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    • 1. 发明授权
    • Micromechanical component, in particular a sensor element, having a stabilized membrane and a method of producing such a component
    • 具有稳定膜的微机械部件,特别是传感器元件和制造这种部件的方法
    • US07276277B2
    • 2007-10-02
    • US09886522
    • 2001-06-21
    • Hans ArtmannRobert Siegel
    • Hans ArtmannRobert Siegel
    • H01L21/36
    • G01K7/028Y10T428/24322Y10T428/24479Y10T428/24562Y10T428/24612Y10T428/26
    • A micromechanical component and a method of producing same are described; the component has a supporting body, in particular a silicon body, and a membrane which is connected to the supporting body and is unsupported at least in some areas. The membrane is also provided with at least one stabilizing element in an unsupported area in some areas of the surface. The method described here includes the following process steps: a) forming a first area within the supporting body including at least a first surface area of the supporting body; b) forming a second surface area of the supporting body which is in the first surface area in at least some areas; c) selective etching of the first area down to an adjustable depth, forming porous silicon, the second surface area being at least almost not etched; d) depositing a membrane layer on the surface of the supporting body, with the membrane layer covering the first area that has been rendered porous in at least some areas and covering the second surface area in at least some areas, and e) selectively removing the first area which has been rendered porous.
    • 描述微机械部件及其制造方法; 该部件具有支撑体,特别是硅体,以及连接到支撑体并至少在一些区域中不被支撑的膜。 膜还在表面的一些区域中在非支撑区域中设置有至少一个稳定元件。 这里描述的方法包括以下工艺步骤:a)在支撑体内形成至少包括支撑体的第一表面区域的第一区域; b)形成在至少一些区域中位于第一表面区域中的支撑体的第二表面区域; c)将第一区域选择性蚀刻到可调节的深度,形成多孔硅,第二表面区域至少几乎不被蚀刻; d)在所述支撑体的表面上沉积膜层,所述膜层覆盖至少一些区域中已被多孔的第一区域并覆盖至少一些区域中的第二表面区域,以及e)选择性地去除 第一个已经被多孔的区域。
    • 2. 发明授权
    • Method for producing a diaphragm sensor array and diaphragm sensor array
    • 隔膜传感器阵列和隔膜传感器阵列的制造方法
    • US06506621B1
    • 2003-01-14
    • US10016026
    • 2001-12-12
    • Hans ArtmannThorsten PannekRobert Siegel
    • Hans ArtmannThorsten PannekRobert Siegel
    • H01L2100
    • G01J5/06B81B3/0081B81B2203/0127B81B2203/0315B81C2201/0115B81C2201/0136G01J5/10
    • In a method for producing a diaphragm sensor array having a semiconductor material substrate on which a plurality of planar diaphragm regions is arranged as a carrier layer for sensor elements, the planar diaphragm regions are thermally decoupled from one another by crosspieces made of a material having clearly better heat conductive properties compared to the diaphragm regions and the lateral surroundings of the crosspieces. Masking for a subsequent step for producing porous semiconductor material is applied at the locations of the semiconductor material substrate at which the crosspieces for the thermal decoupling are formed, and the semiconductor regions not protected by the masking are rendered porous and the diaphragm regions are produced thereupon. Instead of using porous silicon, a plasma etching process may be performed from the backside of a semiconductor material substrate. In particular, high integration densities of diaphragm sensors may be achieved with both methods. A diaphragm sensor array is produced by one of the methods.
    • 在具有半导体材料基板的膜片传感器阵列的制造方法中,多个平面膜片区域被布置为传感器元件的载体层,平面隔膜区域通过由具有清楚的材料制成的横条而彼此热分离 与隔膜区域和横梁的横向周围相比,具有更好的导热性能。 在用于制造多孔半导体材料的后续步骤中的掩模被应用于半导体材料基板的用于形成用于热解耦的接头的位置处,并且未被掩蔽保护的半导体区域变得多孔,并且在其上产生隔膜区域 。 代替使用多孔硅,可以从半导体材料基板的背面进行等离子体蚀刻工艺。 特别地,可以通过两种方法实现膜片传感器的高集成度。 通过这些方法之一产生膜片传感器阵列。
    • 3. 发明申请
    • Interleaved magnetometry and pulsed electromagnetic detection of underground objects
    • 地下物体的交错磁力计和脉冲电磁检测
    • US20050110496A1
    • 2005-05-26
    • US10929730
    • 2004-08-30
    • Robert SiegelAlan CrandallGilbert Johnson
    • Robert SiegelAlan CrandallGilbert Johnson
    • G01V3/15G01V11/00G01N27/82
    • G01V11/00G01V3/15
    • Magnetometry and pulsed electromagnetic radiation (EM) may be employed during a same survey pass by synchronously interleaving the collection of magnetometer data with pulses from EM sensors. For example, one or more magnetometers may be sampled between pulses of one or more EM coils such that the data from the one or more magnetometers is substantially free of artifacts from the pulsed EM radiation. A detection system may include a vehicle capable of locomotion over a surface of earth, a mount coupled to the vehicle, the mount including at least one magnetometer, at least one EM sensor adapted to produce pulses of EM radiation, and a controller adapted to interleave collection of data from the at least one magnetometer between the pulses of EM radiation.
