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    • 3. 发明授权
    • Air lock for introducing substrates to and/or removing them from a treatment chamber
    • 用于将基材引入和/或将其从处理室中移出的气锁
    • US06196154B1
    • 2001-03-06
    • US09249445
    • 1999-02-12
    • Tomas BaumeckerHelmut GrimmJürgen HenrichKlaus MichaelGert RödlingJürgen Ulrich
    • Tomas BaumeckerHelmut GrimmJürgen HenrichKlaus MichaelGert RödlingJürgen Ulrich
    • C23C1600
    • C23C16/54B65G21/00C23C14/56
    • In an air lock for continuous introduction into and/or removal of workpieces from spaces (1,4) separated atmospherically, the individual substrates (3,13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3,13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3,13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (10), the substrates (3,13) in the lock chambers (7a-7m) are transported from the coating station (A) to the transfer station (B) into the treatment chamber (4) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (3,13) are removed from the transfer channels (7a-7m) by means of a transfer device (17′) and are available for further treatment in the treatment chamber (4). The treatment chamber (4) includes, for instance, of a vacuum-coating chamber in which the workpieces (3,13) as the substrates to be coated are coated by a vacuum-supported coating method.
    • 在用于从气氛分离的空间(1,4)连续引入和/或移除工件的气锁中,各个基板(3,13)通过传送通道(24)传送。 用于容纳基板(3,13)的至少一个锁定室(7a-7m)可移动地布置在输送通道(24)中。 在传送通道(24)中的基板传送期间,锁定室(7a-7m)与具有常压的外部(1)和涂覆室(4)大气分离。 气锁(2)包括具有转盘壳体(24)和锁室轮(10)的转盘锁。 在锁室轮(10)的周边设有单独的锁定室(7a-7m),其中待进入待加载室的工件(3,13)可以在正常情况下自由地接近 压力侧。 通过转动锁定室轮(10),锁定室(7a-7m)中的基板(3,13)从涂覆站(A)到转印站(B)沿直径传送到处理室(4) 与正常压力侧相反。 在传送站(B)中,通过传送装置(17')从传送通道(7a-7m)移除基板(3,13),并且可用于在处理室(4)中进一步处理。 处理室(4)例如包括真空涂布室,其中作为待涂布的基板的工件(3,13)通过真空支撑的涂覆方法被涂覆。
    • 4. 发明授权
    • Apparatus for the continuous feeding of wire to an evaporator boat
    • 将电线连续送入蒸发器船的装置
    • US5321792A
    • 1994-06-14
    • US932655
    • 1992-08-20
    • Bernhard SchonherrThomas VogtReiner GertmannHelmut GrimmGerard LobigMartin Hornung
    • Bernhard SchonherrThomas VogtReiner GertmannHelmut GrimmGerard LobigMartin Hornung
    • C23C14/24C23C14/56
    • C23C14/246
    • A coating material to be evaporated in an evaporator cell disposed in a vacuum chamber is fed in the form of a wire to the evaporator cell in accordance with the depth of the molten bath, by a wire transport including a motor-driven shaft or roller and a counter-roller mounted on a movably journaled lever which in turn is movable via an electromagnetic actuator against the force of a spring means. A wire feed tube is arranged between the wire transport which draws fusible wire from a remote supply and feeds it to the evaporator boat where the wire is evaporated for coating a band-type substrate. The feed tube has a straight section which receives the wire concentrically from the transport and a gooseneck section toward said evaporator boat which twice deflects the wire to provide three points of contact with the inner wall of the tube, thus accurately positioning the wire while preventing clogging of the outlet orifice.
    • 在设置在真空室中的蒸发器单元中要蒸发的涂层材料通过包括电动机轴或滚筒的丝线输送,根据熔池的深度以线的形式供给到蒸发器单元, 安装在可移动的轴颈上的反向辊,其可以克服弹簧装置的力通过电磁致动器移动。 送丝管布置在电线传送器之间,其从远程电源抽出可熔丝,并将其馈送到蒸发器船,其中电线被蒸发以涂覆带状衬底。 进料管具有直线部分,其从输送机同心地接收线材,并且将鹅颈部分接收到所述蒸发器舟皿,两次使线材偏转以提供与管的内壁的三个接触点,从而精确地定位线材,同时防止堵塞 的出口孔。
    • 6. 发明授权
    • Air lock for introducing substrates to and/or removing them from a treatment chamber
    • 用于将基材引入和/或将其从处理室中移出的气锁
    • US06335054B1
    • 2002-01-01
    • US09631940
    • 2000-08-03
    • Tomas BaumeckerHelmut GrimmJürgen HenrichKlaus MichaelGert RödlingJürgen Ulrich
    • Tomas BaumeckerHelmut GrimmJürgen HenrichKlaus MichaelGert RödlingJürgen Ulrich
    • C23C1400
    • C23C16/54B65G21/00C23C14/56
    • In an air lock for continuous introduction into and/or removal of workpieces from spaces (1, 4) separated atmospherically, the individual substrates (3, 13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3, 13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3, 13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (10), the substrates (3, 13) in the lock chambers (7a-7m) are transported from the coating station [sic; loading station] (A) to the transfer station (B) into the treatment chamber (4) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (3, 13) are removed from the transfer channels (7a-7m) by means of a transfer device (17′) and are available for further treatment in the treatment chamber (4).
