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    • 4. 发明授权
    • Series evaporator for vacuum vapor-deposition apparatus
    • 真空蒸镀装置系列蒸发器
    • US5068915A
    • 1991-11-26
    • US574596
    • 1990-08-29
    • Jochen HeinzThomas KrugKlemens RuebsamHans Kessler
    • Jochen HeinzThomas KrugKlemens RuebsamHans Kessler
    • C23C14/24C23C14/26
    • C23C14/243C23C14/26
    • A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face. The spring elements themselves are held and guided in an insulating manner with respect to the support bodies 6 or are made of an insulating material, and the conducting wires 7 connected to these supply lines 4 are conductors passed through by a coolant or are configured as cooling tubes 11 or cooling pipes running parallel to the conducting wires and discharging into chambers or channels 12 provided in the supply lines 4.
    • 用于真空气相沉积装置的串联蒸发器具有多个蒸发器5,具有单独的功率控制,通过通过支撑在柱状供电线3,4上的电流加热,其中柱状供应管线3,4由 在串联蒸发器的整个长度上延伸的导电支撑体6。 一个极性的供电线3以导电方式连接到支撑体6,而另一极性的供应线4以绝缘方式穿过支撑体6并连接到布置在绝缘的导线7中 方式。 弹簧元件8通过播放a,b向供应线路4施加横穿支撑体6的压力,这些弹簧元件的作用大致平行于蒸发器的纵向延伸并且将供应线路4的顶部9按压 它们面对的蒸发器5的前表面10。 弹簧元件本身相对于支撑体6以绝缘方式被保持和引导,或者由绝缘材料制成,并且连接到这些供应线路4的导线7是导体通过冷却剂或被构造成冷却 管11或冷却管平行于导线延伸并排放到设置在供应管线4中的室或通道12中。