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    • 1. 发明申请
    • Semiconductor processing method for processing substrate to be processed and its apparatus
    • 用于处理待处理衬底的半导体加工方法及其装置
    • US20050272271A1
    • 2005-12-08
    • US10523974
    • 2004-02-04
    • Haruhiko FuruyaYuihiro MorozumiHiroaki IkegawaMakoto HirayamaYuichi Ito
    • Haruhiko FuruyaYuihiro MorozumiHiroaki IkegawaMakoto HirayamaYuichi Ito
    • C23C16/44H01L21/30H01L21/31H01L21/46H01L21/469
    • C23C16/44
    • A method for processing a target substrate (10) in a semiconductor processing apparatus (1) controls temperature of a first substrate (10) at a process temperature inside a process container (2), while supplying a process gas into the process container, thereby subjecting the first substrate to a semiconductor process, during which a by-product film is formed inside the process container. After the semiconductor process and unload of the first substrate (10) out of the process container (2), a reforming gas is supplied into the process container, thereby subjecting the by-product film to a reformation process, which is set to reduce thermal reflectivity of the by-product film. After the reformation process, temperature of a second substrate (10) is controlled at the process temperature inside the process container (2), while supplying the process gas into the process container, thereby subjecting the second substrate to the semiconductor process.
    • 在半导体处理装置(1)中处理目标衬底(10)的方法在处理容器(2)内的处理温度下控制第一衬底(10)的温度,同时将处理气体供应到处理容器中,从而 使第一基板经受半导体工艺,在该过程中,在处理容器内部形成副产物膜。 在半导体处理和将第一基板(10)从工艺容器(2)中卸载之后,将重整气体供给到处理容器中,从而使副产物膜进行重整过程,该过程设定为减少热 副产品薄膜的反射率。 在改造过程之后,在处理容器(2)内的处理温度下控制第二基板(10)的温度,同时将处理气体供应到处理容器中,从而使第二基板进行半导体处理。
    • 2. 发明授权
    • System and method for retrieving and presenting speech information
    • 用于检索和呈现语音信息的系统和方法
    • US06249764B1
    • 2001-06-19
    • US09257327
    • 1999-02-25
    • Takahiko KamaeMakoto Hirayama
    • Takahiko KamaeMakoto Hirayama
    • G10L1522
    • G06F17/30882G06F17/30014G10L15/22G10L15/30
    • In the method, speech files each representing speech information are provided. At least one of the speech files is a hyperspeech file that represents speech information and includes a hot spot specification specifying a hot spot in the speech information. The hot spot identifies additional speech information. The hot spot specification comprises a hot spot definition defining the hot spot and an identifier identifying another of the speech files that represents the additional speech information. A speech information presentation operation is iteratively performed until the desired speech information is presented. In this operation, a speech file retrieval operation that retrieves one of the speech files is performed, any hot spot specification in the speech file is extracted, a speech signal is generated from the speech file, and the speech information is presented in response to the speech signal. The speech signal includes a distinguishing portion that distinguishes each hot spot from the remainder of the speech information when the speech information is presented. When the speech information presented is not the desired speech information, a user request signal is provided during the hot spot to request presentation of the additional speech information identified by the speech information presented during the hot spot. The identifier included in the hot spot specification is referenced in response to the user request signal. The identifier identifies the speech file to be retrieved when the speech file retrieval operation is next performed.
    • 在该方法中,提供各自表示语音信息的语音文件。 语音文件中的至少一个是表示语音信息的超音阶文件,并且包括指定语音信息中的热点的热点规范。 热点识别额外的语音信息。 热点规范包括定义热点的热点定义和识别表示附加语音信息的另一语音文件的标识符。 迭代地执行语音信息呈现操作,直到呈现期望的语音信息。 在该操作中,执行检索语音文件之一的语音文件检索操作,提取语音文件中的任何热点指定,从语音文件生成语音信号,并响应于该语音信息呈现语音信息 语音信号。 语音信号包括在呈现语音信息时区分每个热点与语音信息的其余部分的区分部分。 当所呈现的语音信息不是期望的语音信息时,在热点期间提供用户请求信号,以请求呈现由热点期间呈现的语音信息识别的附加语音信息。 响应于用户请求信号参考热点规范中包括的标识符。 当下次执行语音文件检索操作时,标识符标识要检索的语音文件。