    • 在用于从空气分离的空间(1,4)中连续引入和/或移除工件的气锁中,各个基板(3,13)通过传送通道(24)传送。 用于容纳基板(3,13)的至少一个锁定室(7a-7m)可移动地布置在输送通道(24)中。 在传送通道(24)中的基板传送期间,锁定室(7a-7m)与具有常压的外部(1)和涂覆室(4)大气分离。 气锁(2)包括具有转盘壳体(24)和锁室轮(10)的转盘锁。 在锁定室轮(10)的周边上,设置有单独的锁定室(7a-7m),其中待进入待装载室(4)的工件(3,13)在正常情况下自由地接近 压力侧。 通过转动锁定室轮(10),锁定室(7a-7m)中的基板(3,13)从涂布站传送; 装载站](A)到转运站(B)进入与正常压力侧直径相对的处理室(4)。 在转运站(B)中,借助于转移装置(17')将基板(3,13)从转移通道(7a-7m)中移出,并且可用于在处理室(4)中进一步处理。
    • 7. 发明授权
    • Stationary support device for drainage wire
    • 用于排水线的支架装置
    • US5129992A
    • 1992-07-14
    • US708391
    • 1991-05-31
    • Christian SchielHelmut Grimm
    • Christian SchielHelmut Grimm
    • D21F1/52D21F1/48
    • D21F1/486
    • A stationary support device for the drainage wire screen of a fiber web forming section. The cover ledge over which the drainage screen passes has a front edge which the screen passes and then the drainage surface beneath the wire screen diverges from the wire screen in the wire screen advancing direction. The cover ledge is of hard material. The front part of the cover ledge is supported by a support at a rigid pivot joint. The rearward part of the cover ledge is supported by wedge surface connections for permitting adjustment of the tilt orientation of the cover ledge with respect to the drainage wire. Leaf type clamping springs disposed between the cover ledge and the support, disposed rearwardly of the front joint and disposed forwardly of the wedge surface connections. The clamping leaf springs being connected to the cover ledge by tie rods at the center of the spring and to the support by tie rods at the ends of the springs. In an alternate embodiment, the clamping element is an expandable pressure hose connected at opposite sides by tie rods to the cover ledge and to the support. A ball and socket joint enables the slide disk and the wedge shaped angle inclination surfaces to seat together.
    • 一种用于纤维网形成部分的排水丝网的固定支撑装置。 排水屏幕通过的盖子边缘具有屏幕通过的前边缘,然后丝网下面的排水表面在丝网前进方向上从丝网分离。 盖子是硬质材料。 盖凸缘的前部由刚性枢轴接头处的支撑件支撑。 盖板的后部由楔形表面连接支撑,以允许相对于排水线调节盖板的倾斜方向。 翼型夹紧弹簧设置在盖凸缘和支撑件之间,设置在前接头的后面并且设置在楔形表面连接的前方。 夹紧板簧通过在弹簧中心处的拉杆连接到盖凸缘,并且在弹簧的端部处通过拉杆连接到支撑件。 在替代实施例中,夹紧元件是可伸缩的压力软管,其在相对侧通过拉杆连接到盖凸缘和支撑件。 球窝接头可使滑盘和楔形角度倾斜面座合在一起。
    • 9. 发明授权
    • Electrode arrangement
    • 电极排列
    • US06881270B1
    • 2005-04-19
    • US09710769
    • 2000-11-09
    • Thomas GebeleJurgen HenrichStefan BangertJürgen HonekampElisabeth BudkeJürgen UlrichHelmut Grimm
    • Thomas GebeleJurgen HenrichStefan BangertJürgen HonekampElisabeth BudkeJürgen UlrichHelmut Grimm
    • C23C14/24C23C14/32H01J37/32C23C16/00H05H1/02
    • H01J37/32055C23C14/325H01J37/32422H01J37/32532
    • An electrode arrangement for the plasma-aided coating of a substrate (3) with a layer of material comprising at least one first and a second material component and for the production of a plasma discharge, more especially an arc discharge (35), having an anode arrangement (5), which provides the first material component at an anode material surface (13) for evaporation, and a cathode arrangement (7), which provides the second material component at a cathode material surface (25). The electrode arrangement is characterized in that the cathode material surface (25) is constituted by an evaporation-active part (27) supporting the plasma discharge (35) and an evaporation-inactive part (41) not supporting the plasma discharge. Preferably, a motion-producing means (49) is provided for moving the evaporation-inactive part (41) over the cathode material surface (25) in order to reduce deposit of material due to he first material component on the cathode material surface (25).
    • 一种用于衬底(3)的等离子体辅助涂层的电极装置,其具有包括至少一种第一和第二材料组分的材料层,并且用于产生等离子体放电,更特别是电弧放电(35),具有 阳极装置(5),其在用于蒸发的阳极材料表面(13)处提供第一材料部件,以及在阴极材料表面(25)处提供第二材料部件的阴极装置(7)。 电极装置的特征在于,阴极材料表面(25)由支撑等离子体放电(35)的蒸发活性部分(27)和不支持等离子体放电的蒸发非活性部分(41)构成。 优选地,提供运动产生装置(49),用于将蒸发非活性部分(41)移动到阴极材料表面(25)上,以便减少由于第一材料成分在阴极材料表面(25)上沉积的材料 )。