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    • 4. 发明申请
    • ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME
    • 使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
    • US20100147684A1
    • 2010-06-17
    • US12503647
    • 2009-07-15
    • Jin Ah PARKSu Jae LeeJae Hyun MoonTae Hyoung Zhung
    • Jin Ah PARKSu Jae LeeJae Hyun MoonTae Hyoung Zhung
    • G01N27/26B05D5/12
    • G01N27/127
    • An ultra-sensitive gas sensor using semiconductor oxide nanofibers and a method of fabricating the same are provided. The gas sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a semiconductor metal oxide nanofibers layer formed on the metal electrode and having nanoparticles of high sensitivity coated thereon. The method of fabricating a semiconductor oxide nanofibers gas sensor includes fabricating an oxide using a solution for electrospinning, electrospinning the solution, performing an annealing process to form an oxide semiconductor nanofiber, and partially coating a nano-sized metal oxide or metal catalyst particle having high sensitivity to a specific gas on a surface of the nanofiber having a large specific surface area. As a result, a semiconductor oxide nanofibers gas sensor having ultra sensitivity, high selectivity, fast response and long-term stability can be fabricated.
    • 提供了使用半导体氧化物纳米纤维的超灵敏气体传感器及其制造方法。 气体传感器包括绝缘基板,形成在绝缘基板上的金属电极和形成在金属电极上并具有高敏感度的纳米颗粒的半导体金属氧化物纳米纤维层。 制造半导体氧化物纳米纤维气体传感器的方法包括使用静电纺丝溶液,静电纺丝溶液制造氧化物,进行退火处理以形成氧化物半导体纳米纤维,并部分涂覆具有高的氧化物半导体纳米纤维的纳米尺寸的金属氧化物或金属催化剂颗粒 对具有大比表面积的纳米纤维的表面上的特定气体的敏感性。 结果,可以制造具有超灵敏度,高选择性,快速响应和长期稳定性的半导体氧化物纳米纤维气体传感器。
    • 9. 发明申请
    • CAPACITIVE GAS SENSOR AND METHOD OF FABRICATING THE SAME
    • 电容式气体传感器及其制造方法
    • US20100133528A1
    • 2010-06-03
    • US12502824
    • 2009-07-14
    • Jaehyun MOONSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • Jaehyun MOONSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • H01L29/22H01L21/28
    • G01N27/227Y10S977/921
    • A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
    • 提供了一种电容式气体传感器及其制造方法。 电容性气体传感器包括绝缘基板,金属电极和整体形成在绝缘基板的同一平面上的微薄膜加热丝,以及涂覆在金属电极和微薄膜加热丝上的氧化物检测层。 该制造方法包括在绝缘基板上沉积金属层,蚀刻金属层,使得金属电极和微薄膜加热丝线在同一平面上形成叉指式换能器,并形成纳米晶体复合氧化物薄膜或 金属电极上的复合氧化物纳米纤维涂层和微薄膜加热丝作为检测层。 电容气体传感器可以容易地制造,并且可以具有优异的特性,例如高灵敏度,高选择性,高稳定性和低功耗。
    • 10. 发明授权
    • Capacitive gas sensor and method of fabricating the same
    • 电容式气体传感器及其制造方法
    • US07816681B2
    • 2010-10-19
    • US12502824
    • 2009-07-14
    • Jaehyun MoonSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • Jaehyun MoonSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • H01L21/28H01L29/22
    • G01N27/227Y10S977/921
    • A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
    • 提供了一种电容式气体传感器及其制造方法。 电容性气体传感器包括绝缘基板,金属电极和整体形成在绝缘基板的同一平面上的微薄膜加热丝,以及涂覆在金属电极和微薄膜加热丝上的氧化物检测层。 该制造方法包括在绝缘基板上沉积金属层,蚀刻金属层,使得金属电极和微薄膜加热丝线在同一平面上形成叉指式换能器,并形成纳米晶体复合氧化物薄膜或 金属电极上的复合氧化物纳米纤维涂层和微薄膜加热丝作为检测层。 电容气体传感器可以容易地制造,并且可以具有优异的特性,例如高灵敏度,高选择性,高稳定性和低功耗。