isamu Shimoda
IPC分类号： G03F7/20 , H01L21/677
CPC分类号： H01L21/67748 , G03F7/70741 , G03F7/70866 , H01L21/67751 , H01L21/67778 , Y10S414/137
摘要： A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern of the mask on the wafer, are disclosed. The mask cassette includes a base for accommodating a plurality masks and a cover which can be separated from and coupled to the base only in one direction. When the two are coupled by a locking mechanism, the cassette can be completely closed against atmospheric pressure. The mask cassette loading device includes a common mechanism which serves to release the locking mechanism of the cassette and also, to move the cassette base relative to the cover. Thus, with a simple and compact structure, the protection and replacement of X-ray masks are ensured with certainty.

4. 发明授权

US4963921A Device for holding a mask 失效
标题翻译：用于拿着面具的装置
公开(公告)号：US4963921A
公开(公告)日：1990-10-16
申请号：US312761
申请日：1989-02-21
申请人： Takao Kariya , Hidehiko Fujioka
发明人： Takao Kariya , Hidehiko Fujioka
IPC分类号： G03F1/22 , G03F7/20
CPC分类号： G03F1/22 , G03F7/707
摘要： A device for detachably holding a mask at least a portion of which is made of a magnetic material. The device includes a holding member, on which the mask is to be held, the holding member having a portion made of a magnetic material; a first system for producing holding magnetic lines of force so as to generate a magnetic force between the magnetic portion of the holding member and the magnetic portion of the mask, to thereby hold the mask on the holding member; and a second system for producing releasing magnetic lines of force which are operative against the magnetic lines of force produced by the first system so as to reduce the same to a degree sufficient to disengage the mask from the holding member. Also, disclosed is a mask holding device for detachably holding a mask, typically for use in the manufacture of microcircuits, which device is arranged to hold the mask by use of a magnetically attracting force, the magnetically attracting force being made variably controllable so as to correct the flatness of the mask.
摘要翻译：一种用于可拆卸地保持至少一部分由磁性材料制成的掩模的装置。该装置包括保持构件，掩模将被保持在该保持构件上，保持构件具有由磁性材料制成的部分; 用于产生保持磁力线以便在保持构件的磁性部分和掩模的磁性部分之间产生磁力的第一系统，从而将掩模保持在保持构件上; 以及用于产生释放磁力线的第二系统，其抵抗由第一系统产生的磁力线操作，以将其减小到足以使掩模与保持构件脱离的程度。此外，公开了一种用于可拆卸地保持通常用于制造微电路的掩模的掩模保持装置，该装置被布置成通过使用磁吸引力来保持掩模，磁吸引力被可变地控制，从而校正面具的平整度。

5. 发明授权

US5253012A Substrate holding apparatus for vertically holding a substrate in an exposure apparatus 失效
标题翻译：用于在曝光装置中垂直保持基板的基板保持装置
公开(公告)号：US5253012A
公开(公告)日：1993-10-12
申请号：US769974
申请日：1991-10-02
申请人： Yuji Chiba , Hidehiko Fujioka
发明人： Yuji Chiba , Hidehiko Fujioka
IPC分类号： G03F7/20 , H01L21/687 , G03B27/42
CPC分类号： G03F7/70741 , G03F7/707
摘要： A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate holding member for attracting a substrate by a magnetic force or vacuum and an engaging device for engaging the substrate on the substrate holding member. The engaging device is retractably supported by or fixed to the substrate holding member, and is engageable with or engages the substrate in such a manner that the engagement between the vertically held substrate and the engaging device is maintained even if the substrate holding member ceases to attract the substrate. Thus, dropping of the substrate by gravitation is prevented even if the substrate ceases to be attracted by the substrate holding member.
摘要翻译：用于垂直保持要通过辐射曝光的基板的基板保持装置包括用于通过磁力或真空吸引基板的基板保持部件和用于将基板接合在基板保持部件上的卡合装置。接合装置由基板保持构件伸缩地支撑或固定到基板保持构件，并且可以以这样的方式接合或接合基板，使得即使基板保持构件不再吸引，也保持垂直保持的基板和接合装置之间的接合底物。因此，即使基板停止被基板保持部件吸引，也能够防止重力下降基板。

