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    • 2. 发明授权
    • Method of manufacturing electronic part
    • 制造电子零件的方法
    • US07845071B2
    • 2010-12-07
    • US11072989
    • 2005-03-07
    • Hisao MorookaHideaki NinomiyaJunichi ShimamuraKazuo Nishi
    • Hisao MorookaHideaki NinomiyaJunichi ShimamuraKazuo Nishi
    • H05K3/30
    • H01L31/18H01L21/67132H05K1/0393H05K3/0058Y10T29/49117Y10T29/4913Y10T29/49131Y10T29/49144Y10T29/5193Y10T29/53174
    • The present invention provides a substrate holding method capable of contributing to improvement in performance of an electronic part. A plastic film is adhered to a holding frame by using an adhesive tape having a proper gas releasing characteristic such that total quantity of gas detected when analysis using gas chromatograph mass spectrometry (dynamic HS-GC-MS) is conducted under test conditions of 180° C. and 10 minutes is 100.5 μg/g or less in n-tetradecane. In the case where the plastic film held by the holding frame is subjected to a process of manufacturing an electronic part (for example, a solar battery), even when a process accompanying generation of heat during the manufacturing process (for example, a film forming process such as plasma CVD) is performed on the plastic film, a release amount of unnecessary gas released from the adhesive tape due to the influence of the heat is suppressed, so that deterioration in the performance of the electronic part caused by the unnecessary gas is suppressed.
    • 本发明提供能够有助于提高电子部件的性能的基板保持方法。 通过使用具有适当的气体释放特性的粘合带将塑料膜粘附到保持框架上,使得在使用气相色谱质谱(动态HS-GC-MS)进行分析时检测到的气体总量在180°的测试条件下进行 C.正十四烷中10分钟为100.5μg/ g以下。 在由保持框架保持的塑料膜经受制造电子部件(例如,太阳能电池)的处理的情况下,即使在制造过程中伴随发热的处理(例如,成膜 在塑料膜上进行等离子体CVD等工序),能够抑制由于热量的影响而从粘合带释放的不需要的气体的释放量,不利气体导致的电子部件的性能下降 被压制
    • 8. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20060113613A1
    • 2006-06-01
    • US11331160
    • 2006-01-13
    • Hideaki NinomiyaTomoki Inoue
    • Hideaki NinomiyaTomoki Inoue
    • H01L29/76
    • H01L29/404H01L29/0619H01L29/0692H01L2924/0002H01L2924/00
    • A semiconductor device disclosed herein comprises: a first base region which is of a first conductivity type; a second base region which is of a second conductivity type and which is selectively formed on a major surface of the first base region; a stopper region which is of a first conductivity type and which is formed on the major surface of the first base region, the stopper region being a predetermined distance away from the second base region and surrounding the second base region; and a ring region which is of a second conductivity type which is formed on the major surface of the first base region between the second base region and the stopper region, the ring region being spirally around the second base region and electrically connected to the second base region and the stopper region.
    • 本文公开的半导体器件包括:第一导电类型的第一基极区; 第二基极区域,其具有第二导电类型并且选择性地形成在所述第一基极区域的主表面上; 阻挡区域,其具有第一导电类型并且形成在第一基底区域的主表面上,止挡区域距第二基底区域预定距离并且围绕第二基底区域; 以及形成在所述第二基极区域和所述阻挡区域之间的所述第一基底区域的主表面上的第二导电类型的环形区域,所述环形区域围绕所述第二基极区域螺旋地且与所述第二基底区域电连接 区域和止挡区域。
    • 10. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050161768A1
    • 2005-07-28
    • US11016810
    • 2004-12-21
    • Koichi SugiyamaTomoki InoueHideaki NinomiyaMasakazu Yamaguchi
    • Koichi SugiyamaTomoki InoueHideaki NinomiyaMasakazu Yamaguchi
    • H01L29/78H01L27/04H01L27/088H01L29/423H01L29/739H01L31/113
    • H01L29/7397H01L29/4232H01L29/42372H01L29/7395
    • A semiconductor device comprises a first base layer of a first conductive type which has a first surface and a second surface; a second base layer of a second conductive type which is formed on the first surface; first and second gate electrodes which are formed by embedding an electrically conductive material into a plurality of trenches via gate insulating films, the plurality of trenches being formed such that bottoms of the trenches reach the first base layer; source layers of the first conductive type which are formed on a surface area of the second base layer so as to be adjacent to both side walls of the trench provided with the first gate electrode and one side wall of the trench provided with the second gate electrode, respectively; an emitter layer of the second conductive type which is formed on the second surface; emitter electrodes which are formed on the second base layer and the source layers; a collector electrode which is formed on the emitter layer; and first and second terminals which are electrically connected to the first and second gate electrodes, respectively.
    • 半导体器件包括具有第一表面和第二表面的第一导电类型的第一基底层; 形成在第一表面上的第二导电类型的第二基层; 通过经由栅极绝缘膜将导电材料嵌入多个沟槽而形成的第一和第二栅电极,所述多个沟槽形成为使得沟槽的底部到达第一基底层; 源极层,其形成在第二基极层的表面区域上,以与设置有第一栅电极的沟槽的两个侧壁相邻,并且设置有第二栅电极的沟槽的一个侧壁 , 分别; 形成在第二表面上的第二导电类型的发射极层; 在第二基极层和源极层上形成的发射极; 在发射极层上形成的集电极; 以及分别电连接到第一和第二栅电极的第一和第二端子。