    • 可以在同一测量过程中使用磁力计和脉冲电磁辐射(EM),通过同步地将磁力计数据的收集与来自EM传感器的脉冲进行交错。 例如,可以在一个或多个EM线圈的脉冲之间采样一个或多个磁力计,使得来自一个或多个磁力计的数据基本上没有来自脉冲EM辐射的假象。 检测系统可以包括能够在地球表面上移动的车辆,耦合到车辆的安装件,该安装件包括至少一个磁力计,适于产生EM辐射脉冲的至少一个EM传感器,以及适于交错的控制器 在EM辐射的脉冲之间收集来自至少一个磁力计的数据。
    • 4. 发明授权
    • Method of using a catheter for delivery of ultrasonic energy and medicament
    • 使用导管输送超声能量和药物的方法
    • US06689086B1
    • 2004-02-10
    • US09363778
    • 1999-07-29
    • Henry NitaTimothy MillsRobert Siegel
    • Henry NitaTimothy MillsRobert Siegel
    • A61B1720
    • A61B17/22012A61B2017/22014A61B2017/22084
    • An ultrasound delivery catheter equipped and configured for concurrent delivery of drugs or therapeutic agents. The catheter comprises an elongate pliable catheter body having an ultrasound delivery member or wire extending longitudinally therethrough. A drug/therapeutic agent infusion lumen also extends longitudinally through the body of the catheter and opens distally through one or more outflow apertures at or near the distal end of the catheter body. The drug/therapeutic agent outflow apertures are preferably positioned and configured to cause the drug or therapeutic agent to flow in direction(s) non-parallel to the longitudinal axis of the catheter. The delivery of ultrasound through the catheter, concurrent with infusion of drug or therapeutic agent therethrough, will cause the drug or therapeutic agent to be disseminated or dispersed by the ultrasonic vibration or movement at the distal end of the catheter.
    • 配备并配置用于药物或治疗剂的并发递送的超声输送导管。 该导管包括细长的柔韧导管体,其具有纵向穿过其延伸的超声传送构件或导线。 药物/治疗剂输注腔也纵向延伸通过导管的主体并且通过导管主体的远端处或附近的一个或多个流出孔向远侧开口。 药物/治疗剂流出孔优选地定位和构造成使得药物或治疗剂在不平行于导管的纵向轴线的方向上流动。 通过导管输送超声波,同时通过药物或治疗剂的输注,将导致药物或治疗剂通过超声波振动或运动在导管远端进行弥散或分散。
    • 8. 发明申请
    • Universal vise mounting system for add-on accessory jaws
    • 通用虎钳安装系统,用于附加附件夹爪
    • US20060055098A1
    • 2006-03-16
    • US11225773
    • 2005-09-13
    • Robert Siegel
    • Robert Siegel
    • B25B5/16
    • B25B1/2421B25B1/2452
    • An accessory vise jaw mounting system that attaches to a conventional vise having a unique means of mounting, using a set of accessory jaw brackets, front and rear, with special mounting provisions for each, capable of supporting and positioning an interchangeable set of accessory jaw faces. The system can accommodate a variety of specialized jaw faces including a set of vise accessory jaws that holds and stabilizes a wide variety of irregularly shaped objects by means of opposing arrays of spring-loaded pins. The jaws are designed to be interchangeable to accommodate work ranging from delicate to heavy-duty.
    • 一种附件虎钳夹爪安装系统,其附接到具有独特装置的传统虎钳,使用一组附件夹具支架,前后配有各自的特殊安装部件,能够支撑和定位可互换的一组附件钳口面 。 该系统可以容纳各种专门的颚面,包括一组虎钳附件爪,其通过相对的弹簧加载销的阵列来保持和稳定各种不规则形状的物体。 钳口设计为可互换,以适应从微妙到重型的工作。