6. 发明授权

US08297583B2 Seat track mechanism for vehicle 有权
标题翻译：车辆座椅轨道机构
公开(公告)号：US08297583B2
公开(公告)日：2012-10-30
申请号：US13311877
申请日：2011-12-06
申请人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
发明人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
IPC分类号： F16M13/00
CPC分类号： B60N2/0705 , F16C29/04 , F16C33/38
摘要： A seat track mechanism for a vehicle, includes a lower rail mounted to a vehicle floor; an upper rail supported by the lower rail and slidable relative to the lower rail; and spherical rotators held between the lower and upper rails, the spherical rotators rolling via a sliding movement of the upper rail. One of the upper rail and the lower rail includes at least one horizontal flat portion parallel to a widthwise direction of the seat track mechanism and parallel to a direction of the sliding movement of the upper rail, and the other of the upper rail and the lower rail includes at least one rotator supporting recess having a circularly arcuate shape in cross section which is uniform in a lengthwise direction of the seat track mechanism, the spherical rotators being held between the rotator supporting recess and the horizontal flat portion.
摘要翻译：一种用于车辆的座椅轨道机构，包括安装在车辆地板上的下轨道; 上轨道由下轨道支撑并相对于下轨道滑动; 并且保持在下轨道和上轨道之间的球形旋转体，球形旋转体通过上轨道的滑动运动而滚动。上轨道和下轨道中的一个包括平行于座椅轨道机构的宽度方向的平行于上轨道的滑动方向的至少一个水平平面部分，并且上轨道和下轨道中的另一个导轨包括至少一个旋转器支撑凹部，该旋转体支撑凹部具有在座椅轨道机构的长度方向上均匀的横截面的圆弧形状，球形旋转体保持在旋转体支撑凹部和水平平坦部分之间。

7. 发明授权

US08251336B2 Seat track mechanism for vehicle 有权
公开(公告)号：US08251336B2
公开(公告)日：2012-08-28
申请号：US12169910
申请日：2008-07-09
申请人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
发明人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
IPC分类号： F16M13/00
CPC分类号： B60N2/0705 , F16C29/04 , F16C33/38
摘要： A seat track mechanism for a vehicle, includes a lower rail mounted to a vehicle floor; an upper rail supported by the lower rail and slidable relative to the lower rail; and spherical rotators held between the lower and upper rails, the spherical rotators rolling via a sliding movement of the upper rail. One of the upper rail and the lower rail includes at least one horizontal flat portion parallel to a widthwise direction of the seat track mechanism and parallel to a direction of the sliding movement of the upper rail, and the other of the upper rail and the lower rail includes at least one rotator supporting recess having a circularly arcuate shape in cross section which is uniform in a lengthwise direction of the seat track mechanism, the spherical rotators being held between the rotator supporting recess and the horizontal flat portion.

8. 发明申请

US20110298264A1 WALK-IN SEAT 有权
标题翻译： WALK-IN座位
公开(公告)号：US20110298264A1
公开(公告)日：2011-12-08
申请号：US12673093
申请日：2008-09-05
申请人： Koji Ito , Hidehiko Fujioka
发明人： Koji Ito , Hidehiko Fujioka
IPC分类号： B60N2/12 , B60N2/08 , B60N2/20
CPC分类号： B60N2/0705 , B60N2/0825 , B60N2/0843 , B60N2/123
摘要： A walk-in seat is provided, which has decreased number of components, and has a vacant space formed below a seat cushion so that the walk-in seat may be used even for a different-level seat track. The walk-in seat has a first control lever 171 for unlocking a first locking mechanism 100; a second control lever 181 for unlocking a second locking mechanism 100′; a memory mechanism 300 holding the first control lever 171 such that when a first upper rail 5 is located between a middle position and a foremost position with a seatback being tilted most forward, the first locking mechanism 100 is unlocked; first cable means FC operating such that when the seatback of a seat is tilted to a most forward position, the means FC drives the first control lever 171 to unlock the first locking mechanism 100; and second cable means SC transmitting operation of the first control lever 171 to the second control lever 181.
摘要翻译：提供了一种步入座椅，其具有减少的部件数量，并且在座垫下方形成有空的空间，使得即使对于不同等级的座椅轨道也可以使用步入式座椅。步行座椅具有用于解锁第一锁定机构100的第一控制杆171; 用于解锁第二锁定机构100'的第二控制杆181; 保持第一控制杆171的存储机构300，使得当第一上轨道5位于中间位置和最前方位置之间时，座椅靠背最向前倾斜，第一锁定机构100被解锁; 第一电缆装置FC操作，使得当座椅的座椅靠背倾斜到最前进位置时，装置FC驱动第一控制杆171以解锁第一锁定机构100; 第二电缆装置SC将第一控制杆171的操作传送到第二控制杆181。

9. 发明申请

US20100006733A1 SEAT TRACK MECHANISM FOR VEHICLE 有权
标题翻译：车用座椅机构
公开(公告)号：US20100006733A1
公开(公告)日：2010-01-14
申请号：US12169910
申请日：2008-07-09
申请人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
发明人： Akihiro Kimura , Hidehiko Fujioka , Hiroyuki Suzuki , Kanji Yamaguchi
IPC分类号： B60N2/07
CPC分类号： B60N2/0705 , F16C29/04 , F16C33/38
摘要： A seat track mechanism for a vehicle, includes a lower rail mounted to a vehicle floor; an upper rail supported by the lower rail and slidable relative to the lower rail; and spherical rotators held between the lower and upper rails, the spherical rotators rolling via a sliding movement of the upper rail. One of the upper rail and the lower rail includes at least one horizontal flat portion parallel to a widthwise direction of the seat track mechanism and parallel to a direction of the sliding movement of the upper rail, and the other of the upper rail and the lower rail includes at least one rotator supporting recess having a circularly arcuate shape in cross section which is uniform in a lengthwise direction of the seat track mechanism, the spherical rotators being held between the rotator supporting recess and the horizontal flat portion.
摘要翻译：一种用于车辆的座椅轨道机构，包括安装在车辆地板上的下轨道; 上轨道由下轨道支撑并相对于下轨道滑动; 并且保持在下轨道和上轨道之间的球形旋转体，球形旋转体通过上轨道的滑动运动而滚动。上轨道和下轨道中的一个包括平行于座椅轨道机构的宽度方向的平行于上轨道的滑动方向的至少一个水平平面部分，并且上轨道和下轨道中的另一个导轨包括至少一个旋转器支撑凹部，该旋转体支撑凹部具有在座椅轨道机构的长度方向上均匀的横截面的圆弧形状，球形旋转体保持在旋转体支撑凹部和水平平坦部分之间。

10. 发明授权

US5134436A Exposure control method for adjusting the temperature of a workpiece holding chuck attracting surface based on memorized data 失效
标题翻译：基于存储数据调节工件夹持吸盘表面的温度的曝光控制方法
公开(公告)号：US5134436A
公开(公告)日：1992-07-28
申请号：US648312
申请日：1991-01-29
申请人： Hidehiko Fujioka
发明人： Hidehiko Fujioka
IPC分类号： H01L21/30 , G03F7/20 , H01L21/00 , H01L21/027 , H01L21/68 , H01L21/683
CPC分类号： H01L21/6835 , G03F7/70425 , G03F7/707 , G03F7/70708 , G03F7/70866 , G03F7/70875 , H01L21/67103 , H01L21/6831
摘要： Disclosed is a method of exposure control for use in a step-and-repeat type exposure apparatus that includes a radiation source for emitting a radiation beam and a workpiece holding chuck having an attracting surface. The method includes placing a first workpiece on the attracting surface of the holding chuck so that the workpiece is attracted to and held by the holding chuck, moving the holding chuck stepwise so that different portions of the workpiece are sequentially brought to an exposure station and exposing that portion of the first workpiece placed at the exposure position, detecting the temperature of the attracting surface of the holding chuck each time a portion of the first workpiece is exposed, memorizing data related to the detected temperature, removing the first workpiece from the holding chuck and placing a second workpiece on the attracting surface of the holding chuck, moving the holding chuck, bearing the second workpiece, stepwise for exposure of different portions of the second workpiece and adjusting the temperature of the attracting surface of the holding chuck each time a portion of the second workpiece is brought to the exposure position, in accordance with the memorized data.
摘要翻译：公开了一种用于步进重复型曝光装置的曝光控制方法，该装置包括用于发射辐射束的辐射源和具有吸引表面的工件夹持卡盘。该方法包括将第一工件放置在保持卡盘的吸引表面上，使得工件被夹持卡盘吸附并保持，使夹持卡盘逐步移动，使得工件的不同部分顺序地被带到曝光站并暴露第一工件的放置在曝光位置的部分，每当第一工件的一部分露出时检测保持卡盘的吸引表面的温度，记忆与检测到的温度相关的数据，从保持卡盘移除第一工件并且将第二工件放置在保持卡盘的吸附表面上，使保持卡盘移动，承载第二工件，以逐步地暴露第二工件的不同部分，并且每次调整保持卡盘的吸引表面的温度根据存储的数据将第二工件的曝光位置置于曝光位置一个